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1. 发明申请

US20050042881A1 Processing apparatus 审中-公开
标题翻译：处理装置
公开(公告)号：US20050042881A1
公开(公告)日：2005-02-24
申请号：US10843295
申请日：2004-05-12
申请人： Shinya Nishimoto , Masakazu Higuma , Shinji Muto , Hisashi Fujiwara , Hiroyuki Nakayama , Yoshinori Shimanuki
发明人： Shinya Nishimoto , Masakazu Higuma , Shinji Muto , Hisashi Fujiwara , Hiroyuki Nakayama , Yoshinori Shimanuki
IPC分类号： H01L21/00 , H01L21/683 , H01L21/68
CPC分类号： H01L21/67248 , H01L21/6833
摘要： The time period during which a wafer is stabilized to a predetermined temperature by increasing a thermal conductivity of a junction layer for bonding an electrostatic chuck layer and a support together, and the deterioration of the junction layer that is caused by active species generated by plasma is suppressed. Between the electrostatic chuck layer formed by sintering together a chuck electrode made of tungsten and an insulating layer made of alumina and the support, made of aluminum, for supporting the electrostatic chuck layer, the junction layer is provided to bond the electrostatic chuck layer and the support together. The junction layer is formed by impregnating a porous ceramic with a silicone-based adhesive resin. Further, rubber or a heat shrink tube made of a fluoric resin such as PFA is provided as a soft coating member so as to coat a side circumferential surface of the junction layer and the side circumferential surfaces of the electrostatic chuck layer and the support come into a tight contact with the heat shrink tube or rubber.
摘要翻译：通过增加用于将静电卡盘层和支撑体接合在一起的接合层的热导率，并且由等离子体产生的活性物质引起的接合层的劣化，晶片稳定在预定温度的时间段是被压制在通过烧结在由钨制成的卡盘电极和由氧化铝制成的绝缘层上形成的静电卡盘层和由铝制成的用于支撑静电卡盘层的支撑件之间设置接合层以将静电卡盘层和一起支持接合层通过用硅氧烷基粘合剂树脂浸渍多孔陶瓷而形成。此外，作为软涂层，设置橡胶或由诸如PFA的氟树脂制成的热收缩管，以覆盖接合层的侧周面，并且静电卡盘层和支撑体的侧周面进入与热缩管或橡胶紧密接触。

2. 发明授权

US08636873B2 Plasma processing apparatus and structure therein 有权
标题翻译：等离子体处理装置及其结构
公开(公告)号：US08636873B2
公开(公告)日：2014-01-28
申请号：US12046723
申请日：2008-03-12
申请人： Masakazu Higuma , Shinji Muto
发明人： Masakazu Higuma , Shinji Muto
IPC分类号： C23F1/00 , H01L21/306 , C23C16/00
CPC分类号： C23C16/4581 , C23C16/5096
摘要： A structure, for use in a processing chamber of a plasma processing apparatus in which a plasma process is performed on a target substrate, includes a base member at least having a first surface and a second surface; and a thermally sprayed insulating film covering the first surface. Further, the structure includes an insulating protection member covering the second surface and made of a material having a linear expansion coefficient different from that of the base member; and an insulating layer interposed between the thermally sprayed insulating film and the insulating protection member to prevent a contact therebetween. The thermally sprayed insulating film, the insulating protection member and the insulating layer constitute an insulating surface covering the first surface and the second surface.
摘要翻译：一种在目标基板上进行等离子体处理的等离子体处理装置的处理室中使用的结构，具有至少具有第一面和第二面的基材，以及覆盖所述第一表面的热喷涂绝缘膜。此外，该结构包括覆盖第二表面并由具有不同于基底构件的线性膨胀系数的材料制成的绝缘保护构件; 以及插入在所述热喷镀绝缘膜和所述绝缘保护构件之间以防止它们之间接触的绝缘层。绝热保护部件和绝缘层的热喷镀绝缘膜构成覆盖第一面和第二面的绝缘面。

3. 发明申请

US20080230181A1 PLASMA PROCESSING APPARATUS AND STRUCTURE THEREIN 有权
标题翻译：等离子体加工设备及其结构
公开(公告)号：US20080230181A1
公开(公告)日：2008-09-25
申请号：US12046723
申请日：2008-03-12
申请人： Masakazu HIGUMA , Shinji Muto
发明人： Masakazu HIGUMA , Shinji Muto
IPC分类号： H01L21/3065 , C23C16/452
CPC分类号： C23C16/4581 , C23C16/5096
摘要： A structure, for use in a processing chamber of a plasma processing apparatus in which a plasma process is performed on a target substrate, includes a base member at least having a first surface and a second surface; and a thermally sprayed insulating film covering the first surface. Further, the structure includes an insulating protection member covering the second surface and made of a material having a linear expansion coefficient different from that of the base member; and a buffing surface covered with an insulating layer interposed between the thermally sprayed insulating film and the insulating protection member to prevent a contact therebetween. The thermally sprayed insulating film, the insulating protection member and the insulating layer constitute an insulating surface covering the first surface and the second surface.
摘要翻译：一种在目标基板上进行等离子体处理的等离子体处理装置的处理室中使用的结构，具有至少具有第一面和第二面的基材，以及覆盖所述第一表面的热喷涂绝缘膜。此外，该结构包括覆盖第二表面并由具有不同于基底构件的线性膨胀系数的材料制成的绝缘保护构件; 以及抛光表面，覆盖有插入在所述热喷镀绝缘膜和所述绝缘保护构件之间的绝缘层，以防止其间的接触。绝热保护部件和绝缘层的热喷镀绝缘膜构成覆盖第一面和第二面的绝缘面。

4. 发明授权

US08225569B2 Foam filling member 有权
标题翻译：泡沫填充件
公开(公告)号：US08225569B2
公开(公告)日：2012-07-24
申请号：US12805998
申请日：2010-08-27
申请人： Kazuhiko Kinpara , Shinji Muto , Shinpei Nishikawa , Takehiro Ui
发明人： Kazuhiko Kinpara , Shinji Muto , Shinpei Nishikawa , Takehiro Ui
IPC分类号： B28B7/28 , B29C33/40
CPC分类号： B62D29/002 , B29C44/18 , B60R13/0815 , Y10T403/604 , Y10T428/24215
摘要： A foam filling member that can hold a foam sheet in a looped shape stably, without increasing the number of components, to provide improved vibration suppression and sound insulation. The strip-like foam sheet is formed in a looped shape by bending round it, so that both end portions of the foam sheet are overlapped with each other in a thickness direction thereof to form an overlapped portion therein. Then, insertion shafts of a clip are inserted through the overlapped portion, so that the overlapped portion is held in sandwich relation between a base portion and a head portion to form a foam filling member. Then, a supporting portion of the fixing portion of the clip is inserted in a fixing hole of an inner panel and fixed to the inner panel. After the inner panel and an outer panel are welded, the foam filling member is foamed, cross-linked, and cured by heating in a drying line process at the baking finish, to thereby produce the foam, whereby the interior space of the pillar is filled up with the foam, leaving no space therein.
摘要翻译：一种泡沫填充构件，其可以稳定地将发泡片材保持在环形状态，而不增加部件的数量，以提供改进的振动抑制和隔音。带状发泡片通过弯曲形成为环状，使得发泡片的两个端部在其厚度方向上彼此重叠以在其中形成重叠部分。然后，夹子的插入轴穿过重叠部分，使得重叠部分在基部和头部之间保持夹层关系，以形成泡沫填充构件。然后，夹子的固定部分的支撑部分插入到内板的固定孔中并固定到内板上。在内面板和外板被焊接之后，泡沫填充构件通过在烘烤完成时的干燥线工艺中加热而发泡，交联和固化，从而产生泡沫，由此柱的内部空间是充满泡沫，不留空间。

5. 发明申请

US20100325994A1 Foam filling member 有权
公开(公告)号：US20100325994A1
公开(公告)日：2010-12-30
申请号：US12805997
申请日：2010-08-27
申请人： Kazuhiko Kinpara , Shinji Muto , Shinpei Nishikawa , Takehiro Ul
发明人： Kazuhiko Kinpara , Shinji Muto , Shinpei Nishikawa , Takehiro Ul
IPC分类号： E04C2/20
CPC分类号： B62D29/002 , B29C44/18 , B60R13/0815 , Y10T403/604 , Y10T428/24215
摘要： A foam filling member that can hold a foam sheet in a looped shape stably, without increasing the number of components, to provide improved vibration suppression and sound insulation. The strip-like foam sheet is formed in a looped shape by bending round it, so that both end portions of the foam sheet are overlapped with each other in a thickness direction thereof to form an overlapped portion therein. Then, insertion shafts of a clip are inserted through the overlapped portion, so that the overlapped portion is held in sandwich relation between a base portion and a head portion to form a foam filling member. Then, a supporting portion of the fixing portion of the clip is inserted in a fixing hole of an inner panel and fixed to the inner panel. After the inner panel and an outer panel are welded, the foam filling member is foamed, cross-linked, and cured by heating in a drying line process at the baking finish, to thereby produce the foam, whereby the interior space of the pillar is filled up with the foam, leaving no space therein.

6. 发明授权

US07527850B2 Foam filling member 有权
标题翻译：泡沫填充件
公开(公告)号：US07527850B2
公开(公告)日：2009-05-05
申请号：US11119747
申请日：2005-05-03
申请人： Shinji Muto , Kazuhiko Kinpara , Takehiro Ui
发明人： Shinji Muto , Kazuhiko Kinpara , Takehiro Ui
IPC分类号： B32B3/24
CPC分类号： B62D29/002 , Y10T428/24273 , Y10T428/24314
摘要： A foam filling member having a foaming base material in sheet form which is simplified in structure so that it can be formed into a predetermined shape corresponding to a shape of a space of a structure with an improved working efficiency and can also be placed in a space of the structure with an improved working efficiency, without any need of the sticking to a wall surface of a partition wall defining the space of the structure. Incisions 4, 5, 6, 7, cut in partway along a thickness direction of the foaming base material 2 along a bending portion and cuts 9, 10 passing through in the thickness direction are formed in the foaming base material 2. By simply bending or folding the foaming base material 2 along the incisions 4, 5, 6, 7 and the cuts 9, 10, the foam filling member 1 can be formed in a three-dimensional shape corresponding to an interior space of a pillar and thus can be set in place in the interior space. By foaming the foaming base material 2 thus placed in the interior space, the foam can be filled up in the interior space, leaving no space therein.
摘要翻译：一种泡沫填充构件，其具有片状的发泡基材，其结构简化，使得其可以形成为对应于具有改善的工作效率的结构的空间形状的预定形状，并且也可以放置在空间的结构，具有改进的工作效率，而不需要粘附到限定结构空间的隔壁的壁表面。切口4,5,6,7沿着弯曲部沿着发泡基材2的厚度方向中途切割，并且在发泡基材2中形成有沿厚度方向穿过的切口9,10。通过简单的弯曲或沿着切口4,5,6,7和切口9,10折叠发泡基材2，泡沫填充构件1可以形成为对应于柱的内部空间的三维形状，因此可以设定在内部空间。通过将由此放置在内部空间中的发泡基材2发泡，可以在内部空间中填充泡沫，在其中不留下空间。

7. 发明授权

US07335413B2 Foam filling member 有权
标题翻译：泡沫填充件
公开(公告)号：US07335413B2
公开(公告)日：2008-02-26
申请号：US11119707
申请日：2005-05-03
申请人： Takehiro Ui , Shinji Muto , Kazuhiko Kinpara
发明人： Takehiro Ui , Shinji Muto , Kazuhiko Kinpara
IPC分类号： B32B3/06
CPC分类号： B62D29/002 , Y10T428/24008 , Y10T428/24017 , Y10T428/24182 , Y10T428/249953 , Y10T428/249987
摘要： A foam filling member having simplified structure is provided that may be produced with improved working efficiency and at low cost. Additionally, the invention enables a reduction in a quantity of foaming material of the foaming base used for filling an interior space of a structure. The foam filling member has an annular wall formed on a supporting plate and an annular foaming portion of the foaming base supported on an outer supporting portion located at the outside of the annular wall on the supporting plate. A plurality of openings are formed in the annular wall and also lugs are formed that project into an inner closed portion at the inside of the annular wall through the respective openings.
摘要翻译：提供具有简化结构的泡沫填充构件，其可以以更高的工作效率和低成本生产。此外，本发明能够减少用于填充结构的内部空间的发泡基质的发泡材料的量。泡沫填充构件具有形成在支撑板上的环形壁和支撑在位于支撑板上的环形壁的外侧的外部支撑部分上的发泡基底的环形发泡部分。在环形壁中形成有多个开口，并且还形成有通过相应开口突出到环形壁内侧的内封闭部分的凸耳。

8. 发明授权

US09709084B2 Clip and elastic body attachment component 有权
公开(公告)号：US09709084B2
公开(公告)日：2017-07-18
申请号：US14124476
申请日：2012-06-05
申请人： Masakazu Kato , Shinji Muto , Kei Akazawa , Yoshimichi Matudaira
发明人： Masakazu Kato , Shinji Muto , Kei Akazawa , Yoshimichi Matudaira
IPC分类号： A41F1/00 , F16B2/22 , F16B5/06 , F16B21/08
CPC分类号： F16B2/22 , F16B5/0614 , F16B21/086 , Y10T24/44291 , Y10T29/49826
摘要： A clip includes a pair of holding members arranged oppositely to one another to be capable of holding an elastic body therebetween, a base member, to which end portions of one side of the pair of holding members are coupled and at least one of the holding members is pivotably coupled, set on an object to be fixed, and pressing members provided on the holding members for pressing/retaining the elastic member between the pair of holding members.

9. 发明授权

US07985459B2 Foam filling member 有权
标题翻译：泡沫填充件
公开(公告)号：US07985459B2
公开(公告)日：2011-07-26
申请号：US12382922
申请日：2009-03-26
申请人： Shinji Muto , Kazuhiko Kinpara , Takehiro Ui
发明人： Shinji Muto , Kazuhiko Kinpara , Takehiro Ui
IPC分类号： B32B3/24
CPC分类号： B62D29/002 , Y10T428/24273 , Y10T428/24314
摘要： A foam filling member having a foaming base material in sheet form which is simplified in structure so that it can be formed into a predetermined shape corresponding to a shape of a space of a structure with an improved working efficiency and can also be placed in a space of the structure with an improved working efficiency, without any need of the sticking to a wall surface of a partition wall defining the space of the structure. Incisions 4, 5, 6, 7, cut in partway along a thickness direction of the foaming base material 2 along a bending portion and cuts 9, 10 passing through in the thickness direction are formed in the foaming base material 2. By simply bending or folding the foaming base material 2 along the incisions 4, 5, 6, 7 and the cuts 9, 10, the foam filling member 1 can be formed in a three-dimensional shape corresponding to an interior space of a pillar and thus can be set in place in the interior space. By foaming the foaming base material 2 thus placed in the interior space, the foam can be filled up in the interior space, leaving no space therein.
摘要翻译：一种泡沫填充构件，其具有片状的发泡基材，其结构简化，使得其可以形成为对应于具有改善的工作效率的结构的空间形状的预定形状，并且也可以放置在空间的结构，具有改进的工作效率，而不需要粘附到限定结构空间的隔壁的壁表面。切口4,5,6,7沿着弯曲部沿着发泡基材2的厚度方向中途切割，并且在发泡基材2中形成有沿厚度方向穿过的切口9,10。通过简单的弯曲或沿着切口4,5,6,7和切口9,10折叠发泡基材2，泡沫填充构件1可以形成为对应于柱的内部空间的三维形状，因此可以设定在内部空间。通过将由此放置在内部空间中的发泡基材2发泡，可以在内部空间中填充泡沫，在其中不留下空间。

10. 发明申请

US20100319283A1 Foam filling member 审中-公开
公开(公告)号：US20100319283A1
公开(公告)日：2010-12-23
申请号：US12805996
申请日：2010-08-27
申请人： Kazuhiko Kinpara , Shinji Muto , Shinpei Nishikawa , Takehiro Ul
发明人： Kazuhiko Kinpara , Shinji Muto , Shinpei Nishikawa , Takehiro Ul
IPC分类号： E04C2/20
CPC分类号： B62D29/002 , B29C44/18 , B60R13/0815 , Y10T403/604 , Y10T428/24215
摘要： A foam filling member that can hold a foam sheet in a looped shape stably, without increasing the number of components, to provide improved vibration suppression and sound insulation. The strip-like foam sheet is formed in a looped shape by bending round it, so that both end portions of the foam sheet are overlapped with each other in a thickness direction thereof to form an overlapped portion therein. Then, insertion shafts of a clip are inserted through the overlapped portion, so that the overlapped portion is held in sandwich relation between a base portion and a head portion to form a foam filling member. Then, a supporting portion of the fixing portion of the clip is inserted in a fixing hole of an inner panel and fixed to the inner panel. After the inner panel and an outer panel are welded, the foam filling member is foamed, cross-linked, and cured by heating in a drying line process at the baking finish, to thereby produce the foam, whereby the interior space of the pillar is filled up with the foam, leaving no space therein.

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