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    • 1. 发明申请
    • OPTICAL INTEGRATED DEVICE
    • 光学集成器件
    • US20090052834A1
    • 2009-02-26
    • US12181448
    • 2008-07-29
    • Shinsuke TANAKAKazumasa TAKABAYASHIAyahito UETAKE
    • Shinsuke TANAKAKazumasa TAKABAYASHIAyahito UETAKE
    • G02B6/12
    • H01S5/026G02B6/125G02B2006/121H01S5/4025H01S5/50
    • An optical integrated device includes an optical waveguide structure formed on a semiconductor substrate and including a plurality of first channel optical waveguide portions, an optical coupler portion and a second channel optical waveguide portion, a burying layer formed from a semi-insulating semiconductor material and burying the optical waveguide structure therein such that an upper portion thereof forms a flat face and a side portion thereof forms an inclined face having a predetermined angle with respect to the semiconductor substrate, and a plurality of dummy structure bodies provided over a desired region in the proximity of at least an output side of the optical coupler portion so that radiation light from the optical coupler portion is spatially separated from signal light propagating along the second channel optical waveguide portion. The plural dummy structure bodies are provided discretely so as to be buried flat by the burying layer.
    • 光学集成器件包括形成在半导体衬底上并包括多个第一通道光波导部分的光波导结构,光耦合部分和第二通道光波导部分,由半绝缘半导体材料形成的掩埋层和埋入 其中的光波导结构使得其上部形成平坦面,并且其侧部形成相对于半导体衬底具有预定角度的倾斜面,以及设置在邻近的所需区域上的多个虚设结构体 至少一个光耦合器部分的输出侧,使得来自光耦合器部分的辐射光与沿着第二通道光波导部分传播的信号光在空间上分离。 多个虚拟结构体离散地设置成被埋入层平坦地埋设。