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    • 2. 发明授权
    • Film deposition method
    • 膜沉积法
    • US08592004B2
    • 2013-11-26
    • US12880615
    • 2010-09-13
    • Tatsuya FujinamiShinsuke TakahashiJun FujinawaKouji Tonohara
    • Tatsuya FujinamiShinsuke TakahashiJun FujinawaKouji Tonohara
    • C23C16/458
    • C23C16/50C23C16/44C23C16/503C23C16/505C23C16/509C23C16/517C23C16/54C23C16/545
    • A film deposition method deposits a film on a surface of a substrate in strip form traveling on a peripheral surface of a cylindrical drum in at least one film deposition compartment around the peripheral surface of the drum. The method disposes previously a differential compartment between one film deposition compartment and a compartment including a wrapping space containing at least one of a first position at which the substrate starts to travel on the drum and a second position at which the substrate separates from the drum, the differential compartments communicating with the compartment including the wrapping space and the film deposition compartment, sets a first pressure of the wrapping space lower than a second pressure of the at least one film deposition compartment and performs film deposition in the film deposition compartment with electric power supplied to the drum.
    • 薄膜沉积方法将薄膜沉积在基板的表面上,以条带形式在圆筒形滚筒的圆周表面上行进,在至少一个薄膜沉积室周围的圆筒表面上。 该方法事先将一个薄膜沉积隔室和隔室之间的差分隔室置于包含一个包装空间的隔间,该包装空间包含基板开始在滚筒上行进的第一位置和基板与滚筒分离的第二位置中的至少一个, 与包括所述包装空间和所述成膜室的所述隔室连通的所述差动隔间将所述包装空间的第一压力设定为低于所述至少一个成膜室的第二压力,并且利用电力在所述成膜室中进行膜沉积 提供给鼓。
    • 3. 发明申请
    • FILM DEPOSITING APPARATUS
    • 薄膜沉积装置
    • US20090229520A1
    • 2009-09-17
    • US12404022
    • 2009-03-13
    • Tatsuya FujinamiToshiya Takahashi
    • Tatsuya FujinamiToshiya Takahashi
    • C23C16/54
    • C23C16/509C23C16/4412C23C16/45502C23C16/545
    • A film depositing apparatus comprises: a rotatable drum within a chamber around which a substrate is wrapped in a specified surface region; a film depositing unit comprising a film depositing electrode spaced facing to a surface of the drum, and a feed gas supply section supplying a feed gas for forming a film into a gap between the drum and the film depositing electrode; and an exhaust unit that exhausts the gap between the drum and the film depositing electrode during film formation by the film depositing unit so as to forcibly discharge the feed gas, supplied into the gap by the feed gas supply section, through at least one of end portions of the gap upstream side and downstream side in a rotating direction of the drum uniformly over an entire region of the gap in a direction parallel to the axis of rotation of the drum.
    • 一种成膜设备包括:在室内的可旋转的滚筒,在该腔室内衬底被包裹在指定的表面区域中; 膜沉积单元,其包括面对所述滚筒的表面间隔开的膜沉积电极;以及进料气体供应部分,其将用于将膜形成的进料气体供应到所述滚筒和所述膜沉积电极之间的间隙中; 以及排气单元,其通过所述成膜单元在成膜期间排出所述滚筒和所述膜沉积电极之间的间隙,以便强制地将由所述进料气体供应部供应到所述间隙中的进料气体排出至少一个末端 在滚筒的旋转方向上的间隙上游侧和下游侧的部分在平行于滚筒的旋转轴线的方向上在间隙的整个区域上均匀地布置。
    • 4. 发明授权
    • Method of manufacturing gas barrier film
    • 阻气膜的制造方法
    • US08524333B2
    • 2013-09-03
    • US13044024
    • 2011-03-09
    • Tatsuya Fujinami
    • Tatsuya Fujinami
    • C23C16/34C23C16/52
    • C23C16/509C23C16/345C23C16/545
    • The method of manufacturing a gas barrier film feeds long lengths of a substrate and forms a silicon nitride film as the gas barrier film on the substrate by a capacitively coupled plasma-enhanced CVD technique while transporting the substrate in a longitudinal direction. Gaseous raw materials using in the forming step of the silicon nitride film includes at least silane gas and ammonia gas, and a ratio P/Q [W/sccm] is not less than 1 when a flow rate of the silane gas is denoted as Q [sccm] and a power input for generating a capacitively coupled plasma is denoted as P [W], a tension applied to the substrate transported between two transporting elements is not more than 100 [N/m], and a pair of electrodes for at least forming the silicon nitride film on the substrate is interposed between the two transporting elements.
    • 制造阻气膜的方法通过电容耦合等离子体增强CVD技术在长度方向上输送基板,从而供给长的基板,并在基板上形成作为阻气膜的氮化硅膜。 在氮化硅膜的形成工序中使用的气态原料至少含有硅烷气体和氨气,当硅烷气体的流量表示为Q时,P / Q [W / sccm]的比率不小于1 [sccm]和用于产生电容耦合等离子体的功率输入表示为P [W],施加到在两个传输元件之间传送的衬底的张力不大于100 [N / m],并且一对电极 在基板上形成氮化硅膜最少的是介于两个输送元件之间。
    • 8. 发明授权
    • Film depositing apparatus
    • 胶片沉积装置
    • US08999062B2
    • 2015-04-07
    • US12404022
    • 2009-03-13
    • Tatsuya FujinamiToshiya Takahashi
    • Tatsuya FujinamiToshiya Takahashi
    • C23C16/503C23C16/54C23C16/509C23C16/44C23C16/455
    • C23C16/509C23C16/4412C23C16/45502C23C16/545
    • A film depositing apparatus comprises: a rotatable drum within a chamber around which a substrate is wrapped in a specified surface region; a film depositing unit comprising a film depositing electrode spaced facing to a surface of the drum, and a feed gas supply section supplying a feed gas for forming a film into a gap between the drum and the film depositing electrode; and an exhaust unit that exhausts the gap between the drum and the film depositing electrode during film formation by the film depositing unit so as to forcibly discharge the feed gas, supplied into the gap by the feed gas supply section, through at least one of end portions of the gap upstream side and downstream side in a rotating direction of the drum uniformly over an entire region of the gap in a direction parallel to the axis of rotation of the drum.
    • 一种成膜设备包括:在室内的可旋转的滚筒,在该腔室内衬底被包裹在指定的表面区域中; 膜沉积单元,其包括面对所述滚筒的表面间隔开的膜沉积电极;以及进料气体供应部分,其将用于将膜形成的进料气体供应到所述滚筒和所述膜沉积电极之间的间隙中; 以及排气单元,其通过所述成膜单元在成膜期间排出所述滚筒和所述膜沉积电极之间的间隙,以便强制地将由所述进料气体供应部供应到所述间隙中的进料气体排出至少一个末端 在滚筒的旋转方向上的间隙上游侧和下游侧的部分在平行于滚筒的旋转轴线的方向上在间隙的整个区域上均匀地布置。