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    • 1. 发明授权
    • Process for production of semiconductor substrate
    • 半导体基板的制造方法
    • US5459104A
    • 1995-10-17
    • US307620
    • 1994-09-19
    • Shinsuke Sakai
    • Shinsuke Sakai
    • H01L21/20H01L21/302
    • H01L21/2007Y10S148/012Y10S148/135Y10S438/959
    • The invention relates to a process of production of a semiconductor substrate by binding etc. involving the direct polishing of an oxide film with step differences. A silicon oxide film (3) having step differences is formed on at least one surface of an active layer substrate (A). This silicon oxide film (3) is polished by a rigid platen using a polishing agent comprised primarily of cerium oxide. A support substrate (B) is laminated to the bonding face (3a) this obtained to obtain a wafer of a SOI structure. This enables elimination of the polycrystalline silicon layer on the silicon oxide film which had been formed only for bonding purposes.
    • PCT No.PCT / JP94 / 00058 Sec。 371日期1994年9月19日 102(e)1994年9月19日PCT 1994年1月18日提交PCT本发明涉及通过结合等生产半导体衬底的方法,其涉及具有阶梯差的氧化膜的直接抛光。 在有源层衬底(A)的至少一个表面上形成具有阶梯差的氧化硅膜(3)。 使用主要由氧化铈组成的抛光剂,通过刚性压板抛光该氧化硅膜(3)。 将支撑基板(B)层压到获得SOI结构的晶片的接合面(3a)上。 由此,能够消除已形成的用于接合目的的氧化硅膜上的多晶硅层。
    • 2. 发明授权
    • Apparatus for dressing cutting edge
    • 切割边缘的设备
    • US4699118A
    • 1987-10-13
    • US841094
    • 1986-03-18
    • Shoji TsurutaHideaki MinamiYoshinori OhhataShinsuke Sakai
    • Shoji TsurutaHideaki MinamiYoshinori OhhataShinsuke Sakai
    • B24B27/06B24B53/00B24B53/12
    • B24B27/0616B24B53/00
    • A dressing apparatus comprises a head movably mounted on a tip portion of a body, the head having a tip having formed therein a cut-out which opens in the direction of the movement of the head and into which one of outer and inner peripheral cutting edges formed on a cut-off wheel in the form of a disc is adapted to be inserted, a tape traveling device mounted on the head and the body for causing a tape having a layer of abrasive grain on a side thereof to travel across the cut-out in the head, and an actuator disposed between the head and the body for moving the head. The dressing apparatus and a dressing method are arranged such that the one peripheral cutting edge is inserted into the cut-out in the head, and the one peripheral cutting edge and the side of the tape are brought into contact with each other while causing the tape to travel by the tape traveling device, to apply the dressing to the one peripheral cutting edge.
    • 一种修整装置,包括可移动地安装在主体的尖端部分上的头部,所述头部具有尖端,所述尖端形成有沿所述头部的运动方向开口的切口,并且所述切口沿所述头部的外周和内周切削刃 形成在盘形式的切断轮上的插入件适于插入;安装在头部和主体上的带状行进装置,用于使具有一侧磨粒的带在其一侧上行进穿过切口, 以及设置在头部和主体之间用于移动头部的致动器。 敷料装置和修整方法被布置成使得一个外围切割刃插入到头部的切口中,并且使一个外围切割边缘和带的侧面彼此接触,同时使带 通过带移动装置行进,将敷料施加到一个周边切割边缘。
    • 5. 发明授权
    • Morpheme analysis device
    • 语素分析装置
    • US5337232A
    • 1994-08-09
    • US853601
    • 1992-03-18
    • Shinsuke SakaiTakao Miyabe
    • Shinsuke SakaiTakao Miyabe
    • G06F17/22G06F17/27G06F17/28G06F15/38
    • G06F17/2755G06F17/2775
    • In breaking a syntagm, such as a phrase, a clause, a sentence, or sentences, into a succession of analyzed morphemes, use is made of at least one group of morphemes included in the syntagm which includes two or more morphemes in a customary order. These two or more morphemes of each group are stored in a dictionary together with a descriptor, such as TIME or ANGLE, descriptive of the group, and an identifier or number indicative of the customary order. Selected by a separating unit, candidate morphemes for the analyzed morphemes are stored, together with, if any, the descriptor and at least one of the identifier or a mark, in a memory as memorized morphemes. An output unit selects those memorized morphemes which are accompanied by a common descriptor descriptive of a single group and either the identifier or the mark indicative of the customary order of morphemes in the group, and outputs these as the analyzed morphemes.
    • 在将一个句子,一个句子,一个句子或句子中的一个语法分解成一系列分析的语素时,使用包括在语法中的至少一组语素,其包括习惯命令中的两个或多个语素 。 每个组的这两个或多个语素与描述符一起存储在字典中,诸如描述该组的描述符,例如TIME或ANGLE,以及指示常规订单的标识符或数字。 由分离单元选择,用于所分析的语素的候选词素与存储器中的描述符和标识符或标记中的至少一个一起存储为存储的语素。 输出单元选择伴随有描述单个组的公共描述符的记忆语素,以及表示该组中语素习惯顺序的标识符或标记,并将其输出为分析的语素。
    • 7. 发明授权
    • Method and apparatus for bunching PTPs and for transferring the bunched-PTPs
    • 用于聚束PTP和转移聚束PTP的方法和设备
    • US06199680B1
    • 2001-03-13
    • US09318989
    • 1999-05-26
    • Shinsuke SakaiToshio Omori
    • Shinsuke SakaiToshio Omori
    • B65G4726
    • B65B35/58B65G17/32B65G47/907B65G2201/02
    • A method and apparatus adapted to bunch together a predetermined number of inverted PTPs and uninverted PTPs into a bundle, and then transfer each PTP bundle to a bucket conveyor which moves intermittently in parallel with a conveying passage. A multitude of PTPs, a portion of which are inverted with respect to the conveying direction and the rest of which are not inverted, are conveyed along a first conveying passage while maintaining the blistered surfaces of the inverted and uninverted PTPs in parallel with each other. A selected portion of the PTPs being conveyed in the first conveying passage is pinched and separated from the same passage. The separated PTPs are bunched together while the spacing between the separated PTPs is narrowed in the conveying direction. The bunched PTPs are transferred onto a second conveying passage across the first conveying passage. The bunched PTPs are loaded into a bucket provided on a bucket conveyor which intermittently travels along the second conveying passage.
    • 一种适于将预定数量的反向PTP和未反相PTP聚束到束中的方法和装置,然后将每个PTP束传送到与输送通道平行移动的斗式输送机。 多个PTP,其一部分相对于输送方向反转,其余部分不反转,沿着第一输送通道输送,同时保持反相和未反转的PTP的起泡表面彼此平行。 在第一输送通道中输送的PTP的选定部分被夹紧并与同一通道分离。 分离的PTP聚集在一起,而分离的PTP之间的间隔在输送方向上变窄。 聚束的PTP被转移到穿过第一输送通道的第二输送通道上。 聚束的PTP被装载到设置在沿着第二输送通道间歇地行进的斗式输送机上的桶中。