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1. 发明授权

US06277533B1 Scanning exposure method 有权
标题翻译：扫描曝光方法
公开(公告)号：US06277533B1
公开(公告)日：2001-08-21
申请号：US09599493
申请日：2000-06-22
申请人： Shinji Wakamoto , Yuji Imai , Kazuaki Suzuki
发明人： Shinji Wakamoto , Yuji Imai , Kazuaki Suzuki
IPC分类号： G03F900
CPC分类号： G03F7/70691 , G03F7/70358 , G03F9/7003 , G03F9/7026 , G03F9/7088
摘要： In exposure by a scanning exposure system, when the pattern of a reticle is exposed onto shot areas on a wafer while reading ahead to detect the focus positions at read-ahead regions before an exposure region 16, 116 with respect to the scanning direction, (1) for each of shot areas S10, S1-S4, S5, S23, S28, S29-S32 on the peripheral region of the wafer 15, the exposure is performed by scanning the wafer 15 so that a slit-like exposure region 16 moves relatively from the inside to the outside of the wafer 15; or, (2) when the absolute value of the difference between the focus position at the read-ahead region 135 and the focus position of an imaging plane 139 in the exposure region exceeds an allowable value, the height of the wafer 15 is fixed at the height set until then while ignoring the read-ahead data.
摘要翻译：在通过扫描曝光系统进行曝光时，当在向前扫描的情况下将掩模版的图案暴露在晶片上的拍摄区域上以在曝光区域16,116之前的预读区域相对于扫描方向检测对焦位置时， 1），晶片15的周边区域的拍摄区域S10，S1-S4，S5，S23，S28，S29-S32中的每一个，通过扫描晶片15进行曝光，使得狭缝状曝光区域16移动相对地从晶片15的内部到外部; 或者，（2）当曝光区域中的预读区域135的焦点位置和成像面139的焦点位置之间的差的绝对值超过允许值时，晶片15的高度被固定在高度设置到此为止，同时忽略预读数据。

2. 发明授权

US6118515A Scanning exposure method 失效
标题翻译：扫描曝光方法
公开(公告)号：US6118515A
公开(公告)日：2000-09-12
申请号：US647325
申请日：1996-05-09
申请人： Shinji Wakamoto , Yuji Imai , Kazuaki Suzuki
发明人： Shinji Wakamoto , Yuji Imai , Kazuaki Suzuki
IPC分类号： G03F7/20 , G03F7/207 , G03F9/00 , G03B27/42
CPC分类号： G03F7/70691 , G03F7/70358 , G03F9/7003 , G03F9/7026 , G03F9/7088
摘要： In exposure by a scanning exposure system, when the pattern of a reticle is exposed onto shot areas on a wafer while reading ahead to detect the focus positions at read-ahead regions before an exposure region 16, 116 with respect to the scanning direction, (1) for each of shot areas S10, S1-S4, S5, S23, S28, S29-S32 on the peripheral region of the wafer 15, the exposure is performed by scanning the wafer 15 so that a slit-like exposure region 16 moves relatively from the inside to the outside of the wafer 15; or, (2) when the absolute value of the difference between the focus position at the read-ahead region 135 and the focus position of an imaging plane 139 in the exposure region exceeds an allowable value, the height of the wafer 15 is fixed at the height set until then while ignoring the read-ahead data.
摘要翻译：在通过扫描曝光系统进行曝光时，当在向前扫描的情况下将掩模版的图案暴露在晶片上的拍摄区域上以在曝光区域16,116之前的预读区域相对于扫描方向检测对焦位置时， 1），晶片15的周边区域的拍摄区域S10，S1-S4，S5，S23，S28，S29-S32中的每一个，通过扫描晶片15进行曝光，使得狭缝状曝光区域16移动相对地从晶片15的内部到外部; 或者，（2）当曝光区域中的预读区域135的焦点位置和成像面139的焦点位置之间的差的绝对值超过允许值时，晶片15的高度被固定在高度设置到此为止，同时忽略预读数据。

3. 发明授权

US08018577B2 Illumination-sensor calibration methods, and exposure methods and apparatus and device-manufacturing methods including same, and reflective masks used in same 有权
标题翻译：照明传感器校准方法以及包括其的曝光方法以及装置和装置制造方法以及在其中使用的反射罩
公开(公告)号：US08018577B2
公开(公告)日：2011-09-13
申请号：US11437595
申请日：2006-05-19
申请人： Hajime Yamamoto , Tohru Isogami , Kazuaki Suzuki , Noriyuki Hirayanagi
发明人： Hajime Yamamoto , Tohru Isogami , Kazuaki Suzuki , Noriyuki Hirayanagi
IPC分类号： G03B27/54
CPC分类号： G03F7/7085 , G03F7/70516 , G03F7/70558
摘要： Exposure apparatus are disclosed that can control, to high precision, exposure doses on a photosensitive substrate of a mask pattern defined on a reflective mask as the pattern is being exposed on the substrate using a projection-optical system. An exemplary apparatus includes a first illumination sensor for detecting light that is incident on a reflective mask from an illumination system and a second illumination sensor for detecting light that has propagated from the illumination system to a reference reflective surface on the reflective mask, reflected from the reference reflective surface, and arrived at an image surface of the projection-optical system. Calibration of the first sensor is performed based on detection data obtained by the first sensor and detection data obtained by the second sensor. Exposure of the substrate is controlled based on the detection data obtained by the calibrated first sensor.
摘要翻译：公开了一种曝光装置，其可以使用投影光学系统在图案被曝光在基板上的同时，在限定在反射掩模上的掩模图案的感光基板上高精度地控制曝光量。示例性装置包括用于检测从照明系统入射到反射掩模上的光的第一照明传感器和用于检测从照明系统传播到反射掩模上的参考反射表面的光的第二照明传感器，参考反射表面，并到达投影光学系统的图像表面。基于由第一传感器获得的检测数据和由第二传感器获得的检测数据执行第一传感器的校准。基于由校准的第一传感器获得的检测数据来控制基板的曝光。

4. 发明授权

US07812264B2 Functional element-mounted module and a method for producing the same 有权
公开(公告)号：US07812264B2
公开(公告)日：2010-10-12
申请号：US12230602
申请日：2008-09-02
申请人： Yoshihiro Yoneda , Takahiro Asada , Kazuaki Suzuki
发明人： Yoshihiro Yoneda , Takahiro Asada , Kazuaki Suzuki
IPC分类号： H01L23/28
CPC分类号： H01L27/14618 , H01L31/0203 , H01L33/52 , H01L2224/45144 , H01L2224/48091 , H01L2224/48227 , H01L2224/49175 , H01L2224/8592 , H01L2924/01004 , H01L2924/01079 , H01L2924/1461 , H01L2924/1815 , H01S5/02296 , H01S5/32341 , Y10T29/49007 , Y10T29/4913 , Y10T29/49144 , Y10T29/49146 , H01L2924/00014 , H01L2924/00
摘要： A functional element-mounted module can be decreased in size and requires no costly and special members for a light transition member. A substrate is used, on which an optical functional element having an optical function part and bonding pads therearound is mounted by wire bonding, with an upper face of the element upward. A bank to dam a liquid sealing resin is provided around the optical functional element on the substrate, and the liquid sealing resin is dropped and filled between the optical functional element and the bank such that the bonding pads and partial gold wires for the wire bonding are exposed. A package-component member having a hole corresponding to the optical functional element is abutted to the bank such that the hole is opposed to the function part of the functional element. Thereby, the package-component member is contacted to the liquid sealing resin. The package-component member is fixed to the substrate by curing the liquid sealing resin, and the bank is cut away.

5. 发明申请

US20100175247A1 Functional element-mounted module and a method for producing the same 有权
标题翻译：功能元件安装模块及其制造方法
公开(公告)号：US20100175247A1
公开(公告)日：2010-07-15
申请号：US12659740
申请日：2010-03-19
申请人： Yoshihiro Yoneda , Takahiro Asada , Kazuaki Suzuki
发明人： Yoshihiro Yoneda , Takahiro Asada , Kazuaki Suzuki
IPC分类号： H05K3/34
CPC分类号： H01L27/14618 , H01L31/0203 , H01L33/52 , H01L2224/45144 , H01L2224/48091 , H01L2224/48227 , H01L2224/49175 , H01L2224/8592 , H01L2924/01004 , H01L2924/01079 , H01L2924/1461 , H01L2924/1815 , H01S5/02296 , H01S5/32341 , Y10T29/49007 , Y10T29/4913 , Y10T29/49144 , Y10T29/49146 , H01L2924/00014 , H01L2924/00
摘要： A functional element-mounted module can be decreased in size and requires no costly and special members for a light transition member. A substrate is used, on which an optical functional element having an optical function part and bonding pads therearound is mounted by wire bonding, with an upper face of the element upward. A bank to dam a liquid sealing resin is provided around the optical functional element on the substrate, and the liquid sealing resin is dropped and filled between the optical functional element and the bank such that the bonding pads and partial gold wires for the wire bonding are exposed. A package-component member having a hole corresponding to the optical functional element is abutted to the bank such that the hole is opposed to the function part of the functional element. Thereby, the package-component member is contacted to the liquid sealing resin. The package-component member is fixed to the substrate by curing the liquid sealing resin, and the bank is cut away.
摘要翻译：功能元件安装模块的尺寸可以减小，并且不需要用于光过渡构件的昂贵且特殊的构件。使用其上具有光学功能部分的光学功能元件和其周围的接合焊盘的基板通过引线接合安装，元件的上表面向上。在基板上的光功能元件的周围设置有用于防止液体密封树脂的堤坝，并且液体密封树脂在光学功能元件和堤岸之间落下并填充，使得用于引线接合的接合焊盘和部分金线是裸露。具有与光功能元件相对应的孔的封装构件构件抵接于堤，使得孔与功能元件的功能部分相对。由此，封装构件与液体密封树脂接触。通过固化液体密封树脂将包装组分构件固定到基底上，并且切割堤。

6. 发明申请

US20090038843A1 Functional element-mounted module and a method for producing the same 有权
标题翻译：功能元件安装模块及其制造方法
公开(公告)号：US20090038843A1
公开(公告)日：2009-02-12
申请号：US12230602
申请日：2008-09-02
申请人： Yoshihiro Yoneda , Takahiro Asada , Kazuaki Suzuki
发明人： Yoshihiro Yoneda , Takahiro Asada , Kazuaki Suzuki
IPC分类号： H01L23/28 , H05K7/00
CPC分类号： H01L27/14618 , H01L31/0203 , H01L33/52 , H01L2224/45144 , H01L2224/48091 , H01L2224/48227 , H01L2224/49175 , H01L2224/8592 , H01L2924/01004 , H01L2924/01079 , H01L2924/1461 , H01L2924/1815 , H01S5/02296 , H01S5/32341 , Y10T29/49007 , Y10T29/4913 , Y10T29/49144 , Y10T29/49146 , H01L2924/00014 , H01L2924/00
摘要： A functional element-mounted module can be decreased in size and requires no costly and special members for a light transition member. A substrate is used, on which an optical functional element having an optical function part and bonding pads therearound is mounted by wire bonding, with an upper face of the element upward. A bank to dam a liquid sealing resin is provided around the optical functional element on the substrate, and the liquid sealing resin is dropped and filled between the optical functional element and the bank such that the bonding pads and partial gold wires for the wire bonding are exposed. A package-component member having a hole corresponding to the optical functional element is abutted to the bank such that the hole is opposed to the function part of the functional element. Thereby, the package-component member is contacted to the liquid sealing resin. The package-component member is fixed to the substrate by curing the liquid sealing resin, and the bank is cut away.
摘要翻译：功能元件安装模块的尺寸可以减小，并且不需要用于光过渡构件的昂贵且特殊的构件。使用其上具有光学功能部分的光学功能元件和其周围的接合焊盘的基板通过引线接合安装，元件的上表面向上。在基板上的光功能元件的周围设置有用于防止液体密封树脂的堤坝，并且液体密封树脂在光学功能元件和堤岸之间落下并填充，使得用于引线接合的接合焊盘和部分金线为裸露。具有与光功能元件相对应的孔的封装构件构件抵接于堤，使得孔与功能元件的功能部分相对。由此，封装构件与液体密封树脂接触。通过固化液体密封树脂将包装组分构件固定到基底上，并且切割堤。

7. 发明授权

US07314499B2 Method and device for manufacturing advanced water containing ultra-fine gold particles 失效
标题翻译：用于制造含超细金颗粒的先进水的方法和装置
公开(公告)号：US07314499B2
公开(公告)日：2008-01-01
申请号：US10468110
申请日：2002-02-26
申请人： Yoshihiro Hirata , Yoshio Ueda , Hiroaki Takase , Kazuaki Suzuki
发明人： Yoshihiro Hirata , Yoshio Ueda , Hiroaki Takase , Kazuaki Suzuki
IPC分类号： B22F9/04
CPC分类号： B22F1/0022 , A01N59/16 , A23L33/16 , A23V2002/00 , A61L9/01 , B22F9/12 , B22F2998/00 , B82Y30/00 , C02F1/68 , C02F2103/02 , C02F2103/026 , A01N25/04 , A01N2300/00 , A23V2250/154 , A23V2250/1568
摘要： Produce high-function water useful for consumption as healthy drinking water or in the production of health supplements, cosmetic products, food preservatives, freshness-keeping agents for food, insect repellents or deodorizers, wherein such water contains micro-dispersed ultra-fine gold particles and a small amount of dissolved gold and is produced by constructing in the upper section of a high-pressure water tank a combustion chamber equipped with an injector nozzle for oxygen-hydrogen mixture gas, an ignition device and a gold-rod or gold-wire feeder, igniting the injector nozzle for oxygen-hydrogen mixture gas using the ignition device in the combustion chamber to melt and evaporate the gold rod or wire supplied from the feeder or water in which gold foil was dispersed beforehand and to allow the produced gold vapor to contact high-pressure water, and thereby causing the produced ultra-fine gold particles to float and disperse in water.
摘要翻译：生产用作健康饮用水或生产保健品，化妆品，食品防腐剂，食品保鲜剂，驱虫剂或除臭剂的高功能水，其中这种水含有微分散的超细金颗粒和少量的溶解金，并且通过在高压水箱的上部构造具有配备有用于氧 - 氢混合气体的喷射器喷嘴的燃烧室，点火装置和金棒或金线使用燃烧室中的点火装置点燃用于氧 - 氢混合气体的喷射器喷嘴，以熔融并蒸发从进料器提供的金棒或丝线，其中预先分散有金箔的水，并允许产生的金蒸汽接触高压水，从而使生成的超细金颗粒漂浮并分散在水中。

8. 发明申请

US20060290916A1 Illumination-sensor calibration methods, and exposure methods and apparatus and device-manufacturing methods including same, and reflective masks used in same 有权
标题翻译：照明传感器校准方法以及包括其的曝光方法以及装置和装置制造方法以及在其中使用的反射罩
公开(公告)号：US20060290916A1
公开(公告)日：2006-12-28
申请号：US11437595
申请日：2006-05-19
申请人： Hajime Yamamoto , Tohru Isogami , Kazuaki Suzuki , Noriyuki Hirayanagi
发明人： Hajime Yamamoto , Tohru Isogami , Kazuaki Suzuki , Noriyuki Hirayanagi
IPC分类号： G03B27/32
CPC分类号： G03F7/7085 , G03F7/70516 , G03F7/70558
摘要： Exposure apparatus are disclosed that can control, to high precision, exposure doses on a photosensitive substrate of a mask pattern defined on a reflective mask as the pattern is being exposed on the substrate using a projection-optical system. An exemplary apparatus includes a first illumination sensor for detecting light that is incident on a reflective mask from an illumination system and a second illumination sensor for detecting light that has propagated from the illumination system to a reference reflective surface on the reflective mask, reflected from the reference reflective surface, and arrived at an image surface of the projection-optical system. Calibration of the first sensor is performed based on detection data obtained by the first sensor and detection data obtained by the second sensor. Exposure of the substrate is controlled based on the detection data obtained by the calibrated first sensor.
摘要翻译：公开了一种曝光装置，其可以使用投影光学系统在图案被曝光在基板上的同时，在限定在反射掩模上的掩模图案的感光基板上高精度地控制曝光量。示例性装置包括用于检测从照明系统入射到反射掩模上的光的第一照明传感器和用于检测从照明系统传播到反射掩模上的参考反射表面的光的第二照明传感器，参考反射表面，并到达投影光学系统的图像表面。基于由第一传感器获得的检测数据和由第二传感器获得的检测数据执行第一传感器的校准。基于由校准的第一传感器获得的检测数据来控制基板的曝光。

9. 发明申请

US20060080190A1 Method and system for storing goods trace information 审中-公开
标题翻译：货物追踪信息存储方法和系统
公开(公告)号：US20060080190A1
公开(公告)日：2006-04-13
申请号：US11237861
申请日：2005-09-29
申请人： Isao Furukawa , Shoichi Nakagami , Takashi Yanagita , Hirohisa Shimonaga , Junichi Matsuda , Kazuaki Suzuki
发明人： Isao Furukawa , Shoichi Nakagami , Takashi Yanagita , Hirohisa Shimonaga , Junichi Matsuda , Kazuaki Suzuki
IPC分类号： G06Q99/00
CPC分类号： G06Q10/08 , G06Q10/087
摘要： The present invention provides a goods trace information storing method comprising the steps of: acquiring identification information from an RFID (Radio Frequency Identifier) tag in each distribution level by an identification information read mechanism, and acquiring physical property information of goods, where the RFID tag is attached, by a physical quantity measurement mechanism; a comparison determination mechanism's comparing the physical property information with predetermined threshold information and outputting determination information comprising information for indicating whether or not the physical property information is out of a range of the threshold information; and a registration mechanism's making the acquired identification information, physical property information, and determination information correspond to information for identifying the information group, including information for specifying an acquisition time and an acquired distribution level, and storing them in a memory mechanism.
摘要翻译：本发明提供了一种货物追踪信息存储方法，其特征在于包括以下步骤：通过识别信息读取机构从每个分发级别的RFID（射频标识符）标签获取识别信息，并且获取货物的物理属性信息，其中RFID标签通过物理量测量机制; 比较确定机构将物理属性信息与预定阈值信息进行比较，并输出包括用于指示物理属性信息是否在阈值信息的范围之外的信息的确定信息; 以及登记机构使获取的识别信息，物理属性信息和确定信息对应于用于识别信息组的信息，包括用于指定获取时间和获取的分配级别的信息，并将其存储在存储机构中。

10. 发明授权

US06879258B2 IC card having a mica film for stable resonance frequency and enhanced antenna properties 有权
标题翻译：具有用于稳定谐振频率和增强的天线性能的云母膜的IC卡
公开(公告)号：US06879258B2
公开(公告)日：2005-04-12
申请号：US10736603
申请日：2003-12-17
申请人： Nobukazu Kuroda , Kazuaki Suzuki
发明人： Nobukazu Kuroda , Kazuaki Suzuki
IPC分类号： G06K19/00 , B42D15/10 , G06K19/07 , G06K19/077 , H05K1/03 , H05K1/16 , G08B13/14
CPC分类号： G06K19/0723 , H05K1/0306 , H05K1/162
摘要： An IC card 10A has a mica capacitor that comprises a mica film 1 and electrodes 6a, 6b formed on both sides thereof, where the mica film 1 serves as a mounting substrate for an antenna coil 2 and an IC chip 3, thereby reducing profile of an IC card and also reducing its cost of manufacture and to stabilize its resonance frequency.
摘要翻译： IC卡10A具有云母电容器，其包括云母膜1和形成在其两侧的电极6a，6b，其中云母膜1用作天线线圈2的安装基板和IC芯片3，由此减小一个IC卡，同时也降低了其制造成本和稳定其共振频率。

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