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1. 发明授权

US07771789B2 Method of forming mask and mask 有权
标题翻译：形成掩模和掩模的方法
公开(公告)号：US07771789B2
公开(公告)日：2010-08-10
申请号：US11325649
申请日：2006-01-04
申请人： Shinichi Yotsuya , Hiroshi Koeda , Takayuki Kuwahara , Tadayoshi Ikehara
发明人： Shinichi Yotsuya , Hiroshi Koeda , Takayuki Kuwahara , Tadayoshi Ikehara
IPC分类号： C23C16/00 , B05D5/12 , B05D1/32 , B05D3/00 , B41N1/24 , B29C35/08 , H01F1/00 , H05B6/00
CPC分类号： H01L21/3081 , C23C14/042 , C23C14/12 , H01L21/3083 , H01L21/6831 , H01L51/56
摘要： A method of forming a mask, in which a film pattern is formed on a substrate by using a mask, includes sequentially arranging the mask, the substrate and a first member having a flat surface contacting with the substrate in this order from a supply source of film forming material; and attracting the mask and the first member by means of a magnetic force.
摘要翻译：通过使用掩模在基板上形成膜图案的掩模的形成方法包括：从基板的供给源依次配置掩模，基板和具有与基板接触的平面的第一部件成膜材料; 并通过磁力吸引掩模和第一部件。

2. 发明申请

US20060148114A1 Method of forming mask and mask 有权
标题翻译：形成掩模和掩模的方法
公开(公告)号：US20060148114A1
公开(公告)日：2006-07-06
申请号：US11325649
申请日：2006-01-04
申请人： Shinichi Yotsuya , Hiroshi Koeda , Takayuki Kuwahara , Tadayoshi Ikehara
发明人： Shinichi Yotsuya , Hiroshi Koeda , Takayuki Kuwahara , Tadayoshi Ikehara
IPC分类号： H01L21/00 , H01L29/04
CPC分类号： H01L21/3081 , C23C14/042 , C23C14/12 , H01L21/3083 , H01L21/6831 , H01L51/56
摘要： A method of forming a mask, in which a film pattern is formed on a substrate by using a mask, includes sequentially arranging the mask, the substrate and a first member having a flat surface contacting with the substrate in this order from a supply source of film forming material; and attracting the mask and the first member by means of a magnetic force.
摘要翻译：通过使用掩模在基板上形成膜图案的掩模的形成方法包括：从基板的供给源依次配置掩模，基板和具有与基板接触的平面的第一部件成膜材料; 并通过磁力吸引掩模和第一部件。

3. 发明授权

US07268406B2 Mask, mask chip, manufacturing method of mask, manufacturing method of mask chip, and electronic device 有权
标题翻译：掩模，掩模芯片，掩模的制造方法，掩模芯片的制造方法和电子设备
公开(公告)号：US07268406B2
公开(公告)日：2007-09-11
申请号：US11425396
申请日：2006-06-21
申请人： Shinichi Yotsuya , Takayuki Kuwahara , Hiroshi Koeda
发明人： Shinichi Yotsuya , Takayuki Kuwahara , Hiroshi Koeda
IPC分类号： H01L31/0232
CPC分类号： C23C14/042
摘要： A mask in which a plurality of mask chips are connected to one another via a supporting member, includes: a plurality of first opening sections that are provided in the plurality of mask chips and that correspond to a pattern to be formed; a cutout section provided at at least one of side faces opposing to each other of the mask chips adjacent to each other; a gap section provided at a connected section connecting the mask chips adjacent to each other, the gap section being composed of the cutout section and including a second opening section corresponding to a pattern to be formed; and a block section that is provided at at least one of the mask chips adjacent to each other and that covers the gap section other than the second opening section.
摘要翻译：其中多个掩模芯片经由支撑部件彼此连接的掩模包括：多个第一开口部分，设置在多个掩模芯片中并且对应于待形成的图案; 设置在彼此相邻的所述掩模芯片彼此相对的侧面中的至少一个侧面上的切口部; 间隙部分，设置在连接彼此相邻的掩模芯片的连接部分处，所述间隙部分由所述切口部分组成并且包括与要形成的图案对应的第二开口部分; 以及设置在彼此相邻并且覆盖除了第二开口部之外的间隙部分的掩模芯片中的至少一个的块部分。

4. 发明授权

US06650461B2 Method of manufacturing spatial light modulator and electronic device employing it 失效
公开(公告)号：US06650461B2
公开(公告)日：2003-11-18
申请号：US10192111
申请日：2002-07-10
申请人： Mitsuro Atobe , Hiroshi Koeda , Shinichi Yotsuya
发明人： Mitsuro Atobe , Hiroshi Koeda , Shinichi Yotsuya
IPC分类号： G02B2600
CPC分类号： G02B26/0841
摘要： A spatial light modulator is constructed from a conductive silicon mirror substrate and a glass electrode substrate including sodium, anode-bonded together. The silicon mirror substrate has micromirrors arranged in a matrix, torsion bars coupling these micromirrors in the x-direction, and a frame coupled to both ends of the torsion bars. A glass electrode substrate has a central depression, a rim around the periphery thereof, pillars projecting from within the depression, and electrodes and wiring driving micromirrors formed within the depression in an inclining manner. Both ends of the torsion bars are bonded to the rim of the frame portion, and intermediate portions of the torsion bars are bonded to the pillars. Both ends of the torsion bars are cut away from the frame portion during dicing.

5. 发明授权

US6120124A Ink jet head having plural electrodes opposing an electrostatically deformable diaphragm 失效
标题翻译：喷墨头具有与静电可变形隔膜相对的多个电极
公开(公告)号：US6120124A
公开(公告)日：2000-09-19
申请号：US937559
申请日：1997-09-25
申请人： Mitsuro Atobe , Hiroshi Koeda , Shinichi Yotsuya
发明人： Mitsuro Atobe , Hiroshi Koeda , Shinichi Yotsuya
IPC分类号： B41J2/14 , B41J2/16 , C04B37/04 , B41J2/01
CPC分类号： B41J2/1629 , B41J2/14314 , B41J2/16 , B41J2/1623 , B41J2/1631 , B41J2/1645 , B41J2/1646 , C04B35/547 , C04B35/653 , C04B37/021 , B41J2002/14338 , B41J2202/11 , C04B2235/6562 , C04B2237/36 , C04B2237/525
摘要： An ink jet recording apparatus capable of ejecting ink droplets in which the volume is precisely and easily controlled. The gradient of the pixel to be printed, based on a digital gradient input signal, is provided for printing high resolution gradient images using a low drive voltage in this ink jet head. More specifically, the ink jet recording apparatus of the present invention will include a diaphragm formed at one part of a wall of each independent ejection chamber, with electrodes formed opposite each diaphragm and spaced therefrom at a predetermined gap distance. Ink droplets are selectively ejected from nozzle openings in the ejection chamber by applying a voltage to generate an electrostatic force which momentarily deforms the diaphragm. Moreover, plurality of independent electrodes oppose each diaphragm and a pulse voltage is applied to a predetermined number of electrodes according to a gradient signal to eject ink droplets of a volume determined by the gradient signal.
摘要翻译：一种喷墨记录装置，能够喷射容积被精确且容易地控制的墨滴。基于数字梯度输入信号的要打印的像素的梯度被提供用于在该喷墨头中使用低驱动电压打印高分辨率梯度图像。更具体地，本发明的喷墨记录装置将包括形成在每个独立喷射室的壁的一部分处的隔膜，其中电极与每个隔膜形成并以预定的间隙距离隔开。通过施加电压以产生使隔膜瞬间变形的静电力，墨滴从喷射室中的喷嘴开口选择性地喷射。此外，多个独立电极与每个隔膜相对，并且根据梯度信号将脉冲电压施加到预定数量的电极，以喷射由梯度信号确定的体积的墨滴。

6. 发明申请

US20060258030A1 Mask holding structure, film forming method, electro-optic device manufacturing method, and electronic apparatus 有权
标题翻译：掩模保持结构，成膜方法，电光器件制造方法和电子设备
公开(公告)号：US20060258030A1
公开(公告)日：2006-11-16
申请号：US11417319
申请日：2006-05-03
申请人： Hiroshi Koeda , Shinichi Yotsuya
发明人： Hiroshi Koeda , Shinichi Yotsuya
IPC分类号： H01L21/00 , C23C16/00
CPC分类号： C23C14/042 , H01L51/0011 , H01L51/56
摘要： A mask includes a base plate having aperture parts, and chips having aperture patterns and positioned in the aperture parts of the base plate. The mask is arranged on a bottom surface of a bed plate with a substrate on which a film is to be formed sandwiched therebetween. Magnets are arranged on the bed plate, and plugs which are attracted to the magnets are arranged in the base plate.
摘要翻译：掩模包括具有开口部分的基板和具有孔图案并且位于基板的孔部中的芯片。掩模布置在床板的底表面上，其上将要形成有薄膜的基板。磁铁布置在床板上，并且被吸引到磁体的塞子被布置在基板中。

7. 发明授权

US06452712B2 Method of manufacturing spatial light modulator and electronic device employing it 失效
标题翻译：制造空间光调制器的方法及其采用的电子装置
公开(公告)号：US06452712B2
公开(公告)日：2002-09-17
申请号：US09895694
申请日：2001-06-29
申请人： Mitsuro Atobe , Hiroshi Koeda , Shinichi Yotsuya
发明人： Mitsuro Atobe , Hiroshi Koeda , Shinichi Yotsuya
IPC分类号： G02B2600
CPC分类号： G02B26/0841
摘要： A spatial light modulator is constructed from a conductive silicon mirror substrate and a glass electrode substrate including sodium, anode-bonded together. The silicon mirror substrate has micromirrors arranged in a matrix, torsion bars coupling these micromirrors in the x-direction, and a frame coupled to both ends of the torsion bars. A glass electrode substrate has a central depression, a rim around the periphery thereof, pillars projecting from within the depression, and electrodes and wiring driving micromirrors formed within the depression in an inclining manner. Both ends of the torsion bars are bonded to the rim of the frame portion, and intermediate portions of the torsion bars are bonded to the pillars. Both ends of the torsion bars are cut away from the frame portion during dicing.
摘要翻译：空间光调制器由导电硅镜基板和包括阳极粘合在一起的钠的玻璃电极基板构成。硅镜基板具有以矩阵形式布置的微镜，在x方向上连接这些微镜的扭杆以及耦合到扭杆的两端的框架。玻璃电极基板具有中央凹部，围绕其周边的边缘，从凹部内突出的支柱，以及以倾斜方式形成在凹部内的微电子驱动微镜的电极和布线。扭杆的两端粘接到框架部分的边缘，并且扭杆的中间部分结合到支柱上。在切割期间，扭杆的两端被切割离开框架部分。

8. 发明授权

US6107115A Method of manufacturing spatial light modulator and electronic device employing it 失效
公开(公告)号：US6107115A
公开(公告)日：2000-08-22
申请号：US398263
申请日：1999-09-17
申请人： Mitsuro Atobe , Hiroshi Koeda , Shinichi Yotsuya
发明人： Mitsuro Atobe , Hiroshi Koeda , Shinichi Yotsuya
IPC分类号： G02B26/00 , G02B26/08 , G03B21/00 , G03B21/26 , H01L21/84
CPC分类号： G02B26/0841
摘要： A spatial light modulator is constructed from a conductive silicon mirror substrate and a glass electrode substrate including sodium, anode-bonded together. The silicon mirror substrate has micromirrors arranged in a matrix, torsion bars coupling these micromirrors in the x-direction, and a frame coupled to both ends of the torsion bars. A glass electrode substrate has a central depression, a rim around the periphery thereof, pillars projecting from within the depression, and electrodes and wiring driving micromirrors formed within the depression in an inclining manner. Both ends of the torsion bars are bonded to the rim of the frame portion, and intermediate portions of the torsion bars are bonded to the pillars. Both ends of the torsion bars are cut away from the frame portion during dicing.

9. 发明授权

US06271955B1 Method of manufacturing spatial light modulator and electronic device employing it 失效
标题翻译：制造空间光调制器的方法及其采用的电子装置
公开(公告)号：US06271955B1
公开(公告)日：2001-08-07
申请号：US09585880
申请日：2000-05-31
申请人： Mitsuro Atobe , Hiroshi Koeda , Shinichi Yotsuya
发明人： Mitsuro Atobe , Hiroshi Koeda , Shinichi Yotsuya
IPC分类号： G02B2600
CPC分类号： G02B26/0841
摘要： A spatial light modulator is constructed from a conductive silicon mirror substrate and a glass electrode substrate including sodium, anode-bonded together. The silicon mirror substrate has micromirrors arranged in a matrix, torsion bars coupling these micromirrors in the x-direction, and a frame coupled to both ends of the torsion bars. A glass electrode substrate has a central depression, a rim around the periphery thereof, pillars projecting from within the depression, and electrodes and wiring driving micromirrors formed within the depression in an inclining manner. Both ends of the torsion bars are bonded to the rim of the frame portion, and intermediate portions of the torsion bars are bonded to the pillars. Both ends of the torsion bars are cut away from the frame portion during dicing.
摘要翻译：空间光调制器由导电硅镜基板和包括阳极粘合在一起的钠的玻璃电极基板构成。硅镜基板具有以矩阵形式布置的微镜，在x方向上连接这些微镜的扭杆以及耦合到扭杆的两端的框架。玻璃电极基板具有中央凹部，围绕其周边的边缘，从凹部内突出的支柱，以及以倾斜方式形成在凹部内的微电子驱动微镜的电极和布线。扭杆的两端粘接到框架部分的边缘，并且扭杆的中间部分结合到支柱上。在切割期间，扭杆的两端被切割离开框架部分。

10. 发明授权

US5999306A Method of manufacturing spatial light modulator and electronic device employing it 失效
公开(公告)号：US5999306A
公开(公告)日：1999-12-07
申请号：US756463
申请日：1996-11-26
申请人： Mitsuro Atobe , Hiroshi Koeda , Shinichi Yotsuya
发明人： Mitsuro Atobe , Hiroshi Koeda , Shinichi Yotsuya
IPC分类号： G02B26/00 , G02B26/08 , G03B21/00 , G03B21/26 , H01L21/84
CPC分类号： G02B26/0841
摘要： A spatial light modulator is constructed from a conductive silicon mirror substrate and a glass electrode substrate including sodium, anode-bonded together. The silicon mirror substrate has micromirrors arranged in a matrix, torsion bars coupling these micromirrors in the x-direction, and a frame coupled to both ends of the torsion bars. A glass electrode substrate has a central depression, a rim around the periphery thereof, pillars projecting from within the depression, and electrodes and wiring driving micromirrors formed within the depression in an inclining manner. Both ends of the torsion bars are bonded to the rim of the frame portion, and intermediate portions of the torsion bars are bonded to the pillars. Both ends of the torsion bars are cut away from the frame portion during dicing.

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