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1. 发明授权

US5925824A Capacitive differential pressure detector 失效
标题翻译：电容差压检测器
公开(公告)号：US5925824A
公开(公告)日：1999-07-20
申请号：US884355
申请日：1997-06-27
申请人： Shinichi Soma , Kimihiro Nakamura , Tadanori Yuhara
发明人： Shinichi Soma , Kimihiro Nakamura , Tadanori Yuhara
IPC分类号： G01L13/06 , G01L9/00 , G01L27/00 , G01L9/12
CPC分类号： G01L9/0075
摘要： In a capacitive differential pressure detector, an insulating plate (1) of a fixed electrode is covered with a gold conductive film. A conductive film (2) integrally includes an entire inner area (2a) of a center hole (1a), a square ring-shaped area (2b) surrounding the center hole (1a) on the side opposite to the conductive plate (12) and a band-shaped area (2c) extending therefrom in a centrifugal direction to reach the outer periphery. The conductive film (2) is electrically communicated with the conductive plate at the terminating position of the entire inner area (2a) and also with aluminum films at the terminating position of the band-shaped area (2c). Therefore, the total area of the ring-shaped area (2b) and the band-shaped area (2c) can be decreased so that Cs1+Cs2 is decreased to improve the static pressure span characteristic.
摘要翻译：在电容差压检测器中，固定电极的绝缘板（1）被金导电膜覆盖。导电膜（2）整体地包括中心孔（1a）的整个内部区域（2a），围绕中心孔（1a）的与导电板（12）相对的一侧的方形环形区域（2b）以及从离心方向向外延伸的带状区域（2c）。导电膜（2）在整个内部区域（2a）的终止位置处与导电板电连通，并且还在带状区域（2c）的终止位置处与铝膜电连通。因此，可以减小环状区域（2b）和带状区域（2c）的总面积，使得Cs1 + Cs2降低，以提高静压跨度特性。

2. 发明授权

US5343756A Electrostatic capacity type differential pressure detector 失效
标题翻译：静电容量型差压检测器
公开(公告)号：US5343756A
公开(公告)日：1994-09-06
申请号：US917276
申请日：1992-07-23
申请人： Kimihiro Nakamura , Tadanori Yuhara , Toshiyuki Takano , Hironobu Yao
发明人： Kimihiro Nakamura , Tadanori Yuhara , Toshiyuki Takano , Hironobu Yao
IPC分类号： G01L9/00 , G01L9/12
CPC分类号： G01L9/0073
摘要： An electrostatic capacity type differential pressure detector wherein capacitances are formed between a diaphragm as a movable electrode which is subjected to displacement depending on a differential pressure and fixed electrodes which are arranged on opposite sides of the diaphragm. Each of the fixed electrodes has a first electrically conductive plate closely adjoining and confronting a surface of a central portion of the diaphragm. An annular support is joined to the surface of a circumferential edge portion of the diaphragm and is spaced from and surrounds the outer circumferential surface of the first electrically conductive plate. A solid insulator completely fills an annular space between the first electrically conductive plate and the annular support and is spaced from the diaphragm. An insulating plate is commonly joined to each surface of the annular support and the first electrically conductive plate on the side of the annular support and conductive plate opposite the diaphragm; and a second electrically conductive plate is joined to the surface of the insulating plate opposite the diaphragm and is electrically connected with the first electrically conductive plate. There is a pressure introducing hole extending through the first and second electrically conductive plates and through the insulating plate. Both the first electrically conductive plate and the annular support are composed of silicon, the insulator being composed of a glass material which has a thermal expansion coefficient substantially that of silicon.
摘要翻译：一种静电电容型差压检测器，其中电容被形成在作为根据差压的位移的可动电极的膜片和布置在隔膜的相对侧上的固定电极之间。每个固定电极具有紧密邻接并面对隔膜的中心部分的表面的第一导电板。环形支撑件连接到隔膜的周向边缘部分的表面，并且与第一导电板的外周表面间隔开并且围绕第一导电板的外周表面。固体绝缘体完全填充第一导电板和环形支撑件之间的环形空间并且与隔膜间隔开。绝缘板通常连接到环形支撑件的每个表面，并且第一导电板在与隔膜相对的环形支撑件和导电板的侧面上; 并且第二导电板接合到与隔膜相对的绝缘板的表面，并与第一导电板电连接。存在延伸穿过第一和第二导电板并通过绝缘板的压力引入孔。第一导电板和环形支撑件都由硅组成，绝缘体由具有基本上为硅的热膨胀系数的玻璃材料组成。

3. 发明授权

US5056369A Capacitive differential pressure detector 失效
标题翻译：电容式差压检测器
公开(公告)号：US5056369A
公开(公告)日：1991-10-15
申请号：US507843
申请日：1990-04-12
申请人： Mitsuru Tamai , Tadanori Yuhara , Kimihiro Nakamura , Kazuaki Kitamura , Toshiyuki Takano , Teizo Takahama , Mikihiko Matsuda , Shinichi Souma
发明人： Mitsuru Tamai , Tadanori Yuhara , Kimihiro Nakamura , Kazuaki Kitamura , Toshiyuki Takano , Teizo Takahama , Mikihiko Matsuda , Shinichi Souma
IPC分类号： G01L13/06 , G01L9/00
CPC分类号： G01L9/0073
摘要： The present invention is directed to a capacitive differential pressure detector comprising a diaphragm disposed between two electrodes. In a first embodiment, each of the electrodes comprises two conductive plates with an insulator disposed therebetween. Step-like portions are formed in the conductive plate nearest the diaphragm. In a second embodiment, the plate nearest the diaphragm is insulative with a conductive film formed thereon. In a third embodiment, at least one groove is formed in the plate nearest the diaphragm. The groove is formed in a surface of the plate which faces the diaphragm. The groove also intersects a pressure guide hole. In a fourth embodiment, a substrate is disposed on a surface of the plate farthest from said diaphragm. In a fifth embodiment, an insulating layer has the same coefficient of thermal expansion as the conductive plates. In a sixth embodiment, the diaphragm is etched in order to form a circular flexible part, a centrally disposed displacing part, and a bonding part.
摘要翻译：本发明涉及一种电容差压检测器，其包括设置在两个电极之间的隔膜。在第一实施例中，每个电极包括两个导电板，绝缘体位于它们之间。在最靠近隔膜的导电板中形成阶梯状部分。在第二实施例中，最靠近隔膜的板是绝缘的，其上形成有导电膜。在第三实施例中，在最靠近隔膜的板中形成至少一个凹槽。凹槽形成在板的面向隔膜的表面中。凹槽还与压力导向孔相交。在第四实施例中，基板设置在距所述隔膜最远的板的表面上。在第五实施例中，绝缘层具有与导电板相同的热膨胀系数。在第六实施例中，为了形成圆形柔性部分，中心设置的位移部分和接合部分，蚀刻隔膜。

4. 发明授权

US4086815A Device for use in sensing pressures 失效
标题翻译：用于感测压力的装置
公开(公告)号：US4086815A
公开(公告)日：1978-05-02
申请号：US708251
申请日：1976-07-23
申请人： Isamu Asano , Mitsuru Tamai , Tadanori Yuhara , Takeshi Yasuhara
发明人： Isamu Asano , Mitsuru Tamai , Tadanori Yuhara , Takeshi Yasuhara
IPC分类号： G01L9/00 , G01L13/02 , G01L9/12
CPC分类号： G01L13/025 , G01L9/007 , G01L9/0072
摘要： A pressure sensing device is disclosed having the pressure sensing diaphragm positioned in a housing which is not stressed or enlarged by large static pressure. The housing is attached within a recess of a larger casing by means of a support diaphragm. The recesses are communicated with the interior of the housing by passages therethrough to equalize the pressure inside and outside the housing. The outer side of each casing forms a pressure reception chamber with a respective pressure receiving diaphragm. The latter chambers communicate with the recess via passages in the casing. The space between the pressure sensitive diaphragm and each pressure receiving diaphragm, including the housing interior chamber, the housing passage, the casing recess, the casing passage and the pressure receptive chamber, is filled with a fluid. The construction and filling is such that overpressure on one pressure receiving diaphram causes the entire housing to move toward the inner wall of the casing. However the latter diaphragm closes with the outer wall of the casing before the housing contacts the casing inner wall.
摘要翻译：公开了一种压力感测装置，其具有位于壳体中的压力感测膜片，该壳体不受大的静压力的压力或增大。壳体通过支撑膜片附接在较大壳体的凹部内。凹槽通过其中的通道与壳体的内部连通，以均衡壳体内外的压力。每个壳体的外侧形成具有相应的压力接收膜片的受压室。后者室通过壳体中的通道与凹槽连通。包括壳体内部室，壳体通道，壳体凹部，壳体通道和压力接收室之间的压力敏感隔膜和每个受压隔膜之间的空间填充有流体。施工和填充使得在一个受压的压力下的超压使得整个壳体朝向壳体的内壁移动。然而，在壳体接触壳体内壁之前，后一个隔膜与外壳的外壁相连。

5. 发明授权

US4072057A Differential pressure cell with diaphragm tension and overpressure protection 失效
标题翻译：差压单元带隔膜张力和超压保护
公开(公告)号：US4072057A
公开(公告)日：1978-02-07
申请号：US721635
申请日：1976-09-08
申请人： Takeshi Yasuhara , Mitsuru Tamai , Tadanori Yuhara
发明人： Takeshi Yasuhara , Mitsuru Tamai , Tadanori Yuhara
IPC分类号： G01L9/00 , G01L13/02 , G01L7/08
CPC分类号： G01L13/025 , G01L9/007
摘要： A differential pressure measuring cell includes a capacitive-type measuring chamber having a relatively rigid diaphragm, an auxiliary chamber having a relatively flexible diaphragm, a casing defining first and second recesses surrounding the auxiliary and measuring chambers, respectively, passages connecting one side of the auxiliary chamber and measuring chamber with the first recess and a first pressure-receiving chamber, and passages connecting the other side of the auxiliary chamber and measuring chamber with the second recess and a second pressure-receiving chamber. Radial expansion of the auxiliary and measuring chambers is prevented by the static counterpressures present in the first and second recesses. Over pressure protection is provided by the small volumes of the first and second pressure-receiving chambers and the greater flexibility of the auxiliary diaphragm, whereby the auxiliary diaphragm will absorb the entire pressure differential before the measuring diaphragm engages the walls of the measuring chamber.
摘要翻译：差压测量单元包括具有相对刚性隔膜的电容式测量室，具有相对柔性隔膜的辅助室，分别围绕辅助和测量室限定第一和第二凹槽的壳体，其连接辅助件的一侧室和测量室，其具有第一凹部和第一受压室，以及将辅助室和测量室的另一侧与第二凹部连接的通道和第二受压室。通过存在于第一和第二凹部中的静电反作用力来防止辅助和测量室的径向膨胀。过压保护由第一和第二压力容纳室的小容量提供，并且辅助隔膜具有更大的灵活性，由此辅助隔膜将在测量隔膜接合测量室的壁之前吸收整个压力差。

6. 发明授权

US4169389A Pressure measuring device 失效
标题翻译：压力测量装置
公开(公告)号：US4169389A
公开(公告)日：1979-10-02
申请号：US906170
申请日：1978-05-15
申请人： Takeshi Yasuhara , Mitsuru Tamai , Tadanori Yuhara
发明人： Takeshi Yasuhara , Mitsuru Tamai , Tadanori Yuhara
IPC分类号： G01L9/12 , G01L9/00 , G01L13/02
CPC分类号： G01L9/0072
摘要： A flexible diaphragm-type fluid-filled sensing device is made immune to thermal expansion and contraction errors by providing a constant volume first fluid chamber formed between the insulating block and a metal plate, a second chamber between the metal plate and a sealing diaphragm and a third chamber between the other surface of the block and a measuring diaphragm. The three chambers are connected by fluid passages and the sealing diaphragm is much more flexible than the measuring diaphragm so that any volumetric change in the fluid is followed by the sealing diaphragm without changing the volumes of the first or third chambers to which the electrical displacement sensing devices are attached.
摘要翻译：通过提供形成在绝缘块和金属板之间的恒定体积的第一流体室，在金属板和密封膜之间的第二室和第二腔室之间，使柔性隔膜式流体填充的感测装置免受热膨胀和收缩误差的影响第三室在块的另一个表面和测量膜之间。三个腔室通过流体通道连接，并且密封隔膜比测量隔膜更灵活，使得流体中的任何体积变化都跟随密封隔膜，而不改变第一或第三腔室的电位移感测连接设备。

7. 发明授权

US4158311A Pressure sensing device 失效
标题翻译：压力传感装置
公开(公告)号：US4158311A
公开(公告)日：1979-06-19
申请号：US913162
申请日：1978-06-06
申请人： Takeshi Yasuhara , Mitsuru Tamai , Tadanori Yuhara , Isamu Asano
发明人： Takeshi Yasuhara , Mitsuru Tamai , Tadanori Yuhara , Isamu Asano
IPC分类号： G01F23/00 , G01L7/08 , G01L9/00 , G01L9/12 , G01L13/02
CPC分类号： G01F23/0038 , G01L9/0044 , G01L9/0072
摘要： A compact sensing device is provided which the tension applied to the sensing member is substantially uniform and free of thermally changing. Either the sensing member itself or a clamping member disposed around the device or both, are made of a precipitation hardenable metal which will contract during a heat treatment. If the sensing member is thermally contracted a uniform radial tension will result, and if the clamping member is contracted a uniform clamping force applied to the device for tensioning the diaphragm will be provided without the necessity of clamping bolts.
摘要翻译：提供了紧凑的感测装置，其中施加到感测构件的张力基本均匀并且没有热变化。感测构件本身或设置在装置周围的夹紧构件或两者均由在热处理期间收缩的析出可硬化金属制成。如果感测构件热收缩，将产生均匀的径向张力，并且如果夹紧构件收缩，则将提供施加到用于张紧隔膜的装置的均匀夹紧力而无需夹紧螺栓。

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