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    • 6. 发明授权
    • Semiconductor device having metal oxide film
    • 具有金属氧化物膜的半导体器件
    • US08445942B2
    • 2013-05-21
    • US12544292
    • 2009-08-20
    • Ryohei BabaShinichi Iwakami
    • Ryohei BabaShinichi Iwakami
    • H01L29/778
    • H01L29/872H01L29/2003H01L29/205H01L29/402
    • A semiconductor device includes: a nitride group semiconductor functional layer including a second nitride group semiconductor region on a first nitride group semiconductor region where a two-dimensional carrier gas layer is made, the second nitride group semiconductor region functioning as a barrier layer; a first main electrode electrically connected to one end of the two-dimensional carrier gas layer; a second main electrode electrically connected to the other end of the two-dimensional carrier gas layer; and a metal oxide film placed between the first and second main electrodes, electrically connected to the first main electrode, the first main electrode extends over an upper surface of the metal oxide film.
    • 半导体器件包括:在形成二维载气层的第一氮化物半导体区域上包括第二氮化物半导体区域的氮化物半导体功能层,第二氮化物半导体区域用作阻挡层; 与所述二维载气层的一端电连接的第一主电极; 电连接到二维载气层的另一端的第二主电极; 以及金属氧化物膜,其位于所述第一和第二主电极之间,与所述第一主电极电连接,所述第一主电极在所述金属氧化物膜的上表面上延伸。
    • 7. 发明申请
    • COMPOUND SEMICONDUCTOR ELEMENT RESISTIBLE TO HIGH VOLTAGE
    • 化合物半导体元件可抵抗高电压
    • US20080087897A1
    • 2008-04-17
    • US11857458
    • 2007-09-19
    • Shinichi Iwakami
    • Shinichi Iwakami
    • H01L29/20
    • H01L29/872H01L29/2003H01L29/452H01L29/47H01L2224/48091H01L2224/73265H01L2924/00014
    • A compound semiconductor element is provided which electrically connects an electrode 3 formed on one main surface 2a of a compound semiconductor region 2 with a substrate 5 to fix an electric potential of substrate 5 at an electric potential of electrode 3, thereby preventing fluctuation in electric potential of substrate 5 under the changing operating condition of the device for stabilization in electric property of the device. Also, formed between compound semiconductor region 2 and substrate 5 is an insulating layer 6 for blocking a leakage current which may flow longitudinally between one main surface 2a of compound semiconductor region 2 and substrate 5 so that sufficiently high withstand voltage property can be given between compound semiconductor region 2 and substrate 5. In addition, formed in compound semiconductor region 2 is a notch 14 which extends in the thickness direction from main surface 2a of compound semiconductor region 2 and reaches at least insulating layer 6, and an insulating protective layer 15 covers a side surface of a conductive film 7 exposed to the notch 14 to prevent occurrence of electric discharge between conductive film 7 and substrate 5 for stable and high withstand voltage.
    • 提供一种化合物半导体元件,其将形成在化合物半导体区域2的一个主表面2a上的电极3与基板5电连接,以将基板5的电位固定在电极3的电位,从而防止电气 在器件的电性能稳定装置的变化的工作条件下,衬底5的电位。 另外,形成在化合物半导体区域2和基板5之间的绝缘层6是用于阻挡可能在化合物半导体区域2的一个主表面2a与衬底5之间纵向流动的漏电流的绝缘层6,从而可以在化合物半导体区域2和衬底5之间产生足够高的耐受电压特性 化合物半导体区域2和基板5。 此外,在化合物半导体区域2中形成的凹口14是从化合物半导体区域2的主面2a向厚度方向延伸的至少至少为绝缘层6的绝缘保护层15的绝缘保护层15, 膜7暴露于凹口14,以防止导电膜7和基板5之间的放电发生,从而获得稳定和高耐压。
    • 8. 发明申请
    • Semiconductor device
    • 半导体器件
    • US20070051938A1
    • 2007-03-08
    • US10573458
    • 2005-08-25
    • Koji OtsukaShinichi Iwakami
    • Koji OtsukaShinichi Iwakami
    • H01L31/00
    • H01L29/872
    • A two-dimensional carrier is generated in the vicinity of an interface that is a hetero interface between a semiconductor layer and a semiconductor layer. Two concave portions are formed so as to extend from a primary surface as far as the interface. An electrode that is made of metal and provides a Schottky junction with the semiconductor layers is formed on a bottom surface and a side surface of the concave portion. An electrode that is made from metal and provides a low resistance contact with the semiconductor layers and is also in low resistance contact therewith is formed on the bottom surface and side surface of the concave portion. As a result, a semiconductor device is provided in which contact resistance between the electrodes and the semiconductor layers is reduced and high frequency characteristics are improved.
    • 在作为半导体层和半导体层之间的异质界面的界面附近产生二维载体。 两个凹部形成为从主面向界面延伸。 在凹部的底表面和侧面上形成由金属制成并与半导体层形成肖特基结的电极。 在凹部的底表面和侧表面上形成由金属制成并与半导体层具有低电阻接触并且与其低电阻接触的电极。 结果,提供了半导体器件,其中电极和半导体层之间的接触电阻降低,并且提高了高频特性。
    • 10. 发明授权
    • III-V nitride semiconductor device comprising a concave shottky contact and an ohmic contact
    • III-V族氮化物半导体器件包括凹形肖特基接触和欧姆接触
    • US07692298B2
    • 2010-04-06
    • US10573458
    • 2005-08-25
    • Koji OtsukaShinichi Iwakami
    • Koji OtsukaShinichi Iwakami
    • H01L23/48
    • H01L29/872
    • A two-dimensional carrier is generated in the vicinity of an interface that is a hetero interface between a semiconductor layer and a semiconductor layer. Two concave portions are formed so as to extend from a primary surface as far as the interface. An electrode that is made of metal and provides a Schottky junction with the semiconductor layers is formed on a bottom surface and a side surface of the concave portion. An electrode that is made from metal and provides a low resistance contact with the semiconductor layers and is also in low resistance contact therewith is formed on the bottom surface and side surface of the concave portion. As a result, a semiconductor device is provided in which contact resistance between the electrodes and the semiconductor layers is reduced and high frequency characteristics are improved.
    • 在作为半导体层和半导体层之间的异质界面的界面附近产生二维载体。 两个凹部形成为从主面向界面延伸。 在凹部的底表面和侧面上形成由金属制成并与半导体层形成肖特基结的电极。 在凹部的底表面和侧表面上形成由金属制成并与半导体层具有低电阻接触并且与其低电阻接触的电极。 结果,提供了半导体器件,其中电极和半导体层之间的接触电阻降低,并且提高了高频特性。