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    • 3. 发明申请
    • WAFER DIVIDING METHOD
    • 波分方法
    • US20090186465A1
    • 2009-07-23
    • US12346490
    • 2008-12-30
    • Shinichi FujisawaTakashi Ono
    • Shinichi FujisawaTakashi Ono
    • H01L21/02
    • H01L21/78H01L21/67092
    • A wafer dividing method for dividing a wafer into individual devices, the front side of the wafer being formed with a plurality of crossing streets for partitioning a plurality of areas where the devices are respectively formed. The wafer dividing method includes the steps of coating the front side of the wafer with a protective film, cutting the front side of the wafer with the protective film along the streets to form a plurality of kerfs each having a depth corresponding to the finished thickness of each device, removing chipping from each kerf by plasma etching, attaching a protective tape to the front side of the wafer, grinding the back side of the wafer to expose each kerf to the back side of the wafer, thereby dividing the wafer into the individual devices, and removing a grinding strain from the back side of the wafer.
    • 一种用于将晶片分成各个装置的晶片分割方法,所述晶片的前侧形成有用于分隔形成所述器件的多个区域的多个交叉街道。 晶片分割方法包括以下步骤:用保护膜涂覆晶片的前侧,沿着街道用保护膜切割晶片的前侧以形成多个切口,每个切口具有对应于最终厚度的深度 每个器件通过等离子体蚀刻从每个切口去除碎片,将保护带附着到晶片的前侧,研磨晶片的背面以将每个切口暴露于晶片的背面,从而将晶片分成单独的 装置,并且从晶片的背面移除研磨应变。
    • 4. 发明申请
    • Wafer machining apparatus
    • 晶圆加工设备
    • US20060130967A1
    • 2006-06-22
    • US11302392
    • 2005-12-14
    • Shinichi FujisawaTakashi Ono
    • Shinichi FujisawaTakashi Ono
    • H01L21/306C23F1/00
    • H01L21/78H01L21/67092H01L21/67219H01L21/6835H01L2221/6834
    • The present invention provides a wafer machining apparatus which can separate streets with high efficiency, without deteriorating the quality of devices, in dividing a wafer into individual devices. The wafer machining apparatus comprises grinding means for grinding the back of the wafer; resist film coating means for passing a radiation from the back side to the face side of the wafer to recognize the streets, and coating a resist film onto regions other than street-corresponding regions; and plasma etching means for etching away the street-corresponding regions in a range from the back to the face of the wafer to divide the wafer into individual devices, and thus can perform a procedure ranging from grinding of the back of the wafer to the division of the wafer into the devices. In the resist film coating means, the wafer is imaged from the back side by an infrared imaging portion to recognize the streets formed on the face side, and a liquid resist is jetted from a resist jetting portion toward the regions other than the street-corresponding regions, whereby only the street-corresponding regions can be exposed.
    • 本发明提供了一种在将晶片分割为各个装置的同时,能够高效率地分离街道而不劣化装置的质量的晶片加工装置。 晶片加工装置包括用于研磨晶片背面的研磨装置; 抗辐射膜涂布装置,用于将辐射从晶片的背面传递到表面,以识别街道,并将抗蚀剂膜涂覆到除街道对应区域之外的区域上; 以及等离子体蚀刻装置,用于在从晶片的背面到表面的范围内蚀刻掉街道对应的区域,以将晶片分割成单独的器件,并且因此可以执行从晶片背面研磨到分割 的晶片进入器件。 在抗蚀剂膜涂布装置中,通过红外成像部分从背面对晶片进行成像,以识别在正面上形成的街道,并且将抗蚀剂从抗蚀剂喷射部分喷射到除街道对应之外的区域 区域,从而只能暴露与街道对应的区域。
    • 5. 发明授权
    • Disk device
    • 磁盘设备
    • US08752076B2
    • 2014-06-10
    • US12050095
    • 2008-03-17
    • Shinichi Fujisawa
    • Shinichi Fujisawa
    • G11B17/04
    • G11B17/051G11B17/0288G11B33/08
    • A lift frame supports a turntable unit, and moves between a lower-most position and a read/write position in conjunction with slide movement of a follower slider. The follower slider has a pressing member and a cam groove. Pressed to a bottom plate of a device chassis by a coil spring, the pressing member stabilizes the movement of the follower slider. The cam groove fits onto a lifting pin of the lift frame. At the read/write position, the cam bottom wall is constituted of a pin pushing portion. The pin pushing portion is pushed upward by the coil spring to press the lifting pin to a cam groove upper wall when the lift frame is in the read/write position.
    • 升降机架支撑转盘单元,并且在最低位置和读/写位置之间移动,并结合随动滑块的滑动运动。 从动滑块具有按压部件和凸轮槽。 按压构件通过螺旋弹簧压向装置底盘的底板,使按压构件稳定从动滑块的移动。 凸轮槽装配在升降机架的提升销上。 在读/写位置,凸轮底壁由销推动部分构成。 当提升框架处于读/写位置时,销推动部分被螺旋弹簧向上推动以将提升销按压到凸轮槽上壁。
    • 6. 发明授权
    • Disk device with insertion slot capable of preventing double loading of disks
    • 具有插槽的磁盘设备能够防止双重加载磁盘
    • US08015575B2
    • 2011-09-06
    • US12428374
    • 2009-04-22
    • Shinichi Fujisawa
    • Shinichi Fujisawa
    • G11B33/02G11B17/04
    • G11B17/051
    • An optical disk device has a casing, an insertion slot and a loading mechanism for loading a disk. A shutter is shiftable transversely to an elongate slot shape of the insertion slot, closes the insertion slot partially when in a closed position, and opens the insertion slot when in an open position. A coupling hole is disposed at an end of the shutter with respect to the elongate slot shape. A shift lever moves the coupling hole in a first direction along the elongate slot shape upon shifting of the loading mechanism for loading, and moves the coupling hole in a second direction upon shifting of the loading mechanism for unloading. A cam mechanism shifts the shutter to the closed position when the coupling hole is moved in the first direction, and shifts the shutter to the open position when the coupling hole is moved in the second direction.
    • 光盘装置具有壳体,插槽和用于装载盘的装载机构。 快门可以横向于插入槽的细长槽形状移动,当处于关闭位置时部分地封闭插入槽,并且当处于打开位置时打开插槽。 耦合孔相对于细长槽形状设置在活门的端部。 变速杆在移动用于装载的装载机构时沿着细长槽形状沿着第一方向移动联接孔,并且在卸载装载机构移动时沿第二方向移动联接孔。 当联接孔沿第一方向移动时,凸轮机构将闸门移动到关闭位置,并且当联接孔沿第二方向移动时,将挡板移动到打开位置。
    • 7. 发明申请
    • DISK DEVICE
    • 磁盘设备
    • US20110029993A1
    • 2011-02-03
    • US12849580
    • 2010-08-03
    • Shinichi Fujisawa
    • Shinichi Fujisawa
    • G11B17/04
    • G11B17/051
    • To eject an optical disk forcibly from a disk device by a manual operation, an operation pin is inserted into an emergency hole of a front bezel. Then, the operation pin causes first and second ejection levers to move rearward to push a first transmission gear down to a disengaged position. When the first transmission gear is pushed down to the disengaged position, a loading slider begins to move forward according to a biasing force of a coil spring, feeding the disk outward. After moving a distance forward, the loading slider is stopped against a receiving portion of a first ejection lever, thereby to stop the disk at a half-eject position where the disk slightly protrudes from the bezel. Thereafter, when the operation pin is pulled out, the loading slider moves forward along with the pull-out movement of the operation pin, and the disk is fed out to a full-eject position.
    • 要通过手动操作从磁盘设备强制弹出光盘,则操作销插入前挡板的紧急孔中。 然后,操作销使第一和第二喷射杆向后移动,以将第一传动齿轮向下推动到脱离位置。 当第一传动齿轮被向下压到脱离位置时,加载滑块根据螺旋弹簧的偏压力开始向前移动,将盘向外供给。 在向前移动一段距离之后,装载滑块停靠在第一弹出杆的接收部分上,从而将盘停止在半弹出位置,其中盘从边框略微突出。 此后,当操作销被拉出时,装载滑块随着操作销的拉出运动而向前移动,并且盘被送出到完全弹出位置。
    • 8. 发明授权
    • Disk device including a lifting frame for disk handling
    • 磁盘设备包括用于磁盘处理的提升架
    • US07814508B2
    • 2010-10-12
    • US11821520
    • 2007-06-22
    • Shinichi Fujisawa
    • Shinichi Fujisawa
    • G11B17/04
    • G11B17/051
    • An optical disk drive is loaded with a disk set in a chuck position upon entry through an insertion slot by automatic loading. A lifting frame is movable between high and low positions in an opening of a base panel. A disk driving unit is disposed on the lifting frame for chucking and rotating the disk. A leading segment is connected with the lifting frame, and raises a distal end of a periphery of the disk from the insertion slot by forming a slope. The leading segment extends in the insertion direction of the disk, and has an end positioned beside the disk driving unit. The end of the leading segment is kept higher than an upper surface of the lifting frame when the lifting frame is in the low position.
    • 当通过自动加载进入插入槽时,光盘驱动器装载有设置在卡盘位置的盘。 提升框架可在基板的开口中的高位和低位之间移动。 磁盘驱动单元设置在提升框架上,用于夹紧和旋转盘。 引导段与提升框架连接,并且通过形成斜坡从插入槽升高盘的周边的远端。 引导部分在盘的插入方向上延伸,并且具有位于盘驱动单元旁边的端部。 当提升框架处于低位置时,引导段的端部保持高于起重框架的上表面。
    • 9. 发明申请
    • DISK DEVICE
    • 磁盘设备
    • US20100138846A1
    • 2010-06-03
    • US12626552
    • 2009-11-25
    • Shinichi Fujisawa
    • Shinichi Fujisawa
    • G11B17/04
    • G11B17/051G11B17/0288
    • A lifting frame has a lifting pin that fits into a lifting cam groove of a follower slider, and swings up and down about a rod near a disk slot. A holding member is swingably attached to front end of the lifting frame. This holding member supports a turntable unit for holding a disk. The holding member has a cam follower pin that fits into a swinging cam groove of a loading slider to raise and lower the holding member. When the lifting frame swings down from a read/write position to a lowered position, the holding member inclines from the lifting frame so as to place the turntable unit substantially parallel to a disk carrying direction.
    • 提升框架具有一个提升销,该提升销装配在从动滑块的提升凸轮槽中,并绕着一个靠近盘槽的杆而上下摆动。 保持构件可摆动地附接到提升框架的前端。 该保持构件支撑用于保持盘的转盘单元。 保持构件具有凸轮从动销,其配合到装载滑块的摆动凸轮槽中,以升高和降低保持构件。 当提升架从读/写位置向下摆动到下降位置时,保持构件从提升框架倾斜,以将转盘单元基本上平行于盘传送方向。