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    • 2. 发明申请
    • ULTRAVIOLET LIGHT RECEIVING ELEMENT AND METHOD FOR MEASURING DOSE OF ULTRAVIOLET RADIATION
    • ULTRAVIOLET光接收元件和测量超紫外线辐射剂量的方法
    • US20110122400A1
    • 2011-05-26
    • US13054763
    • 2009-07-29
    • Shingo OnoNoriaki KawaguchiKentaro FukudaToshihisa Suyama
    • Shingo OnoNoriaki KawaguchiKentaro FukudaToshihisa Suyama
    • G01N21/33
    • H01L31/09G01J1/429H01L31/032
    • [Problems to be Solved] To provide a novel ultraviolet light receiving element which is selectively sensitive to ultraviolet radiation, and a method for measuring the dose of ultraviolet radiation using the ultraviolet light receiving element.[Means to Solve the Problems] An ultraviolet detecting layer composed of a thin film of a metal fluoride, such as cerium fluoride, lithium fluoride, magnesium fluoride or calcium fluoride, is formed on a substrate of silica glass, sapphire or the like. Further, at least a pair of an anode and a cathode are formed on the ultraviolet detecting layer to prepare an ultraviolet light receiving element. This ultraviolet light receiving element changes in electric resistivity in accordance with the dose of incident ultraviolet radiation. Thus, the dose of ultraviolet radiation can be measured by taking out and measuring the change as an electric signal.
    • [待解决的问题]提供对紫外线照射选择敏感的新颖的紫外线光接收元件以及使用紫外光接收元件测量紫外线辐射剂量的方法。 解决问题的方法在二氧化硅玻璃,蓝宝石等的基板上形成紫外线检测层,该层由金属氟化物如氟化铈,氟化锂,氟化镁,氟化钙等薄膜构成。 此外,在紫外线检测层上形成至少一对阳极和阴极,以制备紫外光接收元件。 该紫外光接收元件根据入射紫外线辐射的剂量而改变电阻率。 因此,可以通过取出并测量作为电信号的变化来测量紫外线辐射的剂量。