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    • 4. 发明授权
    • Quartz glass manufacturing method using hydrogen obtained by vaporizing liquid hydrogen
    • 使用通过蒸发液态氢获得的氢的石英玻璃制造方法
    • US09527764B2
    • 2016-12-27
    • US14280691
    • 2014-05-19
    • Shin-Etsu Chemical Co., Ltd.
    • Dai InoueTakaaki NagaoHiroyuki Koide
    • C03B37/014
    • C03B37/01413C03B37/0142C03B2201/02C03B2201/31C03B2207/36C03B2207/70C03B2207/85C03B2207/87Y02P40/57
    • Provided is a quartz glass manufacturing method that involves using one or more burners, supplying hydrogen and oxygen to the one or more burners to generate an oxyhydrogen flame, introducing a silicide into the oxyhydrogen flame, forming a porous base material by depositing silicon dioxide generated from a flame hydrolysis reaction with the silicide, and heating and sintering the porous base material to form transparent glass, the method comprising supplying hydrogen that is stored or made at a normal temperature to the one or more burners; controlling a hydrogen flow rate using a measurement apparatus or control apparatus that performs measurement based on heat capacity of a gas; vaporizing liquid hydrogen stored in a low-temperature storage chamber, and supplying the vaporized liquid hydrogen to the one or more burners as backup hydrogen; switching from the hydrogen to the backup hydrogen; and when switching, adjusting the hydrogen flow rate to a value obtained by multiplying the hydrogen flow rate immediately after switching by a predetermined correction coefficient.
    • 提供了一种石英玻璃制造方法,其包括使用一个或多个燃烧器,向一个或多个燃烧器供应氢气和氧气以产生氢氧焰,将硅化物引入氢氧焰中,通过沉积二氧化硅形成多孔基材, 与所述硅化物进行火焰水解反应,以及加热和烧结所述多孔基材以形成透明玻璃,所述方法包括将在常温下储存或制造的氢气供应给所述一个或多个燃烧器; 使用基于气体的热容量进行测量的测量装置或控制装置控制氢气流量; 蒸发存储在低温储存室中的液态氢,并将蒸发的液体氢气作为备用氢气供给到一个或多个燃烧器; 从氢气切换到备用氢气; 并且当切换时,将氢气流量调节到通过将切换之后的氢气流量乘以预定校正系数而获得的值。