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1. 发明申请

US20170184113A1 MONITORING DEVICE 有权
公开(公告)号：US20170184113A1
公开(公告)日：2017-06-29
申请号：US15335621
申请日：2016-10-27
申请人： Shimadzu Corporation
发明人： Nobuhiko MORIYAMA
IPC分类号： F04D27/00 , G01R22/10 , F04D29/058 , F04D17/16 , F04D25/06
CPC分类号： F04D27/001 , F04D17/168 , F04D19/042 , F04D25/06 , F04D29/058 , G01R22/10
摘要： A monitoring device for monitoring power consumption of a magnetic bearing vacuum pump rotatably driven by a motor and configured such that a rotor is magnetically levitated and supported by a magnetic bearing, comprises: a calculator configured to calculate the power consumption of the magnetic bearing vacuum pump, the power consumption of the magnetic bearing vacuum pump being obtained by adding power consumption of the motor based on a motor rotational speed and a motor current value and power consumption of the magnetic bearing together; and a display controller configured to display, on a display device, the power consumption of the magnetic bearing vacuum pump calculated by the calculator.

2. 发明申请

US20180306204A1 POWER SOURCE INTEGRATED VACUUM PUMP 审中-公开
公开(公告)号：US20180306204A1
公开(公告)日：2018-10-25
申请号：US15948735
申请日：2018-04-09
申请人： SHIMADZU CORPORATION
发明人： Haruhiko SAKAI , Nobuhiko MORIYAMA
IPC分类号： F04D29/58 , F04D25/06 , F04D19/04
CPC分类号： F04D29/5813 , F04D19/042 , F04D25/0606 , F04D29/058
摘要： A power source integrated vacuum pump configured such that a pump main body and a pump power source device are integrated together, comprises: a substrate which is provided at the pump power source device and on which an electronic component is mounted; a cooling device having a cooling surface fixed in contact with the substrate; and a heat insulating member having a smaller coefficient of thermal conductivity than that of a material forming the cooling surface and covering a cooling surface region to which the substrate is not fixed.

3. 发明申请

US20180279415A1 VACUUM PUMP AND PUMP-INTEGRATED POWER SOURCE DEVICE 审中-公开
公开(公告)号：US20180279415A1
公开(公告)日：2018-09-27
申请号：US15920510
申请日：2018-03-14
申请人： SHIMADZU CORPORATION
发明人： Nobuhiko MORIYAMA
IPC分类号： H05B1/02 , F04D19/04 , F04D29/58
CPC分类号： H05B1/0247 , F04D19/042 , F04D25/06 , F04D29/582 , F04D29/584
摘要： A vacuum pump comprises: a pump device including a pump motor, an exhaust function section configured to exhaust sucked gas, and at least two direct current heaters; and a pump-integrated power source device including a pump control section, a pump power source configured to supply power to the pump control section, a direct current heater control section configured to control the two direct current heaters, and a direct current heater power source configured to supply power to the direct current heater control section.

4. 发明申请

US20180291926A1 VACUUM PUMP CONTROL DEVICE 审中-公开
公开(公告)号：US20180291926A1
公开(公告)日：2018-10-11
申请号：US15479433
申请日：2017-04-05
申请人： Shimadzu Corporation
发明人： Nobuhiko MORIYAMA
IPC分类号： F04D29/58 , F04D25/06 , F04D29/058
CPC分类号： F04D29/5813 , F04D19/042
摘要： A vacuum pump control device comprises: a pump controller configured to control a vacuum pump; a cooling device configured to cool the pump controller; a housing configured to house the pump controller; a temperature sensor configured to detect, in the housing, a temperature at one of a first position or a second position having a higher temperature than that at the first position; a humidity sensor configured to detect a humidity at the second position in the housing; a temperature estimator configured to estimate a temperature at the other one of the first position or the second position based on the temperature detected by the temperature sensor; and a cooling controller configured to control execution and stop of cooling operation by the cooling device based on the temperature estimated by the temperature estimator, the temperature detected by the temperature sensor, and the humidity detected by the humidity sensor.

5. 发明申请

US20150064024A1 MOTOR CONTROLLER AND TURBO-MOLECULAR PUMP 有权
标题翻译：电机控制器和涡轮分子泵
公开(公告)号：US20150064024A1
公开(公告)日：2015-03-05
申请号：US14457216
申请日：2014-08-12
申请人： SHIMADZU CORPORATION
发明人： Nobuhiko MORIYAMA
IPC分类号： H02P7/06 , F04D27/00 , F04D19/04
CPC分类号： H02P7/06 , F04D19/042 , F04D27/0261 , H02P21/04 , H02P21/18 , H02P2203/03
摘要： A motor controller comprises: a rotation angle estimation unit for estimating and computing a rotation angle of a motor repeatedly based on the current and voltage of the motor without using a motor rotation angle detector; a speed calculation unit for calculating the period of the signal waveform of the rotation angle that is repeatedly estimated and calculated by the rotation angle estimation unit and for calculating an actual rotational speed of the motor based on the period; a drive signal generating unit for generating a drive signal to drive and control the motor based on at least a deviation between the actual rotational speed and a target rotational speed and the rotation angle; and a switching circuit that is switched based on the drive signal to provide drive power to the motor.
摘要翻译：电动机控制器包括：旋转角度估计单元，用于基于电动机的电流和电压重复地计算和计算电动机的旋转角度，而不使用电动机旋转角度检测器; 速度计算单元，用于计算由所述旋转角度估计单元重复地估计和计算的所述旋转角度的信号波形的周期，并且用于基于所述周期来计算所述马达的实际旋转速度; 驱动信号生成单元，用于基于至少实际旋转速度与目标旋转速度和旋转角度之间的偏差来生成驱动信号以驱动和控制马达; 以及基于驱动信号切换的开关电路，以向电动机提供驱动电力。

6. 发明申请

US20190383296A1 VACUUM PUMP AND DIAGNOSIS SYSTEM 审中-公开
公开(公告)号：US20190383296A1
公开(公告)日：2019-12-19
申请号：US16401947
申请日：2019-05-02
申请人： SHIMADZU CORPORATION
发明人： Toshifumi HASHIMOTO , Nobuhiko MORIYAMA
IPC分类号： F04D27/00 , G01M13/045 , F04D19/04 , F04D29/059
摘要： A vacuum pump comprises: a rotor; a stator; a rolling bearing configured to support a rotor shaft provided at the rotor; and a vibration sensor configured to detect vibration of the rolling bearing.

7. 发明申请

US20180238334A1 TURBO-MOLECULAR PUMP 审中-公开
公开(公告)号：US20180238334A1
公开(公告)日：2018-08-23
申请号：US15440061
申请日：2017-02-23
申请人： Shimadzu Corporation
发明人： Nobuhiko MORIYAMA
IPC分类号： F04D27/00 , F04D19/04 , F04D29/32 , F04D29/58 , F04D29/54
CPC分类号： F04D29/542 , F04D19/042 , F04D27/0261 , F04D27/0292 , F04D29/584
摘要： A turbo-molecular pump comprises a cylindrical rotor to be rotatably driven by a motor; a cylindrical stator provided corresponding to the rotor; a heater configured to elevate a temperature of the stator to a target temperature; a temperature sensor configured to detect the temperature of the stator; and a control section. A rotation start command is input after start of energization of the heater, the control section stops rotary driving of the rotor at a rated rotation speed until the temperature of the stator reaches a predetermined temperature set lower than the target temperature and begins the rotary driving at the rated rotation speed when the temperature of the stator exceeds the predetermined temperature.

8. 发明申请

US20170227018A1 VACUUM PUMP DEVICE AND VACUUM PUMP DEVICE SYSTEM 有权
公开(公告)号：US20170227018A1
公开(公告)日：2017-08-10
申请号：US15040380
申请日：2016-02-10
申请人： Shimadzu Corporation
发明人： Nobuhiko MORIYAMA
IPC分类号： F04D29/58 , F04D27/00 , F04D25/06
CPC分类号： F04D29/584 , F04D19/042 , F04D25/06 , F04D27/001 , F04D27/004 , F04D27/0261 , F04D27/0292
摘要： A vacuum pump device comprises: a power supply device including a dew condensation detector configured to detect dew condensation, a regenerative braking resistance, and a controller configured to energize the regenerative braking resistance; a cooling system using coolant; and a pump main body including a motor rotatably driven by the power supply device. When the dew condensation detector detects the dew condensation, the controller energizes the regenerative braking resistance to heat an inside of the power supply device.

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