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    • 5. 发明申请
    • Test structure for semiconductor chip
    • 半导体芯片测试结构
    • US20080277659A1
    • 2008-11-13
    • US11801529
    • 2007-05-10
    • Shih-Hsun HsuHsien-Wei ChenAnbiarshy N.F. Wu
    • Shih-Hsun HsuHsien-Wei ChenAnbiarshy N.F. Wu
    • H01L23/544
    • H01L27/0203H01L22/34H01L23/585H01L2223/5446H01L2223/54493H01L2924/0002H01L2924/00
    • A test structure for use in a semiconductor chip. In a preferred embodiment, a number of die are formed in an array on a semiconductor wafer substrate. Each die includes an active area defined by a seal ring and is separated from those adjacent to it by a thin scribe line. In addition to the operational structures formed in the active area of each die, one or more test structures are formed. In a preferred embodiment, these test structures are formed into one or more PCM (process control monitor) test pattern layout areas that are positioned near the seal ring and outside of the operational bond pads. Some or all of individual pads in the PCM test pattern layout area may then be connected to corresponding features on adjacent dice, and in some applications enable the simultaneous performance of WAT (wafer acceptance test) and CP (circuit probe) testing.
    • 用于半导体芯片的测试结构。 在优选实施例中,在半导体晶片衬底上以阵列形式形成多个管芯。 每个模具包括由密封环限定的有效区域,并通过薄的划线与其相邻的区域分开。 除了在每个管芯的有源区域中形成的操作结构之外,还形成一个或多个测试结构。 在优选实施例中,这些测试结构被形成为位于密封环附近和操作接合焊盘外部的一个或多个PCM(过程控制监视器)测试图案布局区域。 PCM测试图案布局区域中的单个焊盘中的一些或全部可以连接到相邻裸片上的相应特征,并且在某些应用中,能够同时执行WAT(晶片验收测试)和CP(电路探针)测试。