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    • 10. 发明申请
    • MEMORY STRUCTURE AND FABRICATING METHOD THEREOF
    • 记忆结构及其制作方法
    • US20130105882A1
    • 2013-05-02
    • US13287728
    • 2011-11-02
    • Jyun-Siang HuangWen-Jer TsaiShih-Guei Yan
    • Jyun-Siang HuangWen-Jer TsaiShih-Guei Yan
    • H01L29/792H01L21/336
    • H01L29/42332H01L27/11521H01L27/11568H01L29/66825H01L29/66833H01L29/7889H01L29/7926
    • A memory structure having a memory cell including a first dielectric layer, a gate, a semiconductor layer, a first doped region, a second doped region and a charge storage layer is provided. The first dielectric layer is on the substrate. The gate includes a base portion on the first dielectric layer and a protruding portion disposed on the base portion and partially exposing the base portion. The semiconductor layer is conformally disposed on the gate, and includes a top portion over the protruding portion, a bottom portion over the base portion exposed by the protruding portion and a side portion located at a sidewall of the protruding portion and connecting the top and bottom portions. The first and second doped regions are respectively in the top and bottom portions. The side portion serves as a channel region. The charge storage layer is between the gate and the semiconductor layer.
    • 提供了具有包括第一介电层,栅极,半导体层,第一掺杂区域,第二掺杂区域和电荷存储层的存储单元的存储器结构。 第一介电层位于基板上。 所述栅极包括在所述第一介电层上的基部和设置在所述基部上的部分露出所述基部的突出部。 所述半导体层保形地设置在所述栅极上,并且包括在所述突出部分之上的顶部,所述基部上的由所述突出部分露出的底部和位于所述突出部分的侧壁处的侧部,并且将所述顶部和底部 部分。 第一和第二掺杂区分别位于顶部和底部。 侧部用作沟道区域。 电荷存储层位于栅极和半导体层之间。