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    • 1. 发明授权
    • Systems and methods for laser material manipulation
    • 激光材料操纵的系统和方法
    • US07893384B2
    • 2011-02-22
    • US11160270
    • 2005-06-16
    • Shih-Chao Lin
    • Shih-Chao Lin
    • B23K26/00B23K26/02
    • B23K26/032B23K26/03B23K26/0624B23K26/066
    • A laser material manipulation system is provided for material processing, such as laser ablation, laser deposition and laser machining. The system includes a laser for emitting laser pulses and a laser imaging device having an array of controllable imaging elements. The laser imaging device receives the laser pulses emitted from the laser, forms a laser image through the controllable imaging elements, and projects the laser image onto a target material which is to be processed. The projected laser image processes the material according to a desired pattern. The laser can be a femtosecond laser. The laser imaging device can be a liquid crystal display (LCD) or a digital micromirror device (DMD). An SEM can be used for monitoring the material distribution and dynamically adjust the laser image according to the monitor result.
    • 提供激光材料操作系统,用于材料加工,如激光烧蚀,激光沉积和激光加工。 该系统包括用于发射激光脉冲的激光器和具有可控成像元件阵列的激光成像装置。 激光成像装置接收从激光发射的激光脉冲,通过可控成像元件形成激光图像,并将激光图像投影到待处理的目标材料上。 投影的激光图像根据期望的图案处理材料。 激光可以是飞秒激光。 激光成像装置可以是液晶显示器(LCD)或数字微镜装置(DMD)。 SEM可用于监测材料分布,并根据监测结果动态调整激光图像。
    • 2. 发明申请
    • SYSTEMS AND METHODS FOR LASER MATERIAL MANIPULATION
    • 用于激光材料操作的系统和方法
    • US20060119743A1
    • 2006-06-08
    • US11160270
    • 2005-06-16
    • Shih-Chao Lin
    • Shih-Chao Lin
    • H04N5/74
    • B23K26/032B23K26/03B23K26/0624B23K26/066
    • A laser material manipulation system is provided for material manipulations such as laser ablation, laser deposition and laser machining. The system includes a laser for emitting laser pulses and a laser imaging device having an array of controllable imaging elements. The laser imaging device receives the laser pulses emitted from the laser, forms a laser image through the controllable imaging elements, and projects the laser image onto a target material which needs to be manipulated. The projected laser image manipulates the material according to a desired manipulation pattern. The laser can be a femtosecond laser. The laser imaging device can be a liquid crystal display (LCD) or a digital micromirror device (DMD). An SEM can be used for monitoring the material distribution and dynamically adjust the laser image according to the monitor result.
    • 为激光烧蚀,激光沉积和激光加工等材料操作提供激光材料操纵系统。 该系统包括用于发射激光脉冲的激光器和具有可控成像元件阵列的激光成像装置。 激光成像装置接收从激光发射的激光脉冲,通过可控成像元件形成激光图像,并将激光图像投影到需要操纵的目标材料上。 投影的激光图像根据期望的操作模式来操纵材料。 激光可以是飞秒激光。 激光成像装置可以是液晶显示器(LCD)或数字微镜装置(DMD)。 SEM可用于监测材料分布,并根据监测结果动态调整激光图像。