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1. 发明授权

US08246900B2 Annealing apparatus 有权
标题翻译：退火设备
公开(公告)号：US08246900B2
公开(公告)日：2012-08-21
申请号：US12440034
申请日：2007-08-31
申请人： Shigeru Kasai , Hiroyuki Miyashita , Masatake Yoneda , Tomohiro Suzuki , Sumi Tanaka , Masamichi Nomura , Miwa Shimizu
发明人： Shigeru Kasai , Hiroyuki Miyashita , Masatake Yoneda , Tomohiro Suzuki , Sumi Tanaka , Masamichi Nomura , Miwa Shimizu
IPC分类号： H01L21/26 , C21D1/74
CPC分类号： H01L21/67115 , H01L21/67109 , H01L31/1864 , Y02E10/50 , Y02P70/521
摘要： Provided is an annealing apparatus, which is free from a problem of reduced light energy efficiency resulted by the reduction of light emission amount due to a heat generation and capable of maintaining stable performance. The apparatus includes: a processing chamber 1 for accommodating a wafer W; heating sources 17a and 17b including LEDs 33 and facing the surface of the wafer W to irradiate light on the wafer W; light-transmitting members 18a and 18b arranged in alignment with the heating sources 17a and 17b to transmit the light emitted from the LEDs 33; cooling members 4a and 4b supporting the light-transmitting members 18a and 18b at opposite side to the processing chamber 1 to make direct contact with the heating sources 17a and 17b and made of a material of high thermal conductivity; and a cooling mechanism for cooling the cooling members 4a and 4b with a coolant.
摘要翻译：提供一种退火装置，其不会由于发热而导致的发光量的降低而导致光能效率降低的问题，并且能够保持稳定的性能。该装置包括：用于容纳晶片W的处理室1; 加热源17a和17b包括LED33并面向晶片W的表面以将光照射在晶片W上; 与发热源17a和17b对准布置的透光部件18a和18b，以透射从LED33发出的光; 在与处理室1相反的一侧支撑透光部件18a和18b的冷却部件4a和4b与加热源17a和17b直接接触并由导热性高的材料制成; 以及用冷却剂冷却冷却部件4a，4b的冷却机构。

2. 发明申请

US20100038833A1 ANNEALING APPARATUS 有权
标题翻译：退火装置
公开(公告)号：US20100038833A1
公开(公告)日：2010-02-18
申请号：US12440034
申请日：2007-08-31
申请人： Shigeru Kasai , Hiroyuki Miyashita , Masatake Yoneda , Tomohiro Suzuki , Sumi Tanaka , Masamichi Nomura , Miwa Shimizu
发明人： Shigeru Kasai , Hiroyuki Miyashita , Masatake Yoneda , Tomohiro Suzuki , Sumi Tanaka , Masamichi Nomura , Miwa Shimizu
IPC分类号： H01L21/26 , C21D1/74
CPC分类号： H01L21/67115 , H01L21/67109 , H01L31/1864 , Y02E10/50 , Y02P70/521
摘要： Provided is an annealing apparatus, which is free from a problem of reduced light energy efficiency resulted by the reduction of light emission amount due to a heat generation and capable of maintaining stable performance. The apparatus includes: a processing chamber 1 for accommodating a wafer W; heating sources 17a and 17b including LEDs 33 and facing the surface of the wafer W to irradiate light on the wafer W; light-transmitting members 18a and 18b arranged in alignment with the heating sources 17a and 17b to transmit the light emitted from the LEDs 33; cooling members 4a and 4b supporting the light-transmitting members 18a and 18b at opposite side to the processing chamber 1 to make direct contact with the heating sources 17a and 17b and made of a material of high thermal conductivity; and a cooling mechanism for cooling the cooling members 4a and 4b with a coolant.
摘要翻译：提供一种退火装置，其不会由于发热而导致的发光量的降低而导致光能效率降低的问题，并且能够保持稳定的性能。该装置包括：用于容纳晶片W的处理室1; 加热源17a和17b包括LED33并面向晶片W的表面以将光照射在晶片W上; 与发热源17a和17b对准布置的透光部件18a和18b，以透射从LED33发出的光; 在与处理室1相反的一侧支撑透光部件18a和18b的冷却部件4a和4b与加热源17a和17b直接接触并由导热性高的材料制成; 以及用冷却剂冷却冷却部件4a，4b的冷却机构。

3. 发明授权

US07303190B2 Recording apparatus including automatic feeding mechanism and automatic feeding mechanism 失效
标题翻译：记录装置包括自动进给机构和自动进给机构
公开(公告)号：US07303190B2
公开(公告)日：2007-12-04
申请号：US10854784
申请日：2004-05-27
申请人： Tsuyoshi Yamanaka , Yuji Miyamoto , Miwa Shimizu
发明人： Tsuyoshi Yamanaka , Yuji Miyamoto , Miwa Shimizu
IPC分类号： B65H1/00
CPC分类号： B41J13/103 , B41J11/0095
摘要： A recording apparatus including an automatic feeding mechanism for picking up one of recording media placed on a feed tray one by one and feeding the recording medium is provided. The automatic feeding mechanism includes: the feed tray on which a predetermined number of recording medium can be placed; a hopper for pushing the recording media on the feed tray toward a feed roller; and a separator located in a downstream of the hopper near the hopper. The automatic feeding mechanism picks up the recording media one by one in an order from an uppermost recording medium to a lowermost recording medium and feeds the recording medium thus picked to its downstream by an action of the feed roller and the hopper to sandwich and transfer the recording medium and a separating action of the separator. The automatic feeding mechanism can be rotated around a fulcrum of rotation so as to be foldable.
摘要翻译：一种记录装置，包括一个自动进给机构，用于一个接一个地拾取放置在进给托盘上的一个记录介质，并提供记录介质。自动进给机构包括：能够放置预定数量的记录介质的进给托盘; 用于将进给托盘上的记录介质朝向进给辊推动的料斗; 以及位于料斗附近的料斗下游的分离器。自动进给机构以从最上层的记录介质到最下面的记录介质的顺序逐一拾取记录介质，并且通过进给辊和料斗的作用将如此拾取的记录介质输送到其下游，以夹持和传送记录介质和分离器的分离作用。自动进给机构可以围绕旋转支点旋转以便可折叠。

4. 发明申请

US20050051943A1 Recording apparatus including automatic feeding mechanism and automatic feeding mechanism 失效
标题翻译：记录装置包括自动进给机构和自动进给机构
公开(公告)号：US20050051943A1
公开(公告)日：2005-03-10
申请号：US10854784
申请日：2004-05-27
申请人： Tsuyoshi Yamanaka , Yuji Miyamoto , Miwa Shimizu
发明人： Tsuyoshi Yamanaka , Yuji Miyamoto , Miwa Shimizu
IPC分类号： B41J2/01 , B41J11/00 , B41J13/00 , B41J13/10 , B65H1/04 , B65H1/12 , B65H1/26 , G03G15/00 , B65H5/22
CPC分类号： B41J13/103 , B41J11/0095
摘要： A recording apparatus including an automatic feeding mechanism for picking up one of recording media placed on a feed tray one by one and feeding the recording medium is provided. The automatic feeding mechanism includes: the feed tray on which a predetermined number of recording medium can be placed; a hopper for pushing the recording media on the feed tray toward a feed roller; and a separator located in a downstream of the hopper near the hopper. The automatic feeding mechanism picks up the recording media one by one in an order from an uppermost recording medium to a lowermost recording medium and feeds the recording medium thus picked to its downstream by an action of the feed roller and the hopper to sandwich and transfer the recording medium and a separating action of the separator. The automatic feeding mechanism can be rotated around a fulcrum of rotation so as to be foldable.
摘要翻译：一种记录装置，包括一个自动进给机构，用于一个接一个地拾取放置在进给托盘上的一个记录介质，并提供记录介质。自动进给机构包括：能够放置预定数量的记录介质的进给托盘; 用于将进给托盘上的记录介质朝向进给辊推动的料斗; 以及位于料斗附近的料斗下游的分离器。自动进给机构以从最上层的记录介质到最下面的记录介质的顺序逐一拾取记录介质，并且通过进给辊和料斗的作用将如此拾取的记录介质输送到其下游，以夹持和传送记录介质和分离器的分离作用。自动进给机构可以围绕旋转支点旋转以便可折叠。

5. 发明申请

US20050017434A1 Recording-medium returning mechanism and a recording apparatus including the same, and medium-returning mechanism and a liquid ejection apparatus including the same 有权
标题翻译：记录介质返回机构和包括该记录介质返回机构的记录装置和介质返回机构以及包括该返回机构的液体喷射装置
公开(公告)号：US20050017434A1
公开(公告)日：2005-01-27
申请号：US10854804
申请日：2004-05-27
申请人： Tsuyoshi Yamanaka , Yuji Miyamoto , Miwa Shimizu
发明人： Tsuyoshi Yamanaka , Yuji Miyamoto , Miwa Shimizu
IPC分类号： B41J2/01 , B41J13/00 , B41J13/10 , B65H3/46 , B65H3/56
CPC分类号： B41J13/103
摘要： A recording-medium returning mechanism includes: a feed roller, provided to a feed-roller shaft that can be rotated, for coming into contact with a recording medium and feeding it; a hopper including a holder for holding a plurality of recording media stacked, the hopper being located at a position allowing the recording media on the holder to come into contact with the feed roller while being pressed against the feed roller and a position moving the recording media on the holder away from the feed roller; a separator for separating an uppermost recording medium on the holder from another recording medium simultaneously fed with the uppermost recording medium; and a return lever for returning the other recording medium to the holder.
摘要翻译：记录介质返回机构包括：进给辊，设置在可旋转的进给辊轴上，用于与记录介质接触并进给; 料斗，其包括用于保持堆叠的多个记录介质的保持器，所述料斗位于允许所述保持器上的记录介质与所述进给辊接触的位置，同时压靠所述进给辊，并且移动所述记录介质的位置在进料辊上的支架上; 分离器，用于将保持器上的最上面的记录介质与同时供给最上面的记录介质的另一个记录介质分离; 以及用于将另一记录介质返回到保持器的返回杆。

6. 发明授权

US07484724B2 Recording-medium returning mechanism and a recording apparatus including the same, and medium-returning mechanism and a liquid ejection apparatus including the same 有权
标题翻译：记录介质返回机构和包括该记录介质返回机构的记录装置和介质返回机构以及包括该返回机构的液体喷射装置
公开(公告)号：US07484724B2
公开(公告)日：2009-02-03
申请号：US10854804
申请日：2004-05-27
申请人： Tsuyoshi Yamanaka , Yuji Miyamoto , Miwa Shimizu
发明人： Tsuyoshi Yamanaka , Yuji Miyamoto , Miwa Shimizu
IPC分类号： B65H3/52
CPC分类号： B41J13/103
摘要： A recording-medium returning mechanism includes: a feed roller, provided to a feed-roller shaft that can be rotated, for coming into contact with a recording medium and feeding it; a hopper including a holder for holding a plurality of recording media stacked, the hopper being located at a position allowing the recording media on the holder to come into contact with the feed roller while being pressed against the feed roller and a position moving the recording media on the holder away from the feed roller; a separator for separating an uppermost recording medium on the holder from another recording medium simultaneously fed with the uppermost recording medium; and a return lever for returning the other recording medium to the holder.
摘要翻译：记录介质返回机构包括：进给辊，设置在可旋转的进给辊轴上，用于与记录介质接触并进给; 料斗，其包括用于保持堆叠的多个记录介质的保持器，所述料斗位于允许所述保持器上的记录介质与所述进给辊接触的位置，同时压靠所述进给辊，并且移动所述记录介质的位置在进料辊上的支架上; 分离器，用于将保持器上的最上面的记录介质与同时供给最上面的记录介质的另一个记录介质分离; 以及用于将另一记录介质返回到保持器的返回杆。

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