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    • 2. 发明申请
    • POWER DEVICE
    • 电源设备
    • US20110133312A1
    • 2011-06-09
    • US13058544
    • 2008-10-14
    • Shigeo TooiTetsujiro Tsunoda
    • Shigeo TooiTetsujiro Tsunoda
    • H01L29/739
    • H01L29/7395H01L29/0661H01L29/1095
    • The present invention is a power device includes, a first conductive type semiconductor substrate, a second conductive type base region formed on a surface of the semiconductor substrate, a second conductive type collector region formed on a rear surface of the semiconductor substrate, a first conductive type emitter region formed on a surface of the base region, a trench gate formed via a gate insulating film in a first trench groove formed in the base region so as to penetrate the emitter region, a dent formed in the base region in proximity to the emitter region, a second conductive type contact layer formed on an inner wall of the dent, having a higher dopant density than that of the base region, a dummy trench formed via a dummy trench insulating film in a second trench groove formed at a bottom of the dent, and an emitter electrode electrically connected to the emitter region, the contact layer and the dummy trench, wherein the trench gate and the dummy trench reach the semiconductor substrate.
    • 本发明是一种功率器件,包括第一导电型半导体衬底,形成在半导体衬底的表面上的第二导电型基极区域,形成在半导体衬底的后表面上的第二导电类型集电极区域,第一导电类型 形成在基极区域的表面上的栅极型发射极区域,形成在基极区域中的第一沟槽中的栅极绝缘膜的沟槽栅极,以穿透发射极区域,形成在基极区域附近的凹陷 发射极区域,形成在凹陷内壁上的第二导电类型接触层,具有比基极区域更高的掺杂剂密度;在第二沟槽沟槽中形成的虚设沟槽,所述第二沟槽沟槽形成在底部 凹陷和电连接到发射极区域的发射极电极,接触层和虚设沟槽,其中沟槽栅极和虚拟沟槽到达半导体 ctor底物。
    • 6. 发明授权
    • Power device
    • 电源设备
    • US08129818B2
    • 2012-03-06
    • US13058544
    • 2008-10-14
    • Shigeo TooiTetsujiro Tsunoda
    • Shigeo TooiTetsujiro Tsunoda
    • H01L29/739
    • H01L29/7395H01L29/0661H01L29/1095
    • The present invention is a power device includes, a first conductive type semiconductor substrate, a second conductive type base region formed on a surface of the semiconductor substrate, a second conductive type collector region formed on a rear surface of the semiconductor substrate, a first conductive type emitter region formed on a surface of the base region, a trench gate formed via a gate insulating film in a first trench groove formed in the base region so as to penetrate the emitter region, a dent formed in the base region in proximity to the emitter region, a second conductive type contact layer formed on an inner wall of the dent, having a higher dopant density than that of the base region, a dummy trench formed via a dummy trench insulating film in a second trench groove formed at a bottom of the dent, and an emitter electrode electrically connected to the emitter region, the contact layer and the dummy trench, wherein the trench gate and the dummy trench reach the semiconductor substrate.
    • 本发明是一种功率器件,包括第一导电型半导体衬底,形成在半导体衬底的表面上的第二导电型基极区域,形成在半导体衬底的后表面上的第二导电类型集电极区域,第一导电类型 形成在基极区域的表面上的栅极型发射极区域,形成在基极区域中的第一沟槽中的栅极绝缘膜的沟槽栅极,以穿透发射极区域,形成在基极区域附近的凹陷 发射极区域,形成在凹陷内壁上的第二导电类型接触层,具有比基极区域更高的掺杂剂密度;在第二沟槽沟槽中形成的虚设沟槽,所述第二沟槽沟槽形成在底部 凹陷和电连接到发射极区域的发射极电极,接触层和虚设沟槽,其中沟槽栅极和虚拟沟槽到达半导体 ctor底物。