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    • 4. 发明授权
    • Method of supporting reference plate for lightwave interferometer
    • 支持光波干涉仪参考板的方法
    • US06556304B1
    • 2003-04-29
    • US09419818
    • 1999-10-18
    • Hiroshi Shibamoto
    • Hiroshi Shibamoto
    • G01B902
    • G01B9/02052
    • An O ring 41 having an inside diameter slightly smaller than the diameter of a reference plate 1 is wound about the reference plate 1 at an outer peripheral face position aligning with a neutral plane 42 of the reference plate 1, and the O ring 41 and the outer peripheral face 4 of the reference plate 1 are uniformly bonded and secured together with an adhesive 32. Subsequently, the reference plate 1 wound with the O ring 41 is inserted into an attachment 5 to be mounted to the main body of an interferometer, by way of an opening of the attachment 5. After it is confirmed that the O ring 41 is stably in contact with the abutment of the attachment 5, and that reference plate 1 is not directly in contact with the attachment 5, a pressure ring 12 is caused to press and secure the O ring 41. Thus, the reference plate 1 is prevented from deforming when being attached to the main body of the interferometer, and from rotating with respect to the optical axis thereafter, whereby interference fringes can be measured with a high accuracy and favorable reproducibility.
    • 具有比参考板1的直径稍小的内径的O形环41在与基准板1的中性面42对准的外周面位置处围绕基准板1卷绕,O形环41和 参考板1的外周面4用粘合剂32均匀地粘合并固定在一起。随后,将缠绕有O形环41的参考板1插入到安装件5中以安装到干涉仪的主体上,通过 确认O形环41稳定地与附件5的抵接接触,并且参考板1不直接与附件5接触的情况下,压力环12是 使得O形环41被按压并固定。因此,当附着在干涉仪的主体上时,参考板1不会发生变形,并且此后相对于光轴旋转,由此干涉f 可以以高精度和良好的再现性测量环。