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1. 发明授权

US07494830B2 Method and device for wafer backside alignment overlay accuracy 有权
标题翻译：晶圆背面对准覆盖精度的方法和装置
公开(公告)号：US07494830B2
公开(公告)日：2009-02-24
申请号：US11697543
申请日：2007-04-06
申请人： Sheng-Chieh Liu , Tzu-Yang Wu , Ya-Wen Lee , Jeffery Chu , Hsueh-Liang Chou , Chia-Hung Kao
发明人： Sheng-Chieh Liu , Tzu-Yang Wu , Ya-Wen Lee , Jeffery Chu , Hsueh-Liang Chou , Chia-Hung Kao
IPC分类号： H01L23/544
CPC分类号： H01L22/34 , B81C1/00603 , B81C99/0065 , B81C2203/051 , G03F7/70633 , G03F9/7084 , G03F9/7088 , H01L23/544 , H01L2924/0002 , H01L2924/3011 , H01L2924/00
摘要： A method for wafer backside alignment overlay accuracy includes forming a buried layer on a front-side of a wafer; forming a conductive layer on the buried layer and patterning a first test structure and a second test structure therein; forming an etch stop layer on the conductive layer; etching through the wafer from the backside to perform an alignment process with the first test structure; and determining an overlay accuracy of the alignment process with the second test structure. The first test structure includes an optical vernier and the second test structure includes an electrical testing structure.
摘要翻译：一种用于晶片背面对准覆盖精度的方法包括在晶片的正面上形成掩埋层; 在所述掩埋层上形成导电层并在其中构图第一测试结构和第二测试结构; 在导电层上形成蚀刻停止层; 从背面蚀刻晶片以对第一测试结构执行对准过程; 以及确定与第二测试结构的对准过程的重叠精度。第一测试结构包括光学游标，第二测试结构包括电测试结构。

2. 发明申请

US20080248600A1 METHOD AND DEVICE FOR WAFER BACKSIDE ALIGNMENT OVERLAY ACCURACY 有权
标题翻译：用于波背对齐叠加精度的方法和装置
公开(公告)号：US20080248600A1
公开(公告)日：2008-10-09
申请号：US11697543
申请日：2007-04-06
申请人： Sheng-Chieh Liu , Tzu-Yang Wu , Ya-Wen Lee , Jeffrey Chu , Hsueh-Liang Chou , Chia-Hung Kao
发明人： Sheng-Chieh Liu , Tzu-Yang Wu , Ya-Wen Lee , Jeffrey Chu , Hsueh-Liang Chou , Chia-Hung Kao
IPC分类号： H01L21/00
CPC分类号： H01L22/34 , B81C1/00603 , B81C99/0065 , B81C2203/051 , G03F7/70633 , G03F9/7084 , G03F9/7088 , H01L23/544 , H01L2924/0002 , H01L2924/3011 , H01L2924/00
摘要： A method for wafer backside alignment overlay accuracy includes forming a buried layer on a front-side of a wafer; forming a conductive layer on the buried layer and patterning a first test structure and a second test structure therein; forming an etch stop layer on the conductive layer; etching through the wafer from the backside to perform an alignment process with the first test structure; and determining an overlay accuracy of the alignment process with the second test structure. The first test structure includes an optical vernier and the second test structure includes an electrical testing structure.
摘要翻译：一种用于晶片背面对准覆盖精度的方法包括在晶片的正面上形成掩埋层; 在所述掩埋层上形成导电层并在其中构图第一测试结构和第二测试结构; 在导电层上形成蚀刻停止层; 从背面蚀刻晶片，以与第一测试结构进行对准过程; 以及确定与第二测试结构的对准过程的重叠精度。第一测试结构包括光学游标，第二测试结构包括电测试结构。

3. 发明申请

US20070177244A1 Method and system for patterning alignment marks on a transparent substrate 有权
标题翻译：在透明基板上图案化对准标记的方法和系统
公开(公告)号：US20070177244A1
公开(公告)日：2007-08-02
申请号：US11400974
申请日：2006-04-10
申请人： Ruei-Hung Jang , Ya-Wen Lee , Tzu-Yang Wu , Sheng-Liang Pan , Chin-Hsiang Lin , Tsai-Sheng Gau
发明人： Ruei-Hung Jang , Ya-Wen Lee , Tzu-Yang Wu , Sheng-Liang Pan , Chin-Hsiang Lin , Tsai-Sheng Gau
IPC分类号： G02B26/00
CPC分类号： G02B26/0841
摘要： Disclosed is a method and a system for forming alignment marks on a transparent substrate. A light reflective layer is deposited over an optically transparent substrate of a wafer. A region is defined around an alignment mark on the optically transparent substrate. The light reflective layer is removed from a substantial portion of the transparent substrate excluding the region. In addition, a micro electro-mechanical systems device is disclosed. The device comprises an optically transparent substrate, at least one optically partially transparent alignment mark on the optically transparent substrate, and a plurality of reflective elements or imaging pixels attached to the optically transparent substrate.
摘要翻译：公开了一种在透明基板上形成对准标记的方法和系统。光反射层沉积在晶片的光学透明衬底上。围绕光学透明基板上的对准标记限定区域。除了该区域之外，从透明基板的大部分除去光反射层。另外，公开了一种微电子机械系统装置。该器件包括光学透明衬底，在光学透明衬底上的至少一个光学部分透明的对准标记，以及附接到光学透明衬底的多个反射元件或成像像素。

4. 发明授权

US07838386B2 Method and system for patterning alignment marks on a transparent substrate 有权
标题翻译：在透明基板上图案化对准标记的方法和系统
公开(公告)号：US07838386B2
公开(公告)日：2010-11-23
申请号：US12235960
申请日：2008-09-23
申请人： Ruei-Hung Jang , Ya-Wen Lee , Tzu-Yang Wu , Sheng-Liang Pan , Chin-Hsiang Lin , Tsai-Sheng Gau
发明人： Ruei-Hung Jang , Ya-Wen Lee , Tzu-Yang Wu , Sheng-Liang Pan , Chin-Hsiang Lin , Tsai-Sheng Gau
IPC分类号： H01L21/76 , H01L21/00 , H01L23/544
CPC分类号： G02B26/0841
摘要： Disclosed is a method and a system for forming alignment marks on a transparent substrate. A light reflective layer is deposited over an optically transparent substrate of a wafer. A region is defined around an alignment mark on the optically transparent substrate. The light reflective layer is removed from a substantial portion of the transparent substrate excluding the region. In addition, a micro electro-mechanical systems device is disclosed. The device comprises an optically transparent substrate, at least one optically partially transparent alignment mark on the optically transparent substrate, and a plurality of reflective elements or imaging pixels attached to the optically transparent substrate.
摘要翻译：公开了一种在透明基板上形成对准标记的方法和系统。光反射层沉积在晶片的光学透明衬底上。围绕光学透明基板上的对准标记限定区域。除了该区域之外，从透明基板的大部分除去光反射层。另外，公开了一种微电子机械系统装置。该器件包括光学透明衬底，在光学透明衬底上的至少一个光学部分透明的对准标记，以及附接到光学透明衬底的多个反射元件或成像像素。

5. 发明申请

US20090098283A1 METHOD AND SYSTEM FOR PATTERNING ALIGNMENT MARKS ON A TRANSPARENT SUBSTRATE 有权
标题翻译：用于在透明基板上绘制对准标记的方法和系统
公开(公告)号：US20090098283A1
公开(公告)日：2009-04-16
申请号：US12235960
申请日：2008-09-23
申请人： Ruei-Hung JANG , Ya-Wen Lee , Tzu-Yang Wu , Sheng-Liang Pan , Chin-Hsiang Lin , Tsai-Sheng Gau
发明人： Ruei-Hung JANG , Ya-Wen Lee , Tzu-Yang Wu , Sheng-Liang Pan , Chin-Hsiang Lin , Tsai-Sheng Gau
IPC分类号： B29D11/00
CPC分类号： G02B26/0841
摘要： Disclosed is a method and a system for forming alignment marks on a transparent substrate. A light reflective layer is deposited over an optically transparent substrate of a wafer. A region is defined around an alignment mark on the optically transparent substrate. The light reflective layer is removed from a substantial portion of the transparent substrate excluding the region. In addition, a micro electro-mechanical systems device is disclosed. The device comprises an optically transparent substrate, at least one optically partially transparent alignment mark on the optically transparent substrate, and a plurality of reflective elements or imaging pixels attached to the optically transparent substrate.
摘要翻译：公开了一种在透明基板上形成对准标记的方法和系统。光反射层沉积在晶片的光学透明衬底上。围绕光学透明基板上的对准标记限定区域。除了该区域之外，从透明基板的大部分除去光反射层。另外，公开了一种微电子机械系统装置。该器件包括光学透明衬底，在光学透明衬底上的至少一个光学部分透明的对准标记，以及附接到光学透明衬底的多个反射元件或成像像素。

6. 发明授权

US07450296B2 Method and system for patterning alignment marks on a transparent substrate 有权
标题翻译：在透明基板上图案化对准标记的方法和系统
公开(公告)号：US07450296B2
公开(公告)日：2008-11-11
申请号：US11400974
申请日：2006-04-10
申请人： Ruei-Hung Jang , Ya-Wen Lee , Tzu-Yang Wu , Sheng-Liang Pan , Chin-Hsiang Lin , Tsai-Sheng Gau
发明人： Ruei-Hung Jang , Ya-Wen Lee , Tzu-Yang Wu , Sheng-Liang Pan , Chin-Hsiang Lin , Tsai-Sheng Gau
IPC分类号： G02B26/00 , G02B26/08
CPC分类号： G02B26/0841
摘要： Disclosed is a method and a system for forming alignment marks on a transparent substrate. A light reflective layer is deposited over an optically transparent substrate of a wafer. A region is defined around an alignment mark on the optically transparent substrate. The light reflective layer is removed from a substantial portion of the transparent substrate excluding the region. In addition, a micro electro-mechanical systems device is disclosed. The device comprises an optically transparent substrate, at least one optically partially transparent alignment mark on the optically transparent substrate, and a plurality of reflective elements or imaging pixels attached to the optically transparent substrate.
摘要翻译：公开了一种在透明基板上形成对准标记的方法和系统。光反射层沉积在晶片的光学透明衬底上。围绕光学透明基板上的对准标记限定区域。除了该区域之外，从透明基板的大部分除去光反射层。另外，公开了一种微电子机械系统装置。该器件包括光学透明衬底，在光学透明衬底上的至少一个光学部分透明的对准标记，以及附接到光学透明衬底的多个反射元件或成像像素。

7. 发明授权

US07849314B2 Method and system for secure authentication in a wireless network 有权
标题翻译：无线网络中安全认证的方法和系统
公开(公告)号：US07849314B2
公开(公告)日：2010-12-07
申请号：US11410562
申请日：2006-04-24
申请人： Min-Chih Kao , Ya-Wen Lee , Yi-Shiung Yeh , Chen-Hwa Song
发明人： Min-Chih Kao , Ya-Wen Lee , Yi-Shiung Yeh , Chen-Hwa Song
IPC分类号： H04L9/00 , H04L9/08 , H04L29/06
CPC分类号： H04L9/3236 , H04L9/083 , H04L9/3247 , H04L63/062 , H04L63/0869 , H04L63/166 , H04L2209/38 , H04L2209/80 , H04W12/04 , H04W12/06
摘要： A method and a system for secure authentication in a wireless network are provided. The method comprises the following steps. First, a network device and a client device of a wireless network authenticate each other with EAP-TLS. Wherein, the network device mentioned above is a gateway or an access point. Then, the network device and the client device generate a TLS master secret jointly. In addition, the method uses a distributed mechanism to prevent the consequences of the failure of a single AAA server, and to alleviate the consequences resulting from a violated network device. Furthermore, the method includes a multiple time digital signature mechanism achieved by performing multiple times of one-way hash operation to enable verification and revocation of certificate.
摘要翻译：提供了一种用于无线网络中的安全认证的方法和系统。该方法包括以下步骤。首先，无线网络的网络设备和客户端设备使用EAP-TLS进行认证。其中，上述网络设备是网关或接入点。然后，网络设备和客户端设备共同生成TLS主密钥。此外，该方法使用分布式机制来防止单个AAA服务器故障的后果，并减轻由违反的网络设备造成的后果。此外，该方法包括通过执行多次单向散列操作来实现证书的验证和撤销而实现的多次数字签名机制。

8. 发明申请

US20070162958A1 Method and system for secure authentication in a wireless network 有权
标题翻译：无线网络中安全认证的方法和系统
公开(公告)号：US20070162958A1
公开(公告)日：2007-07-12
申请号：US11410562
申请日：2006-04-24
申请人： Min-Chih Kao , Ya-Wen Lee , Yi-Shiung Yeh , Chen-Hwa Song
发明人： Min-Chih Kao , Ya-Wen Lee , Yi-Shiung Yeh , Chen-Hwa Song
IPC分类号： H04L9/32
CPC分类号： H04L9/3236 , H04L9/083 , H04L9/3247 , H04L63/062 , H04L63/0869 , H04L63/166 , H04L2209/38 , H04L2209/80 , H04W12/04 , H04W12/06
摘要： A method and a system for secure authentication in a wireless network are provided. The method comprises the following steps. First, a network device and a client device of a wireless network authenticate each other with EAP-TLS. Wherein, the network device mentioned above is a gateway or an access point. Then, the network device and the client device generate a TLS master secret jointly. In addition, the method uses a distributed mechanism to prevent the consequences of the failure of a single AAA server, and to alleviate the consequences resulting from a violated network device. Furthermore, the method includes a multiple time digital signature mechanism achieved by performing multiple times of one-way hash operation to enable verification and revocation of certificate.
摘要翻译：提供了一种用于无线网络中的安全认证的方法和系统。该方法包括以下步骤。首先，无线网络的网络设备和客户端设备使用EAP-TLS进行认证。其中，上述网络设备是网关或接入点。然后，网络设备和客户端设备共同生成TLS主密钥。此外，该方法使用分布式机制来防止单个AAA服务器故障的后果，并减轻由违反的网络设备造成的后果。此外，该方法包括通过执行多次单向散列操作来实现证书的验证和撤销而实现的多次数字签名机制。

9. 发明授权

US08694772B2 Method and system for managing network identity 有权
标题翻译：管理网络身份的方法和系统
公开(公告)号：US08694772B2
公开(公告)日：2014-04-08
申请号：US12254817
申请日：2008-10-20
申请人： Min-Chih Kao , Ya-Wen Lee
发明人： Min-Chih Kao , Ya-Wen Lee
IPC分类号： H04L9/00 , H04L9/32 , H04L29/06
CPC分类号： H04L9/3268 , H04L9/3247 , H04L63/0823 , H04L63/0892 , H04L63/166 , H04L2209/42 , H04L2209/80 , H04W12/06
摘要： A method and a system for managing network identity are provided. The method and the system realize a management mechanism of temporary identification (ID) and real ID, which simultaneously achieves functionalities such as anonymity, accounting, and authorization. A short-term certificate and a corresponding public/private key pair are used to protect a temporary ID usable for accounting. This protection prevents the temporary ID from theft. The user generates a digital signature in the reply to a charge schedule statement from the visited network. This procedure is incorporated into an existing authentication framework based on Transport Layer Security (TLS) in order to provide an undeniable payment mechanism. The payment mechanism is applicable in an environment of multiple network operators and reduces the difficulty of integrating network operators. The method and the system do not have to consult a certificate revocation list (CRL) for authentication and thus are able to shorten authentication time.
摘要翻译：提供了一种用于管理网络身份的方法和系统。该方法和系统实现临时识别（ID）和实际ID的管理机制，同时实现匿名，会计和授权等功能。使用短期证书和相应的公钥/私钥对来保护可用于会计的临时ID。此保护可防止临时ID被盗。用户在来自受访网络的收费计划表的回复中生成数字签名。该过程被并入到基于传输层安全（TLS）的现有认证框架中，以便提供不可否认的支付机制。支付机制适用于多个网络运营商的环境，降低了网络运营商整合的难度。该方法和系统不必参考证书吊销列表（CRL）进行身份验证，因此可以缩短认证时间。

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