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1. 发明授权

US08749790B1 Structure and method to measure waveguide power absorption by surface plasmon element 有权
标题翻译：用表面等离子体元素测量波导功率吸收的结构和方法
公开(公告)号：US08749790B1
公开(公告)日：2014-06-10
申请号：US13314962
申请日：2011-12-08
申请人： Shawn M. Tanner , Yufeng Hu , Ut Tran , Zhongyan Wang , Zhong Shi , Sergei Sochava
发明人： Shawn M. Tanner , Yufeng Hu , Ut Tran , Zhongyan Wang , Zhong Shi , Sergei Sochava
IPC分类号： G01N21/55
CPC分类号： G01N21/553 , G01N21/7703
摘要： A structure for measuring energy absorption by a surface plasmon receptor or NFT on a waveguide comprises a first waveguide, a first input grating for coupling light comprising a first wavelength into the first waveguide, a first output grating for coupling light out of the first waveguide, a first plurality of surface plasmon receptors in cooperation with the first waveguide to receive light energy and located between the first input grating and the first output grating. The structure may further comprise a second waveguide, a second input grating for coupling light into the second waveguide, a second output grating for coupling light out of the second waveguide, a second plurality of surface plasmon receptors between the second input grating and the second output grating and in cooperation with the second waveguide to receive light energy, wherein the second plurality may be less than or greater than the first plurality.
摘要翻译：用于测量波导上的表面等离子体激元受体或NFT的能量吸收的结构包括：第一波导，用于将包含第一波长的光引入第一波导的第一输入光栅，用于将光从第一波导耦合的第一输出光栅，与第一波导协作以接收光能并位于第一输入光栅和第一输出光栅之间的第一多个表面等离子体激元受体。该结构还可以包括第二波导，用于将光耦合到第二波导中的第二输入光栅，用于将光从第二波导耦合的第二输出光栅，在第二输入光栅和第二输出之间的第二多个表面等离子体激元光栅并与第二波导配合以接收光能，其中第二多个可以小于或大于第一多个。

2. 发明授权

US08491801B1 Method and system for providing an NFT using a sacrificial NFT structure 有权
标题翻译：使用牺牲NFT结构提供NFT的方法和系统
公开(公告)号：US08491801B1
公开(公告)日：2013-07-23
申请号：US13291702
申请日：2011-11-08
申请人： Shawn M. Tanner , Yufeng Hu , Ut Tran , Zhongyan Wang
发明人： Shawn M. Tanner , Yufeng Hu , Ut Tran , Zhongyan Wang
IPC分类号： B44C1/22 , G11B5/127
CPC分类号： G11B5/3133 , G11B5/6088 , G11B2005/0021 , Y10T29/49032 , Y10T29/49048
摘要： A method and system provides a near-field transducer (NFT) for an energy assisted magnetic recording (EAMR) transducer. The method and system include forming a sacrificial NFT structure having a shape a location corresponding to the NFT. A dielectric layer is deposited. A portion of the dielectric layer resides on the sacrificial NFT structure. At least this portion of the dielectric layer on the sacrificial structure is removed. The sacrificial NFT structure is removed, exposing an NFT trench in the dielectric layer. At least one conductive layer for the NFT is deposited. A first portion of the conductive layer(s) reside in the NFT trench. A second portion of the conductive layer(s) external to the NFT trench is removed to form the NFT.
摘要翻译：一种方法和系统为能量辅助磁记录（EAMR）传感器提供近场换能器（NFT）。该方法和系统包括形成具有对应于NFT的位置的形状的牺牲NFT结构。沉积介电层。电介质层的一部分位于牺牲NFT结构上。至少该牺牲结构上介电层的这一部分被去除。去除牺牲NFT结构，暴露电介质层中的NFT沟槽。沉积至少一个用于NFT的导电层。导电层的第一部分驻留在NFT沟槽中。除去NFT沟槽外部的导电层的第二部分以形成NFT。

3. 发明授权

US08834728B1 Method and system for providing an energy assisted magnetic recording writer having a self aligned heat sink and NFT 有权
标题翻译：用于提供具有自对准散热器和NFT的能量辅助磁记录刻录机的方法和系统
公开(公告)号：US08834728B1
公开(公告)日：2014-09-16
申请号：US13045394
申请日：2011-03-10
申请人： Yufeng Hu , Shawn M. Tanner , Ut Tran , Zhongyan Wang , Mirzafer Abatchev
发明人： Yufeng Hu , Shawn M. Tanner , Ut Tran , Zhongyan Wang , Mirzafer Abatchev
IPC分类号： B44C1/22 , H01B13/00 , G11B7/1387 , G11B5/48
CPC分类号： G11B5/4866 , G11B7/1387
摘要： A method provides an EAMR transducer. The EAMR transducer is coupled with a laser and has an ABS configured to reside in proximity to a media during use. The method includes providing an NFT using an NFT mask. The NFT resides proximate to the ABS and focuses the laser energy onto the media. A portion of the NFT mask is removed, forming a heat sink mask covering part of the NFT. Optical material(s) are deposited, covering the heat sink mask and the NFT. The heat sink mask is removed, providing an aperture in the optical material(s). A heat sink corresponding to the aperture is provided. The heat sink bottom is thermally coupled with the NFT. A write pole for writing to the media and coil(s) for energizing the write pole are provided. The write pole has a bottom surface thermally coupled with the top surface of the heat sink.
摘要翻译：一种方法提供一种EAMR传感器。 EAMR传感器与激光器耦合并且具有被配置为在使用期间驻留在介质附近的ABS。该方法包括使用NFT掩码提供NFT。 NFT靠近ABS，并将激光能量聚焦到介质上。去除NFT掩模的一部分，形成覆盖NFT部分的散热掩模。沉积光学材料，覆盖散热掩模和NFT。去除散热掩模，在光学材料中提供孔。提供对应于孔的散热器。散热器底部与NFT热耦合。提供用于写入介质的写入极和用于激励写入极的线圈。写极具有与散热器的顶表面热耦合的底表面。

4. 发明授权

US08773956B1 Bi-layer NFT-core spacer for EAMR system and method of making the same 有权
标题翻译：用于EAMR系统的双层NFT芯间隔件及其制造方法
公开(公告)号：US08773956B1
公开(公告)日：2014-07-08
申请号：US13312925
申请日：2011-12-06
申请人： Zhongyan Wang , Hongxing Yuan , Shawn M. Tanner , Yufeng Hu
发明人： Zhongyan Wang , Hongxing Yuan , Shawn M. Tanner , Yufeng Hu
IPC分类号： G11B11/00
CPC分类号： G11B5/6088 , G11B5/314 , G11B2005/0021
摘要： Embodiments of the present invention are directed toward a bi-layer spacer structure and related fabrication processes for improving an interface between a near-field transducer (NFT) and a spacer on an optical waveguide core for an energy assisted magnetic recording (EAMR) system. The embodiments provide a solution for improving the adhesion between the NFT and the spacer.
摘要翻译：本发明的实施例涉及一种用于改善用于能量辅助磁记录（EAMR）系统的光波导芯上的近场换能器（NFT）和间隔物之间的界面的双层间隔结构和相关制造工艺。这些实施例提供了用于改善NFT和间隔物之间的粘附性的解决方案。

5. 发明授权

US08721902B1 Method and system for providing an energy assisted magnetic recording writer having a heat sink and NFT 有权
标题翻译：用于提供具有散热器和NFT的能量辅助磁记录写入器的方法和系统
公开(公告)号：US08721902B1
公开(公告)日：2014-05-13
申请号：US13046380
申请日：2011-03-11
申请人： Zhongyan Wang , Wei Gao , Shawn M. Tanner , Mirzafer Abatchev , Yanfeng Chen , Yufeng Hu
发明人： Zhongyan Wang , Wei Gao , Shawn M. Tanner , Mirzafer Abatchev , Yanfeng Chen , Yufeng Hu
IPC分类号： B44C1/22
CPC分类号： G11B5/314 , G11B5/6088 , G11B2005/0021
摘要： A method provides an EAMR transducer. The EAMR transducer is coupled with a laser and has an ABS configured to reside in proximity to a media during use. The EAMR transducer includes an NFT for focusing the energy onto the media. A sacrificial layer is deposited on the NFT and a mask having an aperture provided on the sacrificial layer. A portion of the sacrificial layer exposed by the aperture is removed to form a trench above the NFT. A heat sink is then provided. At least part of the heat sink resides in the trench. The heat sink is thermally coupled to the NFT. Optical material(s) are provided around the heat sink. A write pole configured to write to a region of the media is also provided. The write pole is thermally coupled with the top of the heat sink. Coil(s) for energizing the write pole are also provided.
摘要翻译：一种方法提供一种EAMR传感器。 EAMR传感器与激光器耦合并且具有被配置为在使用期间驻留在介质附近的ABS。 EAMR传感器包括用于将能量聚焦到介质上的NFT。牺牲层沉积在NFT上，并且具有设置在牺牲层上的孔的掩模。被孔径暴露的牺牲层的一部分被去除以在NFT上方形成沟槽。然后提供散热器。散热片的至少一部分位于沟槽中。散热器与NFT热耦合。光学材料设置在散热器的周围。还提供了被配置为写入介质的区域的写入极。写柱与散热器的顶部热耦合。还提供用于激励写入极的线圈。

6. 发明授权

US08634280B1 Method and system for providing an energy assisted magnetic recording writer having a ring shaped NFT 有权
标题翻译：用于提供具有环形NFT的能量辅助磁记录刻录机的方法和系统
公开(公告)号：US08634280B1
公开(公告)日：2014-01-21
申请号：US13165017
申请日：2011-06-21
申请人： Zhongyan Wang , Hongxing Yuan , Zhong Shi , Yufeng Hu
发明人： Zhongyan Wang , Hongxing Yuan , Zhong Shi , Yufeng Hu
IPC分类号： G11B11/00
CPC分类号： G11B5/314 , G11B5/3116 , G11B2005/0021
摘要： A method and system provides an EAMR transducer. The transducer is coupled with a laser for providing energy and has an air-bearing surface (ABS) configured to reside in proximity to a media during use. The EAMR transducer includes a near field transducer (NFT) for focusing the energy onto the region of the media, a write pole, and at least one coil for energizing the write pole. The NFT includes a ring portion having an aperture therein and a pin portion proximate to the ABS. The write pole is configured to write to a region of the media.
摘要翻译：一种方法和系统提供了一种EAMR传感器。换能器与用于提供能量的激光器耦合，并且具有配置成在使用期间驻留在介质附近的空气轴承表面（ABS）。 EAMR传感器包括用于将能量聚焦到介质的区域上的近场传感器（NFT），写入极和用于激励写入极的至少一个线圈。 NFT包括其中具有孔的环部分和靠近ABS的销部分。写入极配置为写入介质的一个区域。

7. 发明申请

US20110294398A1 METHOD AND SYSTEM FOR PROVIDING AN ELECTRONIC LAPPING GUIDE CORRESPONDING TO A NEAR-FIELD TRANSDUCER OF AN ENERGY ASSISTED MAGNETIC RECORDING TRANSDUCER 有权
标题翻译：用于提供与能量辅助磁记录传感器的近场传感器相关的电子引导线的方法和系统
公开(公告)号：US20110294398A1
公开(公告)日：2011-12-01
申请号：US12789813
申请日：2010-05-28
申请人： Yufeng Hu , Zhongyan Wang , Jinshan Li
发明人： Yufeng Hu , Zhongyan Wang , Jinshan Li
IPC分类号： B24B51/00
CPC分类号： G11B13/04 , B24B37/013 , G11B5/314 , G11B5/3169 , G11B2005/001 , G11B2005/0021 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method and system for fabricating transducer having an air-bearing surface (ABS) is described. The method and system include providing at least one near-field transducer (NFT) film and providing an electronic lapping guide (ELG) film substantially coplanar with a portion of the at least one NFT film. The method and system also include defining a disk portion of an NFT from the portion of the at least one NFT film and at least one ELG from the ELG film. The disk portion corresponds to a critical dimension of the NFT from an ABS location. The method and system also include lapping the at least one transducer. The lapping is terminated based on a signal from the ELG.
摘要翻译：描述了一种用于制造具有空气轴承表面（ABS）的换能器的方法和系统。该方法和系统包括提供至少一个近场换能器（NFT）膜并提供与所述至少一个NFT膜的一部分基本共面的电子研磨导向器（ELG）膜。该方法和系统还包括从至少一个NFT膜的部分和来自ELG膜的至少一个ELG限定NFT的盘部分。盘部分对应于来自ABS位置的NFT的临界尺寸。该方法和系统还包括研磨至少一个换能器。基于ELG的信号终止研磨。

8. 发明授权

US08375565B2 Method for providing an electronic lapping guide corresponding to a near-field transducer of an energy assisted magnetic recording transducer 有权
标题翻译：提供对应于能量辅助磁记录传感器的近场换能器的电子研磨导轨的方法
公开(公告)号：US08375565B2
公开(公告)日：2013-02-19
申请号：US12789813
申请日：2010-05-28
申请人： Yufeng Hu , Zhongyan Wang , Jinshan Li
发明人： Yufeng Hu , Zhongyan Wang , Jinshan Li
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B13/04 , B24B37/013 , G11B5/314 , G11B5/3169 , G11B2005/001 , G11B2005/0021 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method fabricates a transducer having an air-bearing surface (ABS). The method includes providing at least one near-field transducer (NFT) film and providing an electronic lapping guide (ELG) film substantially coplanar with a portion of the at least one NFT film. The method also includes defining a disk portion of an NFT from the portion of the at least one NFT film and at least one ELG from the ELG film. The disk portion corresponds to a critical dimension of the NFT from an ABS location. The method also includes lapping the at least one transducer. The lapping is terminated based on a signal from the ELG.
摘要翻译：一种制造具有空气轴承表面（ABS）的换能器的方法。该方法包括提供至少一个近场换能器（NFT）膜，并提供与所述至少一个NFT膜的一部分基本共面的电子研磨导向器（ELG）膜。该方法还包括从至少一个NFT膜的部分和来自ELG膜的至少一个ELG限定NFT的盘部分。盘部分对应于来自ABS位置的NFT的临界尺寸。该方法还包括研磨至少一个换能器。基于ELG的信号终止研磨。

9. 发明授权

US08343364B1 Double hard-mask mill back method of fabricating a near field transducer for energy assisted magnetic recording 有权
标题翻译：制造用于能量辅助磁记录的近场换能器的双重硬掩模回磨方法
公开(公告)号：US08343364B1
公开(公告)日：2013-01-01
申请号：US12796585
申请日：2010-06-08
申请人： Wei Gao , Guanxiong Li , Zhongyan Wang , Yufeng Hu , Ge Yi
发明人： Wei Gao , Guanxiong Li , Zhongyan Wang , Yufeng Hu , Ge Yi
IPC分类号： G11B5/33
CPC分类号： G11B5/3163 , G11B5/314 , G11B2005/0021 , Y10T29/49032
摘要： A method of forming a near field transducer (NFT) for energy assisted magnetic recording is disclosed. A structure comprising an NFT metal layer and a first hardmask layer over the NFT metal layer is provided A first patterned hardmask is formed from the first hardmask layer, the first patterned hardmask disposed over a disk section and a pin section of the NFT to be formed. An etch process is performed on the NFT metal layer via the first patterned hardmask, the etch process forming the NFT having the disk section and the pin section.
摘要翻译：公开了一种形成用于能量辅助磁记录的近场传感器（NFT）的方法。提供了包括在NFT金属层上的NFT金属层和第一硬掩模层的结构。第一图案化硬掩模由第一硬掩模层，设置在盘部分上的第一图案化硬掩模和待形成的NFT的销部分形成。通过第一图案化硬掩模在NFT金属层上进行蚀刻工艺，形成具有盘部分和销部分的NFT的蚀刻工艺。

10. 发明授权

US08325569B1 EAMR head having improved optical coupling efficiency 有权
标题翻译： EAMR头具有改善的光耦合效率
公开(公告)号：US08325569B1
公开(公告)日：2012-12-04
申请号：US13169720
申请日：2011-06-27
申请人： Zhong Shi , Zhongyan Wang , Shing Lee , Hongxing Yuan
发明人： Zhong Shi , Zhongyan Wang , Shing Lee , Hongxing Yuan
IPC分类号： G11B11/00
CPC分类号： G11B5/6088 , G11B5/314 , G11B2005/0021
摘要： A method and system provide an EAMR transducer having an air-bearing surface (ABS) that resides near a media during use. The EAMR transducer includes a write pole, coil(s), a near field transducer (NFT), a waveguide, and a reflective grating. The write pole writes to a region of the media. The coil(s) energize the write pole. The NFT is proximate to the ABS and focuses the energy onto the media. The waveguide is configured to direct the energy from the laser toward the NFT at an incident angle with respect to the ABS. A first portion of the energy reflects off of the ABS at a reflected angle. The reflective grating receives the first portion of the energy at the reflected angle from the ABS and reflects a second portion of the energy toward the ABS. The NFT resides between at least part of the waveguide and the reflective grating.
摘要翻译：一种方法和系统提供具有在使用期间驻留在介质附近的空气轴承表面（ABS）的EAMR换能器。 EAMR传感器包括写极，线圈，近场换能器（NFT），波导和反射光栅。写入磁极写入媒体的一个区域。线圈使写入极点通电。 NFT靠近ABS，将能量聚焦在媒体上。波导被配置为以相对于ABS的入射角将来自激光器的能量引向NFT。能量的第一部分以反射角反射离开ABS。反射光栅从ABS接收以反射角度的能量的第一部分，并将能量的第二部分反射向ABS。 NFT位于波导和反射光栅的至少一部分之间。

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