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1. 发明授权

US09404872B1 Selectably configurable multiple mode spectroscopic ellipsometry 有权
标题翻译：可选择配置的多模光谱椭偏仪
公开(公告)号：US09404872B1
公开(公告)日：2016-08-02
申请号：US13538552
申请日：2012-06-29
申请人： Haiming Wang , Guorong V. Zhuang , Shankar Krishnan , Klaus Flock , Johannes D. de Veer
发明人： Haiming Wang , Guorong V. Zhuang , Shankar Krishnan , Klaus Flock , Johannes D. de Veer
IPC分类号： G01J4/00 , G01N21/55 , G01N21/88 , G01N21/21
CPC分类号： G01N21/8806 , G01N21/211 , G01N21/274 , G01N21/93 , G01N21/9501 , G01N21/95607 , G01N2021/213
摘要： The present invention may include an illumination source configured to illuminate a surface of a sample, a detector configured to detect at least a portion of light reflected from the surface of the sample, a selectably configurable optical system comprising: a rotatable polarizing element disposed in the illumination arm of the optical system, an analyzing element disposed in the collection arm of the optical system, and a rotatable-translatable compensator element disposed in the collection arm of the optical system, and a control system communicatively configured to selectably configure the optical system in the a rotating compensator (RCSE) mode, a rotating polarizer (RPSE) mode, or a rotating polarizer and compensator (RPRC) mode.
摘要翻译：本发明可以包括被配置为照亮样品的表面的照明源，被配置为检测从样品的表面反射的光的至少一部分的检测器，可选择地配置的光学系统，包括：可旋转偏振元件，其设置在光学系统的照明臂，设置在光学系统的收集臂中的分析元件和设置在光学系统的收集臂中的可旋转平移补偿元件，以及通信地配置为可选择地将光学系统配置在旋转补偿器（RCSE）模式，旋转偏振器（RPSE）模式或旋转偏振器和补偿器（RPRC）模式。

2. 发明申请

US20130003068A1 Measurement of Critical Dimension 有权
标题翻译：关键尺寸的测量
公开(公告)号：US20130003068A1
公开(公告)日：2013-01-03
申请号：US13174815
申请日：2011-07-01
申请人： Shankar Krishnan , Haiming Wang
发明人： Shankar Krishnan , Haiming Wang
IPC分类号： G01N21/55 , G01J1/42
CPC分类号： G01N21/55 , G01B11/065 , G01B2210/56 , G01J3/021 , G01J3/0229 , G01J3/42 , G01N21/00 , G01N21/211 , G01N2021/213 , G01N2021/214 , G01N2201/0675
摘要： A spectroscopic instrument for conducting multi-wavelength, multi-azimuth, multi-angle-of-incidence readings on a substrate, the instrument having a broadband light source for producing an illumination beam, an objective for directing the illumination onto the substrate at multiple azimuth angles and multiple angels-of-incidence simultaneously, thereby producing a reflection beam, an aperture plate having an illumination aperture and a plurality of collection apertures formed therein for selectively passing portions of the reflection beam having desired discreet combinations of azimuth angle and angle-of-incident, a detector for receiving the discreet combinations of azimuth angle and angle-of-incident and producing readings, and a processor for interpreting the readings.
摘要翻译：一种用于在衬底上进行多波长，多方位角，多角度入射读数的光谱仪器，该仪器具有用于产生照明光束的宽带光源，用于将多个方位角的照明引导到衬底上的物镜角度和多个入射角，从而产生反射光束，具有照明孔的孔板和形成在其中的多个收集孔，用于选择性地通过具有期望的方位角和角度的离散组合的反射光束的部分 - 用于接收方位角和入射角的离散组合并产生读数的检测器，以及用于解释读数的处理器。

3. 发明授权

US08446584B2 Reconfigurable spectroscopic ellipsometer 有权
标题翻译：可重构光谱椭偏仪
公开(公告)号：US08446584B2
公开(公告)日：2013-05-21
申请号：US13106940
申请日：2011-05-13
申请人： Shankar Krishnan , Haiming Wang
发明人： Shankar Krishnan , Haiming Wang
IPC分类号： G01J4/00
CPC分类号： G01B11/0641 , G01B2210/56 , G01N21/211 , G01N21/956
摘要： A Mueller ellipsometer of the type having a first rotating element on an incident beam side of a sample and a second rotating element on a reflected beam side of the sample and a detector having an integration time, having a controller for selectively and separately adjusting (1) a first angular frequency of the first rotating element and (2) a second angular frequency of the second rotating element.
摘要翻译：具有在样品的入射光束侧的第一旋转元件和样品的反射光束侧的第二旋转元件和具有积分时间的检测器的Mueller椭偏仪具有用于选择性和分别地调节（1 ）第一旋转元件的第一角频率和（2）第二旋转元件的第二角频率。

4. 发明申请

US20120287433A1 Reconfigurable Spectroscopic Ellipsometer 有权
标题翻译：可重构光谱椭偏仪
公开(公告)号：US20120287433A1
公开(公告)日：2012-11-15
申请号：US13106940
申请日：2011-05-13
申请人： Shankar Krishnan , Haiming Wang
发明人： Shankar Krishnan , Haiming Wang
IPC分类号： G01J4/00 , G01J3/447
CPC分类号： G01B11/0641 , G01B2210/56 , G01N21/211 , G01N21/956
摘要： A Mueller ellipsometer of the type having a first rotating element on an incident beam side of a sample and a second rotating element on a reflected beam side of the sample and a detector having an integration time, having a controller for selectively and separately adjusting (1) a first angular frequency of the first rotating element and (2) a second angular frequency of the second rotating element.
摘要翻译：具有在样品的入射光束侧的第一旋转元件和样品的反射光束侧的第二旋转元件和具有积分时间的检测器的Mueller椭偏仪具有用于选择性和分别地调节（1 ）第一旋转元件的第一角频率和（2）第二旋转元件的第二角频率。

5. 发明授权

US08456639B2 Measurement of critical dimension 有权
标题翻译：关键尺寸的测量
公开(公告)号：US08456639B2
公开(公告)日：2013-06-04
申请号：US13174815
申请日：2011-07-01
申请人： Shankar Krishnan , Haiming Wang
发明人： Shankar Krishnan , Haiming Wang
IPC分类号： G01N21/55 , G01N21/00
CPC分类号： G01N21/55 , G01B11/065 , G01B2210/56 , G01J3/021 , G01J3/0229 , G01J3/42 , G01N21/00 , G01N21/211 , G01N2021/213 , G01N2021/214 , G01N2201/0675
摘要： A spectroscopic instrument for conducting multi-wavelength, multi-azimuth, multi-angle-of-incidence readings on a substrate, the instrument having a broadband light source for producing an illumination beam, an objective for directing the illumination onto the substrate at multiple azimuth angles and multiple angels-of-incidence simultaneously, thereby producing a reflection beam, an aperture plate having an illumination aperture and a plurality of collection apertures formed therein for selectively passing portions of the reflection beam having desired discreet combinations of azimuth angle and angle-of-incident, a detector for receiving the discreet combinations of azimuth angle and angle-of-incident and producing readings, and a processor for interpreting the readings.
摘要翻译：一种用于在衬底上进行多波长，多方位角，多角度入射读数的光谱仪器，该仪器具有用于产生照明光束的宽带光源，用于将多个方位角的照明引导到衬底上的物镜角度和多个入射角，从而产生反射光束，具有照明孔的孔板和形成在其中的多个收集孔，用于选择性地通过具有期望的方位角和角度的离散组合的反射光束的部分 - 用于接收方位角和入射角的离散组合并产生读数的检测器，以及用于解释读数的处理器。

6. 发明授权

US08040511B1 Azimuth angle measurement 有权
标题翻译：方位角测量
公开(公告)号：US08040511B1
公开(公告)日：2011-10-18
申请号：US12357294
申请日：2009-01-21
申请人： Shankar Krishnan , Haixing Zhou , Haiming Wang , David Lidsky , Walter Dean Mieher
发明人： Shankar Krishnan , Haixing Zhou , Haiming Wang , David Lidsky , Walter Dean Mieher
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01B11/26
摘要： Methods and apparatus for measuring an optical azimuth angle φO of a substrate relative to a plane of detection in scatterometry tools are disclosed. A grating target on a stage of a scatterometry tool may be illuminated and positions of the resulting diffraction orders may be observed. The optical azimuth angle may be determined from the positions of the diffraction orders. Alternatively, polarization-dependent signals of radiation scattered from a line grating may be measured for equal and opposite polarization angles +A and −A. A combination signal may be computed from the polarization-dependent signals obtained at +A and −A and a property of the combination signal may be calculated for several mechanical Azimuth angles φM. A relationship between the optical azimuth angle φO and the mechanical azimuth angle φM may be determined from a behavior of the property as a function of mechanical azimuth angle φM.
摘要翻译：公开了用于测量基底相对于散射测量工具中的检测平面的光学方位角＆lt; O的方法和装置。可以照射散射测量工具的台上的光栅目标，并且可以观察所得衍射级的位置。光学方位角可以从衍射级的位置确定。或者，可以测量从线光栅散射的辐射的偏振相关信号，以获得相等和相反的偏振角+ A和-A。可以从在+ A和-A处获得的偏振相关信号计算组合信号，并且可以针对若干机械方位角＆amp; M来计算组合信号的特性。可以根据作为机械方位角的函数的性质的行为来确定光学方位角＆lt; O和机械方位角＆amp; M之间的关系。

7. 发明授权

US10665111B2 Portable datalink equipment for overhearing data or voice communications 有权
公开(公告)号：US10665111B2
公开(公告)日：2020-05-26
申请号：US15525577
申请日：2016-08-01
申请人： Honeywell International Inc. , Haiming Wang , Yi Zhong , Zhenning Zhou
发明人： Haiming Wang , Yi Zhong , Zhenning Zhou
IPC分类号： G08G5/00 , H04B7/185 , H04B1/00 , G10L15/00
摘要： A system for overhearing data or voice communications is provided. The system comprises at least one antenna operative to receive messages comprising data messages or voice messages, or both data and voice messages. A radio unit is in communication with the at least one antenna, with the radio unit operative to receive signals corresponding to the messages from the at least one antenna. A processor unit is in communication with the radio unit, with the processor unit operative to process the signals corresponding to the messages. A display unit is in communication with the processor unit, with the display unit operatively enabled in response to the signals corresponding to the messages. The display unit is operative to show the messages in a text format or a graphics format.

8. 发明授权

US09705659B2 Method and apparatus for providing uplink feedback optimization 有权
公开(公告)号：US09705659B2
公开(公告)日：2017-07-11
申请号：US14008298
申请日：2011-04-11
申请人： Jing Han , Erlin Zeng , Wei Bai , Haiming Wang
发明人： Jing Han , Erlin Zeng , Wei Bai , Haiming Wang
IPC分类号： H04B7/212 , H04L5/00
CPC分类号： H04L5/0094 , H04L5/001 , H04L5/0055
摘要： A method for providing uplink feedback optimization may include determining a set of candidate uplink subframes and corresponding component carriers to transmit uplink feedback, and determining a selected uplink subframe and corresponding component carrier from among the set of candidate uplink subframes based on a feedback delay associated with the set of candidate uplink subframes. A corresponding apparatus and computer program product are also provided.

9. 发明授权

US09456458B2 Method and apparatus for prioritizing an uplink resource request 有权
标题翻译：用于优先化上行链路资源请求的方法和装置
公开(公告)号：US09456458B2
公开(公告)日：2016-09-27
申请号：US14400277
申请日：2012-05-09
申请人： Wei Bai , Jing Han , Chunyan Gao , Haiming Wang , Asbjoern Groevlen
发明人： Wei Bai , Jing Han , Chunyan Gao , Haiming Wang , Asbjoern Groevlen
IPC分类号： H04L1/00 , H04W74/08 , H04L1/18 , H04L5/00 , H04W72/12
CPC分类号： H04W74/0833 , H04L1/1854 , H04L5/0055 , H04W72/1242 , H04W74/0875
摘要： A method, apparatus and computer program product are provided in order to allow an uplink resource request to be transmitted to the access point even in an instance in which the mobile terminal is receiving a continuous downlink transmission and repeated ACK/NACK transmissions are enabled. In this regard, a method, apparatus and computer program product are provided to prioritize a preamble transmission for a random access procedure relative to the repeated ACK/NACK transmissions. The method, apparatus and computer program also prioritize at least one message of the random access procedure.
摘要翻译：提供了一种方法，装置和计算机程序产品，以便即使在移动终端正在接收连续下行链路传输并且重复的ACK / NACK传输被启用的情况下也允许将上行链路资源请求发送到接入点。在这方面，提供了一种方法，装置和计算机程序产品，用于相对于重复的ACK / NACK传输来对用于随机接入过程的前同步码传输进行优先级排序。方法，装置和计算机程序还优先考虑随机接入过程的至少一个消息。

10. 发明授权

US09408103B2 Flexible measurements in unlicensed band 有权
标题翻译：未经授权的频段灵活测量
公开(公告)号：US09408103B2
公开(公告)日：2016-08-02
申请号：US14354248
申请日：2011-10-26
申请人： Wei Bai , Tero Henttonen , Na Wei , Jing Han , Haiming Wang
发明人： Wei Bai , Tero Henttonen , Na Wei , Jing Han , Haiming Wang
IPC分类号： H04W24/10 , H04W72/04 , H04W16/14
CPC分类号： H04W24/10 , H04W16/14 , H04W72/0413 , H04W72/042
摘要： The specification and drawings present a new method, apparatus and software related product (e.g., a computer readable memory) for implementing enhanced and flexible radio aperiodic measurements, e.g., on an unlicensed band in LTE wireless systems and providing effective and timely reporting. A UE may receive from a wireless network an aperiodic measurement request to measure a special measurement object (e.g., a neighbor cell) specified in the aperiodic measurement request, e.g., in an unlicensed band. In response to the aperiodic measurement request, the UE may perform the measurement of the special management object until a further instruction from the wireless network or for a determined period of time. Inter-frequency measurements may be performed during the measurement gap determined from the aperiodic measurement request.
摘要翻译：说明书和附图提出了用于实现增强和灵活的无线电非周期测量的新方法，装置和软件相关产品（例如，计算机可读存储器），例如在LTE无线系统中的未许可频带上并且提供有效和及时的报告。 UE可以从无线网络接收非周期测量请求，以测量在非周期性测量请求中指定的特殊测量对象（例如，相邻小区），例如在非许可频带中。响应于非周期测量请求，UE可以执行特殊管理对象的测量，直到来自无线网络的进一步指令或在确定的时间段内。在从非周期测量请求确定的测量间隙期间可以执行频率间测量。

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