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    • 1. 发明授权
    • Method of oxidizing a nitride film on a conductive substrate
    • 在导电性基板上氧化氮化膜的方法
    • US06274513B1
    • 2001-08-14
    • US09644884
    • 2000-08-23
    • Shangjr GwoYa-Chang ChouTom ChenTien-Sheng Chao
    • Shangjr GwoYa-Chang ChouTom ChenTien-Sheng Chao
    • H01L2131
    • H01L21/3105H01L21/0337H01L21/3086H01L21/3144Y10S977/859
    • The present invention discloses a method of oxidizing a nitride film on a conductive substrate comprising the following steps. First, a conductive substrate is provided, and a nitride film is formed on the main surface of the conductive substrate by performing film deposition process or directly nitridating the surface region of the conductive substrate. Then, a local electrode terminal (such as a conductive probe of a scanning-probe microscope) is provided, and a strong electric field is locally generated between the electrode terminal and the conductive substrate in an oxidizing environment, wherein the strong electric field passes through the nitride film, thereby oxidizing the nitride film region passed by the electric field. The method of oxidizing a nitride film according to the present invention can be applied to define patterns on a nitride film, to record information as memory media, and to form growth templates for the use in chemical selective formation processes.
    • 本发明公开了一种在导电基板上氧化氮化物膜的方法,包括以下步骤。 首先,提供导电性基板,通过进行成膜法或直接对导电性基板的表面区域进行氮化,在导电性基板的主面上形成氮化膜。 然后,提供局部电极端子(如扫描探针显微镜的导电探针),并且在氧化环境中在电极端子和导电基板之间局部产生强电场,其中强电场通过 从而氧化通过电场的氮化物膜区域。 根据本发明的氧化氮化膜的方法可以用于限定氮化膜上的图案,记录信息作为存储介质,并形成用于化学选择性形成工艺的生长模板。
    • 3. 发明申请
    • Method to deposit particles on charge storage apparatus with charge patterns and forming method for charge patterns
    • 在带电荷图案的电荷存储装置上沉积颗粒的方法和电荷图案的形成方法
    • US20090159995A1
    • 2009-06-25
    • US12000944
    • 2007-12-19
    • Shangjr GwoHsien-Te Tseng
    • Shangjr GwoHsien-Te Tseng
    • H01L29/00H01L21/00
    • H01L29/792B82Y10/00
    • The present invention discloses a method to deposit particles on a charge storage apparatus with charge patterns and a forming method for charge patterns. The forming method for charge patterns includes providing the charge storage apparatus having an electrically conducting substrate and a charge storage media layer. The charge storage apparatus is disposed in a vacuum or an anhydrous environment. An electrode and the electrically conducting substrate are utilized to conduct a first voltage and a second voltage respectively to form an electric field. Charges are then stored into the charge storage media layer of the charge storage apparatus through the electric field and the charge patterns are then formed. Accordingly, particles are deposited on the charge pattern-defined areas.
    • 本发明公开了一种在具有电荷图案的电荷存储装置上沉积颗粒的方法和用于电荷模式的形成方法。 电荷图案的形成方法包括提供具有导电衬底和电荷存储介质层的电荷存储装置。 电荷存储装置设置在真空或无水环境中。 电极和导电衬底分别用于传导第一电压和第二电压以形成电场。 然后通过电场将电荷存储到电荷存储装置的电荷存储介质层中,然后形成电荷模式。 因此,颗粒沉积在电荷图案限定区域上。
    • 7. 发明授权
    • Field effect transistor based sensor
    • 基于场效应晶体管的传感器
    • US07829918B2
    • 2010-11-09
    • US12432071
    • 2009-04-29
    • Jer-Liang Andrew YehShangjr Gwo
    • Jer-Liang Andrew YehShangjr Gwo
    • H01L29/78
    • G01N27/414
    • The invention discloses a FET based sensor. The FET based sensor according to an embodiment of the invention includes a substrate, an InN material layer, a source terminal and a drain terminal. The InN material layer is formed over the substrate and has an upper surface. The upper surface thereon provides an analyte sensing region. The InN material layer serves as a current channel between the source terminal and the drain terminal. Thereby, ions adsorbed by the analyte sensing region induce a variation of a current flowing through the current channel, and the variation is further interpreted as a characteristic of the analyte.
    • 本发明公开了一种基于FET的传感器。 根据本发明实施例的基于FET的传感器包括衬底,InN材料层,源极端子和漏极端子。 InN材料层形成在衬底上并具有上表面。 其上表面提供分析物感测区域。 InN材料层用作源极端子和漏极端子之间的电流通道。 因此,被分析物感测区域吸附的离子引起流过电流通道的电流的变化,并且该变化被进一步解释为分析物的特征。
    • 8. 发明授权
    • Method to deposit particles on charge storage apparatus with charge patterns and forming method for charge patterns
    • 在带电荷图案的电荷存储装置上沉积颗粒的方法和电荷图案的形成方法
    • US07803261B2
    • 2010-09-28
    • US12000944
    • 2007-12-19
    • Shangjr GwoHsien-Te Tseng
    • Shangjr GwoHsien-Te Tseng
    • B01J8/00
    • H01L29/792B82Y10/00
    • The present invention discloses a method to deposit particles on a charge storage apparatus with charge patterns and a forming method for charge patterns. The forming method for charge patterns includes providing the charge storage apparatus having an electrically conducting substrate and a charge storage media layer. The charge storage apparatus is disposed in a vacuum or an anhydrous environment. An electrode and the electrically conducting substrate are utilized to conduct a first voltage and a second voltage respectively to form an electric field. Charges are then stored into the charge storage media layer of the charge storage apparatus through the electric field and the charge patterns are then formed. Accordingly, particles are deposited on the charge pattern-defined areas.
    • 本发明公开了一种在具有电荷图案的电荷存储装置上沉积颗粒的方法和用于电荷模式的形成方法。 电荷图案的形成方法包括提供具有导电衬底和电荷存储介质层的电荷存储装置。 电荷存储装置设置在真空或无水环境中。 电极和导电衬底分别用于传导第一电压和第二电压以形成电场。 然后通过电场将电荷存储到电荷存储装置的电荷存储介质层中,然后形成电荷模式。 因此,颗粒沉积在电荷图案限定区域上。
    • 9. 发明申请
    • Field Effect Transistor Based Sensor
    • 基于场效应晶体管的传感器
    • US20100012987A1
    • 2010-01-21
    • US12432071
    • 2009-04-29
    • Jer-Liang Andrew YehShangjr Gwo
    • Jer-Liang Andrew YehShangjr Gwo
    • H01L29/78
    • G01N27/414
    • The invention discloses a FET based sensor. The FET based sensor according to an embodiment of the invention includes a substrate, an InN material layer, a source terminal and a drain terminal. The InN material layer is formed over the substrate and has an upper surface. The upper surface thereon provides an analyte sensing region. The InN material layer serves as a current channel between the source terminal and the drain terminal. Thereby, ions adsorbed by the analyte sensing region induce a variation of a current flowing through the current channel, and the variation is further interpreted as a characteristic of the analyte.
    • 本发明公开了一种基于FET的传感器。 根据本发明实施例的基于FET的传感器包括衬底,InN材料层,源极端子和漏极端子。 InN材料层形成在衬底上并具有上表面。 其上表面提供分析物感测区域。 InN材料层用作源极端子和漏极端子之间的电流通道。 因此,被分析物感测区域吸附的离子引起流过电流通道的电流的变化,并且该变化被进一步解释为分析物的特征。
    • 10. 发明授权
    • Method for growing group-III nitride semiconductor heterostructure on silicon substrate
    • 在硅衬底上生长III族氮化物半导体异质结的方法
    • US07012016B2
    • 2006-03-14
    • US10714649
    • 2003-11-18
    • Shangjr Gwo
    • Shangjr Gwo
    • H01L21/28
    • H01L21/02381H01L21/02458H01L21/02488H01L21/02502H01L21/0254H01L21/3247H01L29/045
    • The present invention provides a method for growing group-III nitride semiconductor heteroepitaxial structures on a silicon (111) substrate by using a coincidently matched multiple-layer buffer that can be grown on the Si(111) substrate. The coincidently matched multiple-layer buffer comprises a single-crystal silicon nitride (Si3N4) layer that is formed in a controlled manner by introducing reactive nitrogen plasma or ammonia to the Si(111) substrate at a suitably high temperature. Then, an AlN buffer layer or other group-III nitride buffer layer is grown epitaxially on the single-crystal silicon nitride layer. Thereafter, the GaN epitaxial layer or group-III semiconductor heteroepitaxial structure can be grown on the coincidently matched multiple-layer buffer.
    • 本发明提供一种通过使用可在Si(111)衬底上生长的重合匹配多层缓冲层,在硅(111)衬底上生长III族氮化物半导体异质外延结构的方法。 一致匹配的多层缓冲器包括通过将反应性氮等离子体或氨引入到受控方式形成的单晶氮化硅(Si 3 N 4 N 4 N 4)层 Si(111)衬底在合适的高温下。 然后,在单晶氮化硅层上外延生长AlN缓冲层或其它III族氮化物缓冲层。 此后,可以在一致匹配的多层缓冲器上生长GaN外延层或III族半导体异质外延结构。