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    • 9. 发明授权
    • Method and apparatus for determining the thickness and index of
refraction of a film using low coherence reflectometry and a reference
surfaces
    • 使用低相干反射计和参考表面确定膜的厚度和折射率的方法和装置
    • US5633712A
    • 1997-05-27
    • US520198
    • 1995-08-28
    • Shalini VenkateshWayne V. SorinBrian L. Heffner
    • Shalini VenkateshWayne V. SorinBrian L. Heffner
    • G01B11/06G01N21/41G01B9/02
    • G01N21/41G01B11/0675
    • An apparatus and method for measuring the thickness of a film having top and bottom surfaces. The apparatus includes low coherence light source that generates a probe light signal. The film is positioned between first and second reference reflectors, the first reference reflector being partially reflecting. The probe light signal is applied to the film after passing through the first reference reflector. Part of the portion of the probe light signal leaving the film is reflected back toward the first reference reflector by the second reference reflector. The light exiting through the first reference reflector is collected to form the input to a receiver that determines the time delay between light reflected from the top and bottom surfaces of the film as well as the change in optical path length between said first and second reflectors resulting from the introduction of said film between said first and second reflectors. In the preferred embodiment of the present invention, the receiver is constructed from an optical autocorrelator or an optical spectrum analyzer that includes circuitry for providing the Fourier transform of the frequency domain spectrum measured from the combined light signal. Embodiments in which only one of the reference reflectors is utilized provide a means for simplifying the output spectrum from the receiver when multi-layer films are utilized.
    • 一种用于测量具有顶表面和底表面的膜的厚度的装置和方法。 该装置包括产生探测光信号的低相干光源。 薄膜位于第一和第二参考反射器之间,第一参考反射器被部分地反射。 探针光信号通过第一参考反射器后施加到膜。 离开膜的探测光信号的一部分的一部分被第二参考反射器反射回第一参考反射器。 收集通过第一参考反射器射出的光以形成接收器的输入,该接收器确定从膜的顶表面和底表面反射的光之间的时间延迟以及所述第一和第二反射器之间的光程长度的变化,从而得到 从所述第一和第二反射器之间的所述膜的引入。 在本发明的优选实施例中,接收机由光学自相关器或光谱分析仪构成,光谱分析仪包括用于提供从组合的光信号测量的频域频谱的傅里叶变换的电路。 其中仅使用一个参考反射器的实施例提供了当使用多层膜时简化来自接收器的输出光谱的装置。