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    • 2. 发明申请
    • STRUCTURE OF THIN NITRIDE FILM AND FORMATION METHOD THEREOF
    • 薄硝酸盐薄膜的结构及其形成方法
    • US20110156214A1
    • 2011-06-30
    • US13062557
    • 2009-09-07
    • Euijoon YoonKookheon CharJong Hak KimSewon OhHeeje Woo
    • Euijoon YoonKookheon CharJong Hak KimSewon OhHeeje Woo
    • H01L29/20H01L21/20
    • H01L21/0237H01L21/02458H01L21/02505H01L21/02507H01L21/0254H01L21/02639H01L21/02647H01L33/007H01L33/12
    • Provided are a nitride thin film structure and a method of forming the same. If a nitride thin film is formed on a substrate that is not a nitride, many defects are generated by a difference in lattice constants between the substrate and the nitride thin film. Also, there is a problem of warping the substrate by a difference in thermal expansion coefficients between the substrate and the nitride thin film. In order to solve the problems, the present invention suggests a thin film structure in which after coating hollow particles, i.e. hollow structures on the substrate, the nitride thin film is grown thereon and the method of forming the thin film structure. According to the present invention, since an epitaxial lateral overgrowth (ELO) effect can be obtained by the hollow structures, high-quality nitride thin film can be formed. Since a refractive index in the thin film structure is adjusted, there is an effect of increasing light extraction efficiency during manufacturing the thin film structure into a light emitting device such as a light emitting diode (LED). Also, when thermal expansion coefficient of the substrate is greater than that of the nitride thin film, total stress of the nitride thin film is decreased according to the compression of the hollow structures in the nitride thin film such that there is also an effect of preventing warpage of the substrate.
    • 提供一种氮化物薄膜结构及其形成方法。 如果氮化物薄膜形成在不是氮化物的衬底上,则衬底和氮化物薄膜之间的晶格常数差异会产生许多缺陷。 此外,存在由于基板和氮化物薄膜之间的热膨胀系数的差异使基板翘曲的问题。 为了解决这些问题,本发明提出了一种薄膜结构,其中在其上涂覆中空颗粒,即衬底上的中空结构,其上生长氮化物薄膜的方法和形成薄膜结构的方法。 根据本发明,由于可以通过中空结构获得外延横向过度生长(ELO)效应,因此可以形成高质量的氮化物薄膜。 由于调整薄膜结构中的折射率,所以在将薄膜结构体制造成诸如发光二极管(LED)的发光装置时,具有提高光提取效率的效果。 此外,当基板的热膨胀系数大于氮化物薄膜的热膨胀系数时,氮化物薄膜的总应力根据氮化物薄膜中的中空结构的压缩而降低,使得还具有防止 基材翘曲。
    • 5. 发明授权
    • Structure of thin nitride film and formation method thereof
    • 薄氮化膜的结构及其形成方法
    • US08847362B2
    • 2014-09-30
    • US13062557
    • 2009-09-07
    • Euijoon YoonKookheon CharJong Hak KimSewon OhHeeje Woo
    • Euijoon YoonKookheon CharJong Hak KimSewon OhHeeje Woo
    • H01L29/20H01L21/02H01L33/00
    • H01L21/0237H01L21/02458H01L21/02505H01L21/02507H01L21/0254H01L21/02639H01L21/02647H01L33/007H01L33/12
    • Provided are a nitride thin film structure and a method of forming the same. If a nitride thin film is formed on a substrate that is not a nitride, many defects are generated by a difference in lattice constants between the substrate and the nitride thin film. Also, there is a problem of warping the substrate by a difference in thermal expansion coefficients between the substrate and the nitride thin film. In order to solve the problems, the present invention suggests a thin film structure in which after coating hollow particles, i.e. hollow structures on the substrate, the nitride thin film is grown thereon and the method of forming the thin film structure. According to the present invention, since an epitaxial lateral overgrowth (ELO) effect can be obtained by the hollow structures, high-quality nitride thin film can be formed. Since a refractive index in the thin film structure is adjusted, there is an effect of increasing light extraction efficiency during manufacturing the thin film structure into a light emitting device such as a light emitting diode (LED). Also, when thermal expansion coefficient of the substrate is greater than that of the nitride thin film, total stress of the nitride thin film is decreased according to the compression of the hollow structures in the nitride thin film such that there is also an effect of preventing warpage of the substrate.
    • 提供一种氮化物薄膜结构及其形成方法。 如果氮化物薄膜形成在不是氮化物的衬底上,则衬底和氮化物薄膜之间的晶格常数差异会产生许多缺陷。 此外,存在由于基板和氮化物薄膜之间的热膨胀系数的差异使基板翘曲的问题。 为了解决这些问题,本发明提出了一种薄膜结构,其中在其上涂覆中空颗粒,即衬底上的中空结构,其上生长氮化物薄膜的方法和形成薄膜结构的方法。 根据本发明,由于可以通过中空结构获得外延横向过度生长(ELO)效应,因此可以形成高质量的氮化物薄膜。 由于调整薄膜结构中的折射率,所以在将薄膜结构体制造成诸如发光二极管(LED)的发光装置时,具有提高光提取效率的效果。 此外,当基板的热膨胀系数大于氮化物薄膜的热膨胀系数时,氮化物薄膜的总应力根据氮化物薄膜中的中空结构的压缩而降低,使得还具有防止 基材翘曲。
    • 7. 发明申请
    • RFID TAG FOR RFID SERVICE AND RFID SERVICE METHOD THEREOF
    • 用于RFID服务的RFID标签和其RFID服务方法
    • US20110084811A1
    • 2011-04-14
    • US12996227
    • 2009-06-04
    • Chanwon PARKSewon OhGilyoung ChoiCheolsig PyoJongsuk ChaeDavid Tschische
    • Chanwon PARKSewon OhGilyoung ChoiCheolsig PyoJongsuk ChaeDavid Tschische
    • G06K7/01
    • G06K7/0008G06K7/10475
    • Disclosed are an RFID tag for an RFID service and an RFID service method thereof. The present invention includes a tag storage unit including a TID memory and a user memory; and a tag controller that inserts and stores a content name field including content name information related to an item attached with the corresponding tag in the user memory, wherein the tag controller inserts the content name information in a tag response signal according to the request of a peripheral RFID interrogator and transmits it or permits an access to the memory in which the content name field is inserted. The present invention includes and stores the content name information in the identification data stored in the RFID tag to allow a user to select only the desired tag when the interrogator simultaneously recognizes a plurality of tags and receive the desired contents through the network, making it possible to give convenience to a user and reduce time and the using fee of the network.
    • 公开了RFID服务的RFID标签及其RFID服务方法。 本发明包括一个包括TID存储器和用户存储器的标签存储单元; 以及标签控制器,其将包含与附加有相应标签的项目相关的内容名称信息的内容名称字段插入并存储在用户存储器中,其中,所述标签控制器根据所述标签响应信号的请求将所述内容名称信息插入到标签响应信号中 周边RFID询问器,并发送或允许访问内容名称字段插入的存储器。 本发明在存储在RFID标签中的识别数据中包含并存储内容名称信息,以便当询问器同时识别多个标签并通过网络接收期望的内容时,用户只能选择期望的标签,使其成为可能 为用户提供方便,减少网络使用时间和使用费用。
    • 9. 发明授权
    • RFID tag for RFID service and RFID service method thereof
    • RFID标签用于RFID服务及其RFID服务方法
    • US09208360B2
    • 2015-12-08
    • US12996227
    • 2009-06-04
    • Chanwon ParkSewon OhGilyoung ChoiCheolsig PyoJongsuk ChaeDavid Tschische
    • Chanwon ParkSewon OhGilyoung ChoiCheolsig PyoJongsuk ChaeDavid Tschische
    • G06K7/00G06K7/10
    • G06K7/0008G06K7/10475
    • Disclosed are an RFID tag for an RFID service and an RFID service method thereof. The present invention includes a tag storage unit including a TID memory and a user memory; and a tag controller that inserts and stores a content name field including content name information related to an item attached with the corresponding tag in the user memory, wherein the tag controller inserts the content name information in a tag response signal according to the request of a peripheral RFID interrogator and transmits it or permits an access to the memory in which the content name field is inserted. The present invention includes and stores the content name information in the identification data stored in the RFID tag to allow a user to select only the desired tag when the interrogator simultaneously recognizes a plurality of tags and receive the desired contents through the network, making it possible to give convenience to a user and reduce time and the using fee of the network.
    • 公开了RFID服务的RFID标签及其RFID服务方法。 本发明包括一个包括TID存储器和用户存储器的标签存储单元; 以及标签控制器,其将包含与附加有相应标签的项目相关的内容名称信息的内容名称字段插入并存储在用户存储器中,其中,所述标签控制器根据所述标签响应信号的请求将所述内容名称信息插入到标签响应信号中 周边RFID询问器,并发送或允许访问内容名称字段插入的存储器。 本发明在存储在RFID标签中的识别数据中包含并存储内容名称信息,以便当询问器同时识别多个标签并通过网络接收期望的内容时,用户只能选择期望的标签,使其成为可能 为用户提供方便,减少网络使用时间和使用费用。