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1. 发明申请

US20080057733A1 METHOD OF FABRICATING A SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE 有权
标题翻译：制造半导体集成电路器件的方法
公开(公告)号：US20080057733A1
公开(公告)日：2008-03-06
申请号：US11847223
申请日：2007-08-29
申请人： Seung-Pil CHUNG , Dong-Chan KIM , Chang-Jin KANG , Heung-Sik PARK
发明人： Seung-Pil CHUNG , Dong-Chan KIM , Chang-Jin KANG , Heung-Sik PARK
IPC分类号： H01L21/31
CPC分类号： H01L21/0332 , H01L21/0337 , H01L21/3081 , H01L21/3086
摘要： Methods of fabricating a semiconductor integrated circuit device are disclosed. The methods of fabricating a semiconductor integrated circuit device include forming a hard mask layer on a base layer, forming a line sacrificial hard mask layer on the hard mask layer in a first direction, coating a high molecular organic material layer on the line sacrificial hard mask layer pattern, patterning the high molecular organic material layer and the line sacrificial hard mask layer pattern in a second direction, forming a matrix sacrificial hard mask layer pattern, forming a hard mask layer pattern by patterning the hard mask layer with the matrix sacrificial hard mask layer pattern as an etching mask and forming a lower pattern by patterning the base layer using the hard mask layer pattern as an etch mask. The method according to the invention is simpler and less expensive than conventional methods.
摘要翻译：公开了制造半导体集成电路器件的方法。制造半导体集成电路器件的方法包括在基底层上形成硬掩模层，在第一方向上在硬掩模层上形成线牺牲硬掩模层，在牺牲硬掩模上涂覆高分子有机材料层层状图案，在第二方向上图案化高分子有机材料层和线牺牲硬掩模层图案，形成矩阵牺牲硬掩模层图案，通过用基体牺牲硬掩模图案化硬掩模层形成硬掩模层图案层图案作为蚀刻掩模，并且通过使用硬掩模层图案作为蚀刻掩模对基底层进行图案化来形成下图案。根据本发明的方法比常规方法更简单和便宜。

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