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    • 2. 发明授权
    • Magnetron sputtering apparatus and method for manufacturing semiconductor device
    • 磁控溅射装置及半导体装置的制造方法
    • US08016985B2
    • 2011-09-13
    • US11858494
    • 2007-09-20
    • Shigeki MatsunakaOsamu Yamazaki
    • Shigeki MatsunakaOsamu Yamazaki
    • C23C14/35
    • C23C14/35H01L21/2855H01L21/76843H01L21/76871
    • A magnetron sputtering apparatus includes: a target provided in a sputtering chamber; a susceptor opposed to the target; a high-frequency power supply connected to the susceptor; a plate provided outside the sputtering chamber and coaxial with a central axis of the target; a rotary motion mechanism configured to rotate the plate about the central axis; S-pole magnets placed on one side of the plate with their S-pole end directed to the target; and first and second N-pole magnets placed on the one side of the plate with their N-pole end directed to the target. The first N-pole magnets are placed along a circle coaxial with the plate and opposed to an outer peripheral vicinity of the target. The S-pole magnets are placed inside the first N-pole magnets and along a circle coaxial with the plate. The second N-pole magnets are placed inside the S-pole magnets and along a circle coaxial with the plate. Magnetic flux density of the first N-pole magnets and the second N-pole magnets are higher than magnetic flux density of the S-pole magnets.
    • 磁控溅射装置包括:设置在溅射室中的靶; 与目标相反的感受者; 连接到基座的高频电源; 设置在溅射室外部并与靶的中心轴同轴的板; 旋转运动机构,其构造成围绕所述中心轴线旋转所述板; 放置在板的一侧的S极磁体,其S极端指向目标; 并且第一和第二N极磁体放置在板的一侧,其N极端指向靶。 第一N极磁体沿着与板同轴的圆形放置,并与靶的外周附近相对。 S极磁体放置在第一N极磁体内并沿着与板同轴的圆。 第二N极磁体放置在S极磁体内并沿着与该板同轴的圆周。 第一N极磁体和第二N极磁体的磁通密度高于S极磁体的磁通密度。
    • 4. 发明申请
    • IMAGE CORRECTING DEVICE AND METHOD, AND COMPUTER PROGRAM
    • 图像校正装置和方法以及计算机程序
    • US20090226094A1
    • 2009-09-10
    • US12440789
    • 2006-09-13
    • Osamu Yamazaki
    • Osamu Yamazaki
    • G06K9/46G06K9/40
    • G06T7/74G06T2207/30208
    • An image correcting device (1) is include of a feature point detecting element (3, 4 and 5) for detecting sets of feature points (QA0, QA1, . . . ) from a plurality of images (2) picked up at a plurality of places (a, b) by a pickup element, a change detecting element (7) for detecting relative changes among images with respect to the detected sets of the feature points, and a first specifying element (8) for specifying rotation quantities of the image pickup element among the places in accordance with the detected changes. The feature point detecting element detects set of points belonging to a plane-like stationary object (310) as sets of feature points.
    • 图像校正装置(1)包括特征点检测元件(3,4和5),用于检测从多个拾取的多个图像(2)中的特征点集合(QA0,QA1 ...) 以及用于检测图像之间相对于所检测的特征点组的相对变化的变化检测元件(7),以及用于指定所述特征点的旋转量的第一指定元件(8) 根据检测到的变化,位置之间的图像拾取元件。 特征点检测元件将属于平面状静止物体(310)的点集合检测为特征点集合。