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1. 发明申请

US20060027566A1 Multi-parameter process and control method 审中-公开
公开(公告)号：US20060027566A1
公开(公告)日：2006-02-09
申请号：US11239747
申请日：2005-09-29
申请人： Sergey Velichko , Jeffrey Nelson , Roger Eagans
发明人： Sergey Velichko , Jeffrey Nelson , Roger Eagans
IPC分类号： H05B1/02
CPC分类号： H01L21/67248
摘要： A method and system for generating control settings for a multi-parameter control system. The interdependencies of processing tools and the related effect on semiconductor wafers within a processing tool is factored into a mathematical model that considers desired and measured wafer quality parameters in the derivation of specific solutions of sets of possible quality parameter adjustments. A selection process determines a set of adjustments such as one that results in minimal changes to the process.

2. 发明申请

US20060212253A1 INTELLIGENT MEASUREMENT MODULAR SEMICONDUCTOR PARAMETRIC TEST SYSTEM 审中-公开
标题翻译：智能测量模块半导体参数测试系统
公开(公告)号：US20060212253A1
公开(公告)日：2006-09-21
申请号：US11382655
申请日：2006-05-10
申请人： Sergey Velichko , Michael Dorough , Robert Blunn
发明人： Sergey Velichko , Michael Dorough , Robert Blunn
IPC分类号： G01M19/00
CPC分类号： H01L21/67276 , G01R1/025 , G01R31/2831
摘要： An intelligent measurement modular semiconductor parametric test system comprises an engine control module. The engine control module is operable to communicate with a user via a user interface, and is further operable to communicate with and to control the state of at least one other module in the semiconductor parametric test system including pluggable modules. The engine control module is further operable to control test flow via a test monitor module based on data and control events received from an intelligent measurement module. Other modules in various embodiments comprise prober monitor modules.
摘要翻译：智能测量模块化半导体参数测试系统包括发动机控制模块。发动机控制模块可操作以经由用户界面与用户通信，并且还可操作以与包括可插拔模块的半导体参数测试系统中的至少一个其他模块通信并控制其状态。发动机控制模块还可操作以基于从智能测量模块接收的数据和控制事件，经由测试监视器模块来控制测试流程。各种实施例中的其他模块包括探测器监视器模块。

3. 发明授权

US07833819B2 Method and apparatus for decreasing storage node parasitic charge in active pixel image sensors 有权
标题翻译：减少有源像素图像传感器中存储节点寄生电荷的方法和装置
公开(公告)号：US07833819B2
公开(公告)日：2010-11-16
申请号：US12178374
申请日：2008-07-23
申请人： Sergey Velichko , Hong-Wei Lee
发明人： Sergey Velichko , Hong-Wei Lee
IPC分类号： H01L21/00
CPC分类号： H01L27/14689 , H01L27/14627 , H01L27/1463 , H01L27/14643
摘要： Methods, systems and apparatuses for an imager that improve the quality of a captured image. The imager includes a pixel having a photosensor that generates charge in response to receiving electromagnetic radiation and a storage region that stores the generated charge. A protection region assists in keeping undesirable charge from reaching the storage region.
摘要翻译：用于提高拍摄图像质量的成像器的方法，系统和装置。成像器包括具有响应于接收电磁辐射产生电荷的光传感器的像素和存储产生的电荷的存储区域。保护区域有助于防止不期望的电荷到达存储区域。

4. 发明申请

US20060125509A1 Dynamically adaptable semiconductor parametric testing 有权
公开(公告)号：US20060125509A1
公开(公告)日：2006-06-15
申请号：US11342425
申请日：2006-01-30
申请人： Michael Dorough , Robert Blunn , Sergey Velichko
发明人： Michael Dorough , Robert Blunn , Sergey Velichko
IPC分类号： G01R31/26
CPC分类号： G01R31/2831
摘要： An apparatus, method, system, and signal-bearing medium may provide multiple maps, which may include multiple probing sequences to be called upon at run-time based on statistical thresholds or other selected criteria. Each map may include a series of locations on a wafer, the tests to perform at each location, and the measured results of each test. A parametric test system may perform the test at the associated location on the wafer. If the statistical threshold is exceeded or the selected criteria is met, the current map may be abandoned in favor of a different map.

5. 发明申请

US20120273854A1 GLOBAL SHUTTER PIXEL WITH IMPROVED EFFICIENCY 有权
标题翻译：全球快门像素提高效率
公开(公告)号：US20120273854A1
公开(公告)日：2012-11-01
申请号：US13173596
申请日：2011-06-30
申请人： Sergey Velichko , Jingyi Bai
发明人： Sergey Velichko , Jingyi Bai
IPC分类号： H01L31/113 , H01L21/265
CPC分类号： H01L27/1461 , H01L21/26586 , H01L27/14612 , H01L27/14623
摘要： A global shutter pixel cell includes a serially connected anti-blooming (AB) transistor, storage gate (SG) transistor and transfer (TX) transistor. The serially connected transistors are coupled between a voltage supply and a floating diffusion (FD) region. A terminal of a photodiode (PD) is connected between respective terminals of the AB and the SG transistors; and a terminal of a storage node (SN) diode is connected between respective terminals of the SG and the TX transistors. A portion of the PD region is extended under the SN region, so that the PD region shields the SN region from stray photons. Furthermore, a metallic layer, disposed above the SN region, is extended downwardly toward the SN region, so that the metallic layer shields the SN region from stray photons. Moreover, a top surface of the metallic layer is coated with an anti-reflective layer.
摘要翻译：全局快门像素单元包括串联连接的防晕（AB）晶体管，存储栅极（SG）晶体管和传输（TX）晶体管。串联连接的晶体管耦合在电压源和浮动扩散（FD）区域之间。光电二极管（PD）的端子连接在AB和SG晶体管的各个端子之间; 并且存储节点（SN）二极管的端子连接在SG和TX晶体管的各个端子之间。 PD区域的一部分在SN区域下延伸，使得PD区域将SN区域与杂散光子屏蔽。此外，设置在SN区域上方的金属层向下延伸到SN区域，使得金属层将SN区域与杂散光子屏蔽。此外，金属层的顶表面涂覆有抗反射层。

6. 发明申请

US20100019294A1 METHOD AND APPARATUS FOR DECREASING STORAGE NODE PARASITIC CHARGE IN ACTIVE PIXEL IMAGE SENSORS 有权
标题翻译：用于降低活动像素图像传感器中存储节点寄生电荷的方法和装置
公开(公告)号：US20100019294A1
公开(公告)日：2010-01-28
申请号：US12178374
申请日：2008-07-23
申请人： Sergey Velichko , Hong-Wei Lee
发明人： Sergey Velichko , Hong-Wei Lee
IPC分类号： H01L31/112 , H01L31/18
CPC分类号： H01L27/14689 , H01L27/14627 , H01L27/1463 , H01L27/14643
摘要： Methods, systems and apparatuses for an imager that improve the quality of a captured image. The imager includes a pixel having a photosensor that generates charge in response to receiving electromagnetic radiation and a storage region that stores the generated charge. A protection region assists in keeping undesirable charge from reaching the storage region.
摘要翻译：用于提高拍摄图像质量的成像器的方法，系统和装置。成像器包括具有响应于接收电磁辐射产生电荷的光传感器的像素和存储产生的电荷的存储区域。保护区域有助于防止不期望的电荷到达存储区域。

7. 发明申请

US20060122803A1 Dynamically adaptable semiconductor parametric testing 失效
公开(公告)号：US20060122803A1
公开(公告)日：2006-06-08
申请号：US11342419
申请日：2006-01-30
申请人： Michael Dorough , Robert Blunn , Sergey Velichko
发明人： Michael Dorough , Robert Blunn , Sergey Velichko
IPC分类号： G01R27/28
CPC分类号： G01R31/2831
摘要： An apparatus, method, system, and signal-bearing medium may provide multiple maps, which may include multiple probing sequences to be called upon at run-time based on statistical thresholds or other selected criteria. Each map may include a series of locations on a wafer, the tests to perform at each location, and the measured results of each test. A parametric test system may perform the test at the associated location on the wafer. If the statistical threshold is exceeded or the selected criteria is met, the current map may be abandoned in favor of a different map.

8. 发明申请

US20060064268A1 Dynamic creation and modification of wafer test maps during wafer testing 审中-公开
公开(公告)号：US20060064268A1
公开(公告)日：2006-03-23
申请号：US11265897
申请日：2005-11-03
申请人： Michael Dorough , Robert Gravelle , Sergey Velichko
发明人： Michael Dorough , Robert Gravelle , Sergey Velichko
IPC分类号： G06F19/00
CPC分类号： G01R31/2894 , G01R31/2831
摘要： Methods, systems, and apparatuses provide dynamic creation and modification of wafer test maps. Test plans are defined for a testing session of a wafer lot. The test plan is associated with a number of seed map patterns. During a wafer lot testing session, test results are dynamically obtained and examined at run-time of a test. Moreover, the seed map patterns are overlaid on the test sites defined in the test plan. If the test result statistics are outside of defined threshold tolerance levels, then a new wafer test map is created or modified at run-time, according to corresponding seed map patterns. If seed map patterns are within the intersection of valid test sites, then seed map patterns are created at run-time.

9. 发明授权

US08878264B2 Global shutter pixel with improved efficiency 有权
标题翻译：全球快门像素效率提高
公开(公告)号：US08878264B2
公开(公告)日：2014-11-04
申请号：US13173596
申请日：2011-06-30
申请人： Sergey Velichko , Jingyi Bai
发明人： Sergey Velichko , Jingyi Bai
IPC分类号： H01L27/146 , H01L21/265
CPC分类号： H01L27/1461 , H01L21/26586 , H01L27/14612 , H01L27/14623
摘要： A global shutter pixel cell includes a serially connected anti-blooming (AB) transistor, storage gate (SG) transistor and transfer (TX) transistor. The serially connected transistors are coupled between a voltage supply and a floating diffusion (FD) region. A terminal of a photodiode (PD) is connected between respective terminals of the AB and the SG transistors; and a terminal of a storage node (SN) diode is connected between respective terminals of the SG and the TX transistors. A portion of the PD region is extended under the SN region, so that the PD region shields the SN region from stray photons. Furthermore, a metallic layer, disposed above the SN region, is extended downwardly toward the SN region, so that the metallic layer shields the SN region from stray photons. Moreover, a top surface of the metallic layer is coated with an anti-reflective layer.
摘要翻译：全局快门像素单元包括串联连接的防晕（AB）晶体管，存储栅极（SG）晶体管和传输（TX）晶体管。串联连接的晶体管耦合在电压源和浮动扩散（FD）区域之间。光电二极管（PD）的端子连接在AB和SG晶体管的各个端子之间; 并且存储节点（SN）二极管的端子连接在SG和TX晶体管的各个端子之间。 PD区域的一部分在SN区域下延伸，使得PD区域将SN区域与杂散光子屏蔽。此外，设置在SN区域上方的金属层向下延伸到SN区域，使得金属层将SN区域与杂散光子屏蔽。此外，金属层的顶表面涂覆有抗反射层。

10. 发明申请

US20070112538A1 Concurrent control of semiconductor parametric testing 审中-公开
标题翻译：并行控制半导体参数测试
公开(公告)号：US20070112538A1
公开(公告)日：2007-05-17
申请号：US11651139
申请日：2007-01-09
申请人： Sergey Velichko , Robert Blunn , Michael Dorough
发明人： Sergey Velichko , Robert Blunn , Michael Dorough
IPC分类号： G01R31/00
CPC分类号： G06F11/24 , G01R31/2834 , G01R31/2851 , G01R31/2894 , G01R31/3004 , G01R31/31726
摘要： An automated semiconductor parametric test system has a control module that is operable to concurrently control both operation of semiconductor test equipment and operation of parametric test instrumentation. A state oscillator module is controlled by the control module, and further may be operated by the control module in some embodiments to control the state of other system modules in synchronization with other system events. A parametric test equipment module facilitates control of the semiconductor parametric test equipment, and a test instrumentation module facilitates control of the parametric test instrumentation.
摘要翻译：一种自动半导体参数测试系统具有可同时控制半导体测试设备的操作和参数测试仪器的操作的控制模块。状态振荡器模块由控制模块控制，并且在一些实施例中还可由控制模块操作以与其它系统事件同步地控制其它系统模块的状态。参数化测试设备模块便于半导体参数化测试设备的控制，而测试仪表模块便于参数测试仪器的控制。

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