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1. 发明授权

US07366213B2 MOPA excimer or molecular fluorine laser system with improved synchronization 有权
标题翻译： MOPA准分子或分子氟激光系统具有改进的同步性
公开(公告)号：US07366213B2
公开(公告)日：2008-04-29
申请号：US10847071
申请日：2004-05-17
申请人： Sergei V. Govorkov , Andriy N. Knysh , Alexander O. Wiessner
发明人： Sergei V. Govorkov , Andriy N. Knysh , Alexander O. Wiessner
IPC分类号： H01S3/00
CPC分类号： H01S3/0977 , H01S3/09702 , H01S3/225 , H01S3/2253 , H01S3/2308
摘要： The relative timing delay between channels of a discharge circuit can be adjusted through application of appropriate control voltages. A control voltage of relatively long duration and relatively small voltage, with respect to a common system pulse, can be applied to any channel in order to adjust the relative timing delay. This control voltage can be, for example, a magnetization pre-pulse voltage applied to an indictor for a channel in order to adjust a hold-off time. A synchronization control unit and feedback loop can be used to monitor the timing, such that the syncronization control unit can apply a control voltage when a delay change exceeds a timing adjustment threshold value, and can apply a pre-ionization voltage when the delay change is less than the adjustment threshold value. Using both a control voltage and a pre-ionization voltage provides for both coarse and fine adjustment of the delay.
摘要翻译：放电电路通道之间的相对定时延时可以通过适当的控制电压进行调节。相对于公共系统脉冲，相对长的持续时间和相对较小的电压的控制电压可以应用于任何通道，以便调整相对定时延迟。该控制电压可以是例如施加到通道的指示器的磁化预脉冲电压，以调整延迟时间。可以使用同步控制单元和反馈环来监视定时，使得当延迟变化超过定时调整阈值时，同步控制单元可以施加控制电压，并且当延迟变化为小于调整阈值。使用控制电压和预电离电压既可以对延迟进行粗调和微调。

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