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    • 2. 发明申请
    • Beam scanning optical system
    • 光束扫描光学系统
    • US20060039056A1
    • 2006-02-23
    • US11206084
    • 2005-08-18
    • Ju-hyun Lee
    • Ju-hyun Lee
    • G02B26/08
    • G02B26/12G02B26/0816G02B26/0875G02B26/105G02B27/0031
    • Provided is a beam scanning optical system. The beam scanning optical system includes a scanner scanning an incident light beam, a projection optical system projecting the image of the light beam scanned by the scanner onto an image plane, and a resolution enhancement unit improving resolution so that the light beam image can be formed on an image plane at a higher resolution than determined by the scanner and the projection optical system. Accordingly, the optical system can improve resolution without increasing the size of the scanning surface of the scanner. As a result, resolution can be improved irrespective of the size limit of the scanner.
    • 提供了一种光束扫描光学系统。 光束扫描光学系统包括扫描入射光束的扫描仪,将由扫描仪扫描的光束的图像投影到图像平面上的投影光学系统,以及提高分辨率的分辨率增强单元,从而可以形成光束图像 以比由扫描仪和投影光学系统确定的更高的分辨率在图像平面上。 因此,光学系统可以在不增加扫描仪的扫描表面的尺寸的情况下提高分辨率。 结果,无论扫描仪的尺寸限制如何,都可以提高分辨率。
    • 3. 发明授权
    • Liquid crystal display panel
    • 液晶显示面板
    • US07446842B2
    • 2008-11-04
    • US10773462
    • 2004-02-09
    • Ju-hyun Lee
    • Ju-hyun Lee
    • G02F1/1345
    • G02F1/1345G09G3/3651
    • A liquid crystal display (LCD) panel including a liquid crystal panel, a first driving circuit, connected to the liquid crystal panel by a plurality of data lines, a second driving circuit, connected to the liquid crystal panel by a plurality of gate lines, an electrode pad unit applying a signal voltage aligning the liquid crystal filled in the liquid crystal panel, a first switching circuit, performing a switching operation to apply a part of the liquid crystal alignment signal voltage applied via the electrode pad unit to the liquid crystal panel via the data lines, a second switching circuit, performing a switching operation to apply a remaining part of the liquid crystal alignment signal voltage to the liquid crystal panel via the gate lines, and first and second buffer circuits, which prevent the liquid crystal alignment signal voltage from being applied backward to the first and second driving circuits.
    • 一种液晶显示器(LCD)面板,包括液晶面板,通过多条数据线连接到液晶面板的第一驱动电路,通过多条栅极线连接到液晶面板的第二驱动电路, 施加将液晶板中填充的液晶取向的信号电压的电极焊盘单元,第一切换电路,进行切换操作,将经由电极焊盘单元施加的液晶取向信号电压的一部分施加到液晶面板 经由数据线,第二切换电路进行切换操作,以经由栅极线将液晶取向信号电压的剩余部分施加到液晶面板;以及第一和第二缓冲电路,其防止液晶取向信号 电压被反向施加到第一和第二驱动电路。
    • 5. 发明授权
    • Optical scanner with curved mirror and method of manufacturing the same
    • 具有曲面镜的光学扫描仪及其制造方法
    • US07149022B2
    • 2006-12-12
    • US10872480
    • 2004-06-22
    • Yong-kweun MunJu-hyun LeeYoung-chul KoJin-ho Lee
    • Yong-kweun MunJu-hyun LeeYoung-chul KoJin-ho Lee
    • G02B26/08
    • G02B26/0841
    • An optical scanner and a method of manufacturing the same are provided. The optical scanner comprises a rectangular frame, a H-shaped stage, which is linearly driven in a second direction perpendicular to a first direction of a central axis inside the frame and includes a central area positioned in a direction of the central axis and four extended areas that extend from both opposite sides of the central area parallel to the central axis, a cylindrical mirror, which is disposed on the central area and scans a laser beam incident on the surface thereof in the second direction, torsion bars, which are disposed on the central axis and support the stage by connecting the frame and the central area of the stage, and a stage driving structure, which includes driving comb electrodes formed at both long sides of the stage and fixed comb electrodes formed at corresponding sides of the frame, parallel to the first direction.
    • 提供了一种光学扫描器及其制造方法。 光学扫描器包括矩形框架,H形台阶,其在垂直于框架内的中心轴线的第一方向的第二方向上线性地驱动,并且包括位于中心轴线的方向上的中心区域和四个延伸的 从平行于中心轴线的中心区域的相对侧延伸的区域,设置在中心区域上并沿着第二方向扫描入射在其表面上的激光束的圆柱形反射镜,扭矩杆设置在 中心轴并且通过连接框架和平台的中心区域来支撑平台,以及台架驱动结构,其包括形成在舞台的两个长边处的驱动梳电极和形成在框架的相应侧的固定梳电极, 平行于第一个方向。
    • 10. 发明申请
    • Semiconductor manufacturing apparatus
    • 半导体制造装置
    • US20050155555A1
    • 2005-07-21
    • US11020006
    • 2004-12-23
    • Kyu-hee HanJu-hyun LeeHee-jeon YangKi-hyun Kim
    • Kyu-hee HanJu-hyun LeeHee-jeon YangKi-hyun Kim
    • H05H1/46C23C16/00C23C16/44H01J37/32H01L21/205
    • H01J37/32522H01J37/321H01J37/32935
    • A semiconductor manufacturing apparatus includes a chamber main body and a dome to form an accommodating space to accommodate a substrate, an antenna provided on the dome to generate a plasma in the accommodating space, and a temperature controller provided on the dome to control a temperature of the dome. The temperature controller includes a heat transfer unit provided on the dome or in the vicinity of the dome and the antenna, a heater provided on the heat transfer unit to heat the dome, a cooler provided between the heat transfer unit and the heater to cool the dome, and an adjusting valve connected to the cooler to adjust the quantity of coolant supplied to the cooler to control the temperature of the dome within a predetermined reference temperature range. The temperature of the dome may be maintained constant within the predetermined reference temperature range if an electrical power with a high voltage is supplied to the antennato generate the plasma with a high density in the chamber.
    • 半导体制造装置包括室主体和圆顶,以形成容纳基板的容纳空间,设置在圆顶上的天线,以在容纳空间中产生等离子体;以及温度控制器,设置在穹顶上以控制温度 圆顶。 温度控制器包括设置在穹顶或穹顶和天线附近的传热单元,设置在传热单元上以加热穹顶的加热器,设置在传热单元和加热器之间的冷却器,以冷却 圆顶和连接到冷却器的调节阀,以调节供应到冷却器的冷却剂的量,以在预定的参考温度范围内控制圆顶的温度。 如果将具有高电压的电力供应给天线,则腔室中的高密度产生等离子体,则可以在预定的参考温度范围内将圆顶的温度保持恒定。