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    • 10. 发明申请
    • ARRAY SUBSTRATE AND DISPLAY PANEL
    • 阵列基板和显示面板
    • US20070264735A1
    • 2007-11-15
    • US11737626
    • 2007-04-19
    • Jae-Seong ByunHo-Min KangBae-Hyoun Jung
    • Jae-Seong ByunHo-Min KangBae-Hyoun Jung
    • H01L21/84
    • H01L27/124H01L27/1288
    • A manufacturing method for an array substrate, comprising forming a gate metal on a base substrate, patterning the gate metal to form a gate part having a gate electrode, a gate line and a gate pad. Then, a gate insulating layer, an active layer and a data metal are sequentially formed on the base substrate to cover the gate part. The data metal is patterned to form a data part having a data electrode, a data pad and a pixel electrode. Then, the exposed portion of the active layer is removed, and the exposed portion of the gate insulation layer is removed. When the data electrode is divided into a source electrode and a drain electrode, a switching device is completed.
    • 一种阵列基板的制造方法,包括在基底基板上形成栅极金属,构图所述栅极金属,形成具有栅极电极,栅极线和栅极焊盘的栅极部分。 然后,在基底基板上依次形成栅极绝缘层,有源层和数据金属,以覆盖栅极部分。 数据金属被图案化以形成具有数据电极,数据焊盘和像素电极的数据部分。 然后,去除有源层的暴露部分,并去除栅极绝缘层的暴露部分。 当数据电极被分成源电极和漏极时,完成开关装置。