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1. 发明授权

US12023929B2 Liquid ejecting head, liquid ejecting apparatus, and actuator 有权
公开(公告)号：US12023929B2
公开(公告)日：2024-07-02
申请号：US18342240
申请日：2023-06-27
申请人： SEIKO EPSON CORPORATION
发明人： Harunobu Koike , Tatsuo Sawasaki , Masao Nakayama , Chihiro Nishi , Toshihiro Shimizu , Yasushi Yamazaki
IPC分类号： B41J2/14
CPC分类号： B41J2/14233 , B41J2/14201 , B41J2002/14258 , B41J2202/03
摘要： A liquid ejecting head includes a piezoelectric element and a vibrating plate configured to vibrate in response to actuation of the piezoelectric element, the vibrating plate including a first layer that contains SiO2 and a second layer that contains ZrO2 and that is stacked on the first layer. The second layer contains a first impurity element different from Zr, and the concentration of the first impurity element at an interface in contact with the first layer in the second layer is higher than the concentration of the first impurity element in an internal region that is included in the second layer and that is contiguous from the interface to the surface of the second layer.

2. 发明授权

US11858270B2 Liquid ejection head, liquid ejection apparatus, piezoelectric device, and method for manufacturing piezoelectric device 有权
公开(公告)号：US11858270B2
公开(公告)日：2024-01-02
申请号：US17322204
申请日：2021-05-17
申请人： SEIKO EPSON CORPORATION
发明人： Toshihiro Shimizu , Harunobu Koike , Takanori Aimono , Masao Nakayama , Tatsuo Sawasaki , Chihiro Nishi , Noritaka Mochizuki , Yasushi Yamazaki , Osamu Tonomura
IPC分类号： B41J2/14 , B41J2/175 , B41J2/025
CPC分类号： B41J2/14233 , B41J2/025 , B41J2/175
摘要： A liquid ejection head includes: a piezoelectric body; an vibration plate to be vibrated by a drive of the piezoelectric body; and a pressure chamber substrate including a pressure chamber which applies a pressure to a liquid by an vibration of the vibration plate; the pressure chamber substrate, the vibration plate, and the piezoelectric body are laminated in this order; and the vibration plate includes: a first layer containing silicon as a constituent element, a second layer which is disposed between the first layer and the piezoelectric body and which contains as a constituent element, a metal element selected from chromium, titanium, and aluminum, and a third layer which is disposed between the second layer and the piezoelectric body and which contains zirconium as a constituent element.

3. 发明授权

US10525707B2 Liquid ejecting head, liquid ejecting apparatus, and piezoelectric device 有权
公开(公告)号：US10525707B2
公开(公告)日：2020-01-07
申请号：US16127758
申请日：2018-09-11
申请人： SEIKO EPSON CORPORATION
发明人： Masao Nakayama , Shunya Fukuda , Eiju Hirai , Shiro Yazaki , Hajime Nakao
IPC分类号： B41J2/14
摘要： A liquid ejecting head includes a flow path forming substrate, a vibration plate that is formed on one surface side of the flow path forming substrate, a plurality of piezoelectric elements that are provided on the vibration plate, a protective substrate that is bonded to the one surface side of the flow path forming substrate and has a flow path, a flow path member that is bonded to a side of the protective substrate opposite to the flow path forming substrate, a drive circuit that is mounted in a space formed so as to be surrounded by the flow path forming substrate, the protective substrate, and the flow path member, a filler that is filled between the drive circuit and the protective substrate, and a protective film that is formed on an inner wall, in which the protective film has an exposure hole exposing a surface of the filler.

4. 发明授权

US10464322B2 Piezoelectric device, liquid ejecting head, and liquid ejecting apparatus 有权
公开(公告)号：US10464322B2
公开(公告)日：2019-11-05
申请号：US16029033
申请日：2018-07-06
申请人： SEIKO EPSON CORPORATION
发明人： Masao Nakayama , Motoki Takabe , Eiju Hirai , Shiro Yazaki
IPC分类号： B41J2/175 , B41J2/14
摘要： A piezoelectric device used in a liquid ejecting head that ejects liquid from a nozzle includes a flow path forming substrate in which an individual liquid chamber that communicates with the nozzle, and a liquid supply chamber that communicates with the individual liquid chamber are formed, a vibration plate formed at a position corresponding to the individual liquid chamber and the liquid supply chamber of the flow path forming substrate, a plurality of liquid supply ports formed in the liquid supply chamber, and a piezoelectric element including a first electrode, a piezoelectric layer, and a second electrode, the piezoelectric element being formed at a position on the vibration plate corresponding to the individual liquid chamber. A metal layer is stacked at a position on the vibration plate corresponding to the liquid supply chamber. The liquid supply ports are provided so as to penetrate the vibration plate and the metal layer.

5. 发明授权

US09950514B2 Piezoelectric element, liquid ejecting head, and piezoelectric element device 有权
公开(公告)号：US09950514B2
公开(公告)日：2018-04-24
申请号：US15416316
申请日：2017-01-26
申请人： Seiko Epson Corporation
发明人： Masao Nakayama , Eiju Hirai , Naoto Yokoyama , Motoki Takabe , Yoichi Naganuma
IPC分类号： B41J2/14 , B41J2/01
CPC分类号： B41J2/01 , B41J2/14201 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1634 , B41J2/1645 , B41J2/1646 , B41J2002/14241 , B41J2002/1425 , B41J2002/14419
摘要： Provided are a vibrating plate, a first electrode provided over the vibrating plate, a piezoelectric layer provided over the first electrode, and a second electrode provided over the piezoelectric layer are provided. The piezoelectric layer is interposed between the first electrode and the second electrode. The piezoelectric layer includes an active portion of which at least one end portion is defined by the first electrode, and a non-active portion provided on an outside of the end portion of the first electrode for defining the active portion. The vibrating plate includes a first vibration portion under the non-active portion and a second vibration portion on an outside of the first vibration portion. The second vibration portion includes a taper part having the thickness which is increased toward the first vibration portion.

6. 发明授权

US09770907B2 MEMS device, liquid ejecting head, and liquid ejecting apparatus 有权
公开(公告)号：US09770907B2
公开(公告)日：2017-09-26
申请号：US15354851
申请日：2016-11-17
申请人： SEIKO EPSON CORPORATION
发明人： Katsutomo Tsukahara , Motoki Takabe , Eiju Hirai , Masao Nakayama , Munehide Saimen
IPC分类号： B41J2/045 , B41J2/14 , B81B7/00
CPC分类号： B41J2/14201 , B41J2/14233 , B41J2002/14241 , B41J2002/14266 , B41J2002/14491 , B41J2202/11 , B41J2202/18 , B81B7/0061 , B81B2201/052
摘要： A MEMS device includes a drive region having a stacked structural body in which a first electrode layer, a first dielectric layer, and a second electrode layer are stacked in that order. The stacked structural body extends from the drive region to a non-drive region that is outer than the drive region and, in an extending direction of the stacked structural body, the first electrode layer and the first dielectric layer extend farther outward than the second electrode layer. A second dielectric layer covering an end of the second electrode layer in the extending direction is stacked on the second electrode layer in the non-drive region and the first dielectric layer that is formed outer in the extending direction than the second electrode layer. A third electrode layer electrically connected to the second electrode layer is stacked on the second dielectric layer and on the second electrode layer in a region outside the second dielectric layer. In the extending direction, the end of the second electrode layer is formed more to a drive region side than a second dielectric layer-side end of the third electrode layer.

7. 发明授权

US12017456B2 Piezoelectric device, liquid ejecting head, liquid ejecting apparatus, and method of manufacturing piezoelectric device 有权
公开(公告)号：US12017456B2
公开(公告)日：2024-06-25
申请号：US17662798
申请日：2022-05-10
申请人： SEIKO EPSON CORPORATION
发明人： Harunobu Koike , Tatsuo Sawasaki , Masao Nakayama , Toshihiro Shimizu , Chihiro Nishi
IPC分类号： B41J2/14 , B41J2/16 , H10N30/20
CPC分类号： B41J2/14274 , B41J2/14233 , B41J2/161 , B41J2/1612 , H10N30/2047
摘要： The diaphragm includes a first layer containing silicon as a constituent element, a third layer disposed between the first layer and the piezoelectric actuator and containing zirconium as a constituent element, and a second layer disposed between the first layer and the third layer and containing at least one selected from the group consisting of a metal other than iron, silicon, and zirconium, a metalloid, and a semiconductor, as a constituent element, in the second layer and the third layer, a position with a highest concentration of impurities other than the constituent elements of the second layer and the third layer is in the second layer, a position with a highest concentration of zirconium is in the third layer, and a position with a highest concentration of silicon is in the first layer.

8. 发明授权

US11020973B2 Piezoelectric device, liquid ejecting head, liquid ejecting apparatus, and manufacturing method of piezoelectric device 有权
公开(公告)号：US11020973B2
公开(公告)日：2021-06-01
申请号：US15759153
申请日：2016-08-31
申请人： SEIKO EPSON CORPORATION
发明人： Masao Nakayama , Yasuhiro Itayama , Naoto Yokoyama , Eiju Hirai , Motoki Takabe
IPC分类号： H01L41/187 , H01L41/319 , B41J2/16 , H01L41/08 , H01L41/09
摘要： Provided is a piezoelectric device including: a substrate (10) on which a plurality of recesses (12) are provided; a vibrating plate (50) which is provided on one surface side of the substrate; and a piezoelectric element (300) which is provided over the vibrating plate (50) and on which a first electrode (60), a piezoelectric layer (70), and a second electrode (80) are laminated from the substrate (10) side, in which the first electrode (60) is formed to have a first width which is smaller than a dimension of the recess in a parallel arrangement direction in the parallel arrangement direction of at least one recess (12), and the piezoelectric layer (70) is extended to the outer side of the first electrode (60) in the parallel arrangement direction and has a second width which is greater than the first width and smaller than a width of the recess (12) in the parallel arrangement direction, the vibrating plate (50) contains a zirconium oxide layer (52), and when an area of the zirconium oxide layer (52) corresponding to the first electrode having the first width is set as a first area (p), areas of the zirconium oxide layer (52) corresponding to areas where the piezoelectric layer (70) is provided on the outer side of the first area (p) in the parallel arrangement direction are set as second areas (q), and areas of the zirconium oxide layer (52) corresponding to the recess (12) on the outer side of the second areas (q) in the parallel arrangement direction are set as third areas (r), the zirconium oxide layer (52) contains particulate crystal in the first area (p) at least on the first electrode (60) side in the thickness direction and contains columnar crystal in the third areas (r).

9. 发明授权

US10737493B2 Piezoelectric device, liquid ejecting head, and liquid ejecting apparatus 有权
公开(公告)号：US10737493B2
公开(公告)日：2020-08-11
申请号：US16357405
申请日：2019-03-19
申请人： Seiko Epson Corporation
发明人： Naoto Yokoyama , Eiju Hirai , Masao Nakayama
IPC分类号： B41J2/14 , H01L41/09
摘要： A piezoelectric device includes a vibration plate, and a first piezoelectric element and a second piezoelectric element that vibrate the vibration plate. The first piezoelectric element and the second piezoelectric element include a piezoelectric layer extending between the first piezoelectric element and the second piezoelectric element. In a region between the first piezoelectric element and the second piezoelectric element in the piezoelectric layer, a first opening portion and a second opening portion are formed in a second direction intersecting a first direction in which the first piezoelectric element and the second piezoelectric element are disposed so as to interpose a vibration suppressing portion, which is a portion of the piezoelectric layer.

10. 发明授权

US10507656B2 Piezoelectric device, liquid ejecting head, and liquid ejecting apparatus 有权
公开(公告)号：US10507656B2
公开(公告)日：2019-12-17
申请号：US16024466
申请日：2018-06-29
申请人： SEIKO EPSON CORPORATION
发明人： Masao Nakayama , Motoki Takabe , Eiju Hirai , Shiro Yazaki
IPC分类号： B41J2/14 , H01L41/047
摘要： A piezoelectric device used in a liquid ejecting head that ejects a liquid from a nozzle includes a flow-path-forming substrate in which an individual liquid chamber that communicates with the nozzle and a liquid supply chamber that communicates with the individual liquid chamber are formed, a vibration plate formed at a position corresponding to the individual liquid chamber and the liquid supply chamber of the flow-path-forming substrate, a plurality of liquid supply ports formed in the liquid supply chamber, and a piezoelectric element including a first electrode, a piezoelectric layer, and a second electrode, the piezoelectric element being formed at a position on the vibration plate corresponding to the individual liquid chamber, where the liquid supply ports are provided so as to penetrate the vibration plate, and where the vibration plate contains zirconium oxide.

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