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    • 5. 发明授权
    • Method of measuring characteristics of specimen and flat-plate periodic structure
    • 测量样品和平板周期结构特征的方法
    • US08304732B2
    • 2012-11-06
    • US13405651
    • 2012-02-27
    • Seiji KambaKazuhiro TakigawaTakashi KondoKoji Tanaka
    • Seiji KambaKazuhiro TakigawaTakashi KondoKoji Tanaka
    • G01J5/02
    • G01N21/3581
    • A measuring method that includes holding a specimen to be measured on a flat-plate periodic structure, applying a linearly-polarized electromagnetic wave to the flat-plate periodic structure, detecting the electromagnetic wave scattered forward or backward by the flat-plate periodic structure, and measuring characteristics of the specimen on the basis of a phenomenon that a dip waveform appearing in a frequency characteristic of the forward-scattered electromagnetic wave or a peak waveform appearing in a frequency characteristic of the backward-scattered electromagnetic wave is changed with the presence of the specimen. The flat-plate periodic structure is a flat-plate structure in which at least two voids penetrating through the structure in a direction perpendicular to a principal surface thereof are periodically arrayed in at least one direction on the principal surface, and the electromagnetic wave is applied to the principal surface of the flat-plate periodic structure from the direction perpendicular to the principal surface.
    • 一种测量方法,其包括将平板周期性结构上的测量样本保持在平板周期结构上,对平板周期结构施加线性偏振电磁波,通过平板周期性结构检测前后散射的电磁波, 并根据出现在前向散射电磁波的频率特性中的下降波形或出现在后向散射电磁波的频率特性中的峰值波形发生变化的现象,测量样本的特性, 标本。 平板周期性结构是平板结构,其中在垂直于其主表面的方向上贯穿结构的至少两个空隙在主表面上沿至少一个方向周期性排列,并且施加电磁波 从垂直于主表面的方向到平板周期性结构的主表面。
    • 7. 发明申请
    • Method of Measuring Characteristics of Specimen and Flat-Plate Periodic Structure
    • 测量样品和平板周期结构特征的方法
    • US20120153159A1
    • 2012-06-21
    • US13405651
    • 2012-02-27
    • Seiji KambaKazuhiro TakigawaTakashi KondoKoji Tanaka
    • Seiji KambaKazuhiro TakigawaTakashi KondoKoji Tanaka
    • G01J5/10
    • G01N21/3581
    • A measuring method that includes holding a specimen to be measured on a flat-plate periodic structure, applying a linearly-polarized electromagnetic wave to the flat-plate periodic structure, detecting the electromagnetic wave scattered forward or backward by the flat-plate periodic structure, and measuring characteristics of the specimen on the basis of a phenomenon that a dip waveform appearing in a frequency characteristic of the forward-scattered electromagnetic wave or a peak waveform appearing in a frequency characteristic of the backward-scattered electromagnetic wave is changed with the presence of the specimen. The flat-plate periodic structure is a flat-plate structure in which at least two voids penetrating through the structure in a direction perpendicular to a principal surface thereof are periodically arrayed in at least one direction on the principal surface, and the electromagnetic wave is applied to the principal surface of the flat-plate periodic structure from the direction perpendicular to the principal surface.
    • 一种测量方法,其包括将平板周期性结构上的测量样本保持在平板周期结构上,对平板周期结构施加线性偏振电磁波,通过平板周期性结构检测前后散射的电磁波, 并根据出现在前向散射电磁波的频率特性中的下降波形或出现在后向散射电磁波的频率特性中的峰值波形发生变化的现象,测量样本的特性, 标本。 平板周期性结构是平板结构,其中在垂直于其主表面的方向上贯穿结构的至少两个空隙在主表面上沿至少一个方向周期性排列,并且施加电磁波 从垂直于主表面的方向到平板周期性结构的主表面。