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    • 10. 发明授权
    • Seal system for irrigated scrubber mandrel assembly
    • 灌溉洗涤器心轴组件密封系统
    • US07162765B2
    • 2007-01-16
    • US10625973
    • 2003-07-23
    • Adam Sean HarbisonScott PetersonBryan Riley
    • Adam Sean HarbisonScott PetersonBryan Riley
    • B08B1/04
    • H01L21/67046B08B1/02B08B1/04G11B23/505
    • An improved cleaning fluid supply housing assembly for a cascade-type substrate scrubber having a sliding piston configured with a flange with recesses so that the piston is out of contact with the rotating part of the brush core mandrel bearing assembly. Rather, the piston flange outer face only contacts the stationary outer race of the mandrel bearing. The water supply piston is also configured with a full bore to minimize the pressure on the end of the mandrel. A tolerance-controlled leak through the bearing is provided by the configuration of the piston flange to provide a flushing of the area in which wear might be a source of particle generation by a controlled tolerance leak upstream of the brushes. These features substantially eliminate the source of particle generation from contact wear and the contribution of such wear particles into the interface between the brush and the substrate surface being cleaned.
    • 一种用于级联型衬底洗涤器的改进的清洁流体供应壳体组件,其具有滑动活塞,所述滑动活塞构造有具有凹部的凸缘,使得活塞与刷芯心轴承组件的旋转部分脱离接触。 相反,活塞凸缘外表面仅接触心轴轴承的固定外圈。 供水活塞还配置有全孔,以使心轴端部的压力最小化。 通过活塞凸缘的构造提供了通过轴承的公差控制的泄漏,以便通过刷子上游的受控公差泄漏来提供磨损可能是颗粒产生源的区域的冲洗。 这些特征基本上消除了来自接触磨损的颗粒产生的来源以及这种磨损颗粒对刷和待清洁的基底表面之间界面的贡献。