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    • 6. 发明授权
    • High contrast grating light valve
    • 高对比度光栅光阀
    • US07903337B1
    • 2011-03-08
    • US10050994
    • 2002-01-22
    • Jim HunterChris GudemanDavid T. AmmAkira Tomita
    • Jim HunterChris GudemanDavid T. AmmAkira Tomita
    • G02B5/18
    • G02B26/0808
    • A grating light valve is provided with a plurality of spaced reflective ribbons, spatially arranged over a semiconductor substrate, the ribbons and substrate being provided with reflective surfaces. The grating light valve is configured to optimize the conditions for constructive and destructive interference with an incident light source having a given wavelength. In a preferred embodiment, one set of ribbons is moveable with respect to the substrate and the second set of ribbons. The substrate is typically provided with a protective layer, which may be thermally grown silicon dioxide or other dielectric. A conductive trace is provided on the dielectric layer and grounded through the dielectric layer to the substrate, comprising a conductive trace for easy release of charge otherwise trapped on or at the dielectric layer.
    • 光栅光阀设置有多个间隔开的反射带,空间上布置在半导体衬底上,带和衬底设置有反射表面。 光栅光阀被配置为优化具有给定波长的入射光源的结构性和相消干涉的条件。 在优选实施例中,一组带可相对于基底和第二组带移动。 衬底通常设置有保护层,其可以是热生长二氧化硅或其它电介质。 在电介质层上提供导电迹线,并通过电介质层与衬底接地,该导电迹线包括导电迹线,以便容易地释放否则被捕获在电介质层上或电介质层上的电荷。