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1. 发明申请

US20100321856A1 METHOD OF PLATEN FABRICATION TO ALLOW ELECTRODE PATTERN AND GAS COOLING OPTIMIZATION 失效
标题翻译：制造电极图案和气体冷却优化的方法
公开(公告)号：US20100321856A1
公开(公告)日：2010-12-23
申请号：US12487075
申请日：2009-06-18
申请人： Scott E. Peitzsch
发明人： Scott E. Peitzsch
IPC分类号： H02N13/00 , B32B3/10
CPC分类号： H02N13/00 , H01L21/6831 , Y10T428/24322
摘要： An electrode pattern and layered assembly is disclosed. This assembly utilizes multiple-piece construction, including at least two electrically conductive layers and at least three electrically insulating layers. By incorporating a second electrically conductive layer, each electrode can be divided into two or more separate portions on the top layer, and joined together using the second conductive layer. Connections between the two conductive layers can be made using any suitable technique, including through-hole vias, conductive rods and the like. The use of a second electrically conductive layer also allows for a different gas distribution strategy. The use of multiple conductive layers allows the use of one or more concentric channels to be used through which the gas can be injected.
摘要翻译：公开了电极图案和分层组件。该组件利用多片构造，包括至少两个导电层和至少三个电绝缘层。通过结合第二导电层，每个电极可以在顶层上分成两个或更多个分开的部分，并且使用第二导电层连接在一起。两个导电层之间的连接可以使用任何合适的技术制造，包括通孔通孔，导电棒等。使用第二导电层还允许不同的气体分布策略。使用多个导电层允许使用一个或多个同心通道，通过该通道可以注入气体。

2. 发明授权

US08004817B2 Method of platen fabrication to allow electrode pattern and gas cooling optimization 失效
标题翻译：压板制造方法允许电极图案和气体冷却优化
公开(公告)号：US08004817B2
公开(公告)日：2011-08-23
申请号：US12487075
申请日：2009-06-18
申请人： Scott E. Peitzsch
发明人： Scott E. Peitzsch
IPC分类号： H01T23/00
CPC分类号： H02N13/00 , H01L21/6831 , Y10T428/24322
摘要： An electrode pattern and layered assembly is disclosed. This assembly utilizes multiple-piece construction, including at least two electrically conductive layers and at least three electrically insulating layers. By incorporating a second electrically conductive layer, each electrode can be divided into two or more separate portions on the top layer, and joined together using the second conductive layer. Connections between the two conductive layers can be made using any suitable technique, including through-hole vias, conductive rods and the like. The use of a second electrically conductive layer also allows for a different gas distribution strategy. The use of multiple conductive layers allows the use of one or more concentric channels to be used through which the gas can be injected.
摘要翻译：公开了电极图案和分层组件。该组件利用多片构造，包括至少两个导电层和至少三个电绝缘层。通过结合第二导电层，每个电极可以在顶层上分成两个或更多个分开的部分，并且使用第二导电层连接在一起。两个导电层之间的连接可以使用任何合适的技术制造，包括通孔通孔，导电棒等。使用第二导电层还允许不同的气体分布策略。使用多个导电层允许使用一个或多个同心通道，通过该通道可以注入气体。

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