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1. 发明授权

US08424380B2 Flow sensors having nanoscale coating for corrosion resistance 有权
标题翻译：流量传感器具有耐腐蚀性能的纳米级涂层
公开(公告)号：US08424380B2
公开(公告)日：2013-04-23
申请号：US13434803
申请日：2012-03-29
申请人： Scott E Beck , Paul P Bey , Jamie Speldrich , Mohammed A. Javvad Qasimi
发明人： Scott E Beck , Paul P Bey , Jamie Speldrich , Mohammed A. Javvad Qasimi
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , H01L23/3142 , H01L23/3192 , H01L24/05 , H01L24/06 , H01L24/45 , H01L24/48 , H01L24/49 , H01L2224/05599 , H01L2224/45144 , H01L2224/48227 , H01L2224/48599 , H01L2224/49171 , H01L2924/00014 , H01L2924/01013 , H01L2924/01014 , H01L2924/01022 , H01L2924/01029 , H01L2924/0105 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/04941 , H01L2924/14 , H01L2924/1461 , Y10T29/49002 , H01L2924/00
摘要： A corrosion resistant flow sensor apparatus includes a flow sensor including a micromachinable substrate mounted on a package substrate that includes electrically conductive traces and substrate bond pads. The flow sensor includes a MEMS sensing structure for sensing a mass flow parameter and sensor bond pads coupled to the sensing structure. The sensor bond pads include a top metal layer on a metal diffusion barrier layer including a metal diffusion barrier layer sidewall. Bond wires couple the sensor bond pads to the substrate bond pads. A housing including sides and a top portion is around the flow sensor and includes a flow channel having an inlet and an outlet. A multi-layer corrosion protection coating includes a nm scale adhesion layer and a self assembled monolayer (SAM) is on the adhesion layer. The protection coating covers the sensor bond pads including the metal diffusion barrier layer sidewall.
摘要翻译：耐腐蚀流量传感器装置包括流量传感器，其包括安装在包括导电迹线和衬底接合焊盘的封装衬底上的可微加工衬底。流量传感器包括用于感测质量流量参数的MEMS感测结构和耦合到感测结构的传感器接合垫。传感器接合焊盘包括在包括金属扩散阻挡层侧壁的金属扩散阻挡层上的顶部金属层。接合线将传感器接合焊盘连接到衬底接合焊盘。包括侧面和顶部的壳体围绕流量传感器并且包括具有入口和出口的流动通道。多层防腐涂层包括纳米级粘附层，粘合层上自组装单层（SAM）。保护涂层覆盖包括金属扩散阻挡层侧壁的传感器接合焊盘。

2. 发明授权

US08161811B2 Flow sensors having nanoscale coating for corrosion resistance 有权
标题翻译：流量传感器具有耐腐蚀性能的纳米级涂层
公开(公告)号：US08161811B2
公开(公告)日：2012-04-24
申请号：US12641460
申请日：2009-12-18
申请人： Scott E. Beck , Paul P. Bey , Jamie Speldrich , Mohammed A. Javvad Qasimi
发明人： Scott E. Beck , Paul P. Bey , Jamie Speldrich , Mohammed A. Javvad Qasimi
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , H01L23/3142 , H01L23/3192 , H01L24/05 , H01L24/06 , H01L24/45 , H01L24/48 , H01L24/49 , H01L2224/05599 , H01L2224/45144 , H01L2224/48227 , H01L2224/48599 , H01L2224/49171 , H01L2924/00014 , H01L2924/01013 , H01L2924/01014 , H01L2924/01022 , H01L2924/01029 , H01L2924/0105 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/04941 , H01L2924/14 , H01L2924/1461 , Y10T29/49002 , H01L2924/00
摘要： A corrosion resistant flow sensor apparatus includes a flow sensor including a micromachinable substrate mounted on a package substrate that includes electrically conductive traces and substrate bond pads. The flow sensor includes a MEMS sensing structure for sensing a mass flow parameter and sensor bond pads coupled to the sensing structure. The sensor bond pads include a top metal layer on a metal diffusion barrier layer including a metal diffusion barrier layer sidewall. Bond wires couple the sensor bond pads to the substrate bond pads. A housing including sides and a top portion is around the flow sensor and includes a flow channel having an inlet and an outlet. A multi-layer corrosion protection coating includes a nm scale adhesion layer and a self assembled monolayer (SAM) is on the adhesion layer. The protection coating covers the sensor bond pads including the metal diffusion barrier layer sidewall.
摘要翻译：耐腐蚀流量传感器装置包括流量传感器，其包括安装在包括导电迹线和衬底接合焊盘的封装衬底上的可微加工衬底。流量传感器包括用于感测质量流量参数的MEMS感测结构和耦合到感测结构的传感器接合垫。传感器接合焊盘包括在包括金属扩散阻挡层侧壁的金属扩散阻挡层上的顶部金属层。接合线将传感器接合焊盘连接到衬底接合焊盘。包括侧面和顶部的壳体围绕流量传感器并且包括具有入口和出口的流动通道。多层防腐涂层包括纳米级粘附层，粘合层上自组装单层（SAM）。保护涂层覆盖包括金属扩散阻挡层侧壁的传感器接合焊盘。

3. 发明授权

US08931338B2 Flow sensor with bypass taps in laminar flow element laminarizing channel 有权
标题翻译：流量传感器在层流元件层流通道中具有旁路抽头
公开(公告)号：US08931338B2
公开(公告)日：2015-01-13
申请号：US13596878
申请日：2012-08-28
申请人： Jamie Speldrich
发明人： Jamie Speldrich
IPC分类号： G01F1/68 , F17D1/00
CPC分类号： F17D1/00 , F15D1/001 , G01F1/6842 , G01F5/00 , G01F15/00 , Y10T137/87265 , Y10T137/87539
摘要： A flow sensor includes a main flow body, a laminar flow element, a first bypass tap, and a second flow element sensor tap. The main flow body has a first main flow port, a second main flow port, a main flow channel, a first bypass tap, a second bypass tap, and a bypass flow channel. The laminar flow element is disposed within the main flow channel. The bypass flow channel has a cross sectional area, and the first bypass tap and the second bypass tap each have a cross sectional area that is greater than the maximum cross sectional area of the bypass flow channel.
摘要翻译：流量传感器包括主流体，层流元件，第一旁通分接头和第二流体元件传感器分接头。主流体具有第一主流路，第二主流道，主流路，第一旁通管，第二旁通管和旁通流路。层流元件设置在主流动通道内。旁通流动通道具有横截面积，并且第一旁通分流器和第二旁通分接头各自具有大于旁路流动通道的最大横截面面积的横截面面积。

4. 发明授权

US08756990B2 Molded flow restrictor 有权
标题翻译：成型流量限制器
公开(公告)号：US08756990B2
公开(公告)日：2014-06-24
申请号：US13074932
申请日：2011-03-29
申请人： Jamie Speldrich
发明人： Jamie Speldrich
IPC分类号： G01F15/14
CPC分类号： G01F1/6842 , B29C45/0025 , B29C45/2628 , G01F5/00 , G01F5/005
摘要： The present disclosure relates generally to flow sensors, and more particularly, to devices and methods for providing a pressure drop through a flow sensor at a given flow rate. In one illustrative embodiment, a sensor assembly includes a housing with a first flow port and a second flow port. The housing may define a fluid channel extending between the first flow port and the second flow port, with a sensor positioned in the housing and exposed to the fluid channel. The illustrative sensor may be configured to sense a measure related to the flow rate of a fluid flowing through the fluid channel. A flow restrictor may be situated in and integrally molded with at least one of the first flow port and the second flow port. The flow restrictor may be configured to accurately provide a pressure drop through the flow sensor at a given flow rate.
摘要翻译：本公开一般涉及流量传感器，更具体地，涉及用于以给定流量通过流量传感器提供压降的装置和方法。在一个说明性实施例中，传感器组件包括具有第一流动端口和第二流动端口的壳体。壳体可以限定在第一流动端口和第二流动端口之间延伸的流体通道，传感器定位在壳体中并暴露于流体通道。说明性传感器可以被配置为感测与流过流体通道的流体的流量相关的测量。限流器可以位于第一流动端口和第二流动端口中的至少一个上并与其一体地模制。流量限制器可以被配置为以给定的流速精确地提供通过流量传感器的压降。

5. 发明申请

US20110226053A1 FLOW SENSOR ASSEMBLY WITH POROUS INSERT 有权
标题翻译：流量传感器组件与多孔插件
公开(公告)号：US20110226053A1
公开(公告)日：2011-09-22
申请号：US12729145
申请日：2010-03-22
申请人： Richard C. Sorenson , Mohammad Abdul Javvad Qasimi , Jamie Speldrich
发明人： Richard C. Sorenson , Mohammad Abdul Javvad Qasimi , Jamie Speldrich
IPC分类号： G01F1/688
CPC分类号： G01F1/36 , B01D17/10 , G01F1/40 , G01F1/684 , G01F1/6842 , G01F15/125
摘要： The present disclosure relates generally to flow sensors, and more particularly, to methods and devices for reducing variations in fluid flow across the flow sensor for increased accuracy and/or reliability. In one illustrative embodiment, a flow sensor assembly includes a housing with an inlet flow port and an outlet flow port. The housing defines a fluid channel extending between the inlet flow port and the outlet flow port, with a flow sensor positioned in the housing and exposed to the fluid channel. The flow sensor is configured to sense a measure related to the flow rate of a fluid flowing through the fluid channel. A porous insert is situated in the fluid channel, sometimes upstream of the flow sensor. When so configured, and during operation of the flow sensor assembly, a fluid may pass through the inlet flow port, through the porous insert, across the flow sensor, and through the outlet flow port. The porous insert may include pores that are configured to reduce the turbulence in the fluid passing the flow sensor.
摘要翻译：本公开一般涉及流量传感器，更具体地，涉及用于减少横跨流量传感器的流体流动的变化以提高精度和/或可靠性的方法和装置。在一个示例性实施例中，流量传感器组件包括具有入口流动端口和出口流动端口的壳体。壳体限定在入口流动端口和出口流动端口之间延伸的流体通道，其中流量传感器定位在壳体中并暴露于流体通道。流量传感器被配置为感测与流过流体通道的流体的流量相关的测量。多孔插入件位于流体通道中，有时位于流量传感器的上游。当这样构造并且在流量传感器组件的操作期间，流体可以穿过入口流动端口，穿过多孔插入物，穿过流量传感器，并且通过出口流动端口。多孔插入件可以包括被配置为减少通过流量传感器的流体中的湍流的孔。

6. 发明申请

US20110226052A1 SENSOR ASSEMBLY WITH HYDROPHOBIC FILTER 有权
标题翻译：传感器总成与疏水过滤器
公开(公告)号：US20110226052A1
公开(公告)日：2011-09-22
申请号：US12729173
申请日：2010-03-22
申请人： Jamie Speldrich , Scott Edward Beck , Phil Foster , Ru Wang
发明人： Jamie Speldrich , Scott Edward Beck , Phil Foster , Ru Wang
IPC分类号： G01F1/688
CPC分类号： G01F15/125 , B01D17/10 , G01F1/36 , G01F1/40 , G01F1/684 , G01F1/6842
摘要： The present disclosure relates generally to sensors, and more particularly, to methods and devices for reducing moisture, dust, particulate matter, and/or other contaminates entering a sensor. In one illustrative embodiment, a sensor assembly includes a housing with an inlet flow port and an outlet flow port. The housing defines a fluid channel extending between the inlet flow port and the outlet flow port, with a sensor positioned in the housing and exposed to the fluid channel. The illustrative sensor is configured to sense a measure related to the flow rate of a fluid flowing through the fluid channel. A hydrophobic filter may be situated in the fluid channel, sometimes upstream of the sensor. When so configured, and during operation of the sensor assembly, a fluid may pass through the inlet flow port, through the hydrophobic filter, across the sensor, and through the outlet flow port. The hydrophobic filter may be configured to reduce the moisture entering the fluid channel of the sensor.
摘要翻译：本公开一般涉及传感器，更具体地，涉及用于减少进入传感器的湿气，灰尘，颗粒物质和/或其它污染物的方法和装置。在一个说明性实施例中，传感器组件包括具有入口流动端口和出口流动端口的壳体。壳体限定在入口流动端口和出口流动端口之间延伸的流体通道，传感器定位在壳体中并暴露于流体通道。说明性传感器被配置为感测与流过流体通道的流体的流量相关的测量。疏水过滤器可以位于流体通道中，有时位于传感器的上游。当这样构造并且在传感器组件的操作期间，流体可以穿过入口流动端口，穿过疏水过滤器，穿过传感器，并且通过出口流动端口。疏水过滤器可以被配置为减少进入传感器的流体通道的湿气。

7. 发明授权

US07631562B1 Mass-flow sensor with a molded flow restrictor 失效
标题翻译：质量流量传感器具有模制流量限制器
公开(公告)号：US07631562B1
公开(公告)日：2009-12-15
申请号：US12193976
申请日：2008-08-19
申请人： Jamie Speldrich
发明人： Jamie Speldrich
IPC分类号： G01F1/37
CPC分类号： G01F15/14 , G01F1/68 , G01F15/00 , G01F15/185
摘要： A high mass-flow sensing apparatus and method of forming the same, comprising a flow tube bypassed in a flow path defined by a flow channel, through which a fluid flows. A flow sensor can be disposed in the flow tube for measuring a flow rate of the fluid in the flow channel. A set of narrow rectangular flow restrictors can be molded into the flow tube and adjacent to the flow sensor. Each flow restrictor can include several rectangular cutouts that are molded into upstream and/or downstream portions of the flow tube in order to limit the flow rate of the fluid across the flow sensor. The flow restrictors can laminarize the flow rate of the fluid in the flow tube and thereby reduce flow turbulence and lead to optimal sensing performance of the flow sensor.
摘要翻译：一种高质量流量感测装置及其形成方法，包括在由流路限定的流路中旁路的流管，流体流过该流路。流量传感器可以设置在流管中，用于测量流动通道中流体的流量。一组窄矩形流量限制器可以模制到流管中并与流量传感器相邻。每个限流器可以包括模制到流管的上游和/或下游部分中的几个矩形切口，以便限制流体流过流量传感器的流速。流量限制器可以使流量管中流体的流速分层，从而减少流动湍流并导致流量传感器的最佳感测性能。

8. 发明授权

US08826731B2 Flow sensor with bypass taps in laminarizing channel and flow restrictor in a bypass channel 有权
标题翻译：流量传感器在旁路通道中具有旁路抽头和旁通通道中的限流器
公开(公告)号：US08826731B2
公开(公告)日：2014-09-09
申请号：US13596766
申请日：2012-08-28
申请人： Jamie Speldrich , Andrew Joseph Milley , Richard Charles Sorenson
发明人： Jamie Speldrich , Andrew Joseph Milley , Richard Charles Sorenson
IPC分类号： G01F1/68 , F17D1/00
CPC分类号： F17D1/00 , F15D1/001 , G01F1/6842 , G01F5/00 , G01F15/00 , Y10T137/87265 , Y10T137/87539
摘要： A flow sensor includes a main flow body, a laminar flow element, a first main flow body sensor tap, a second main flow body sensor tap, and a bypass flow body. The bypass flow body is coupled to the main flow body and has a first bypass flow port, a second bypass flow port, and a bypass flow channel between the first and second bypass flow ports. The flow restrictor is disposed within the bypass flow channel.
摘要翻译：流量传感器包括主流体，层流元件，第一主流体传感器抽头，第二主流体传感器抽头和旁通流体。旁通流动体连接到主流体并且具有在第一和第二旁通流动口之间的第一旁通流动口，第二旁通流动口和旁通流动通道。流量限制器设置在旁通流动通道内。

9. 发明申请

US20130098486A1 FLOW SENSOR WITH BYPASS TAPS IN LAMINARIZING CHANNEL AND FLOW RESTRICTOR IN A BPYASS CHANNEL 有权
标题翻译： BPYASS通道中的层流通道和流量限制器的旁路流量传感器
公开(公告)号：US20130098486A1
公开(公告)日：2013-04-25
申请号：US13596766
申请日：2012-08-28
申请人： Jamie Speldrich , Andrew Joseph Milley , Richard Charles Sorenson
发明人： Jamie Speldrich , Andrew Joseph Milley , Richard Charles Sorenson
IPC分类号： F17D1/20
CPC分类号： F17D1/00 , F15D1/001 , G01F1/6842 , G01F5/00 , G01F15/00 , Y10T137/87265 , Y10T137/87539
摘要： A flow sensor includes a main flow body, a laminar flow element, a first main flow body sensor tap, a second main flow body sensor tap, and a bypass flow body. The bypass flow body is coupled to the main flow body and has a first bypass flow port, a second bypass flow port, and a bypass flow channel between the first and second bypass flow ports. The flow restrictor is disposed within the bypass flow channel.
摘要翻译：流量传感器包括主流体，层流元件，第一主流体传感器抽头，第二主流体传感器抽头和旁通流体。旁通流动体连接到主流体并且具有在第一和第二旁通流动口之间的第一旁通流动口，第二旁通流动口和旁通流动通道。流量限制器设置在旁通流动通道内。

10. 发明授权

US08397586B2 Flow sensor assembly with porous insert 有权
标题翻译：带多孔插件的流量传感器组件
公开(公告)号：US08397586B2
公开(公告)日：2013-03-19
申请号：US12729145
申请日：2010-03-22
申请人： Richard C. Sorenson , Mohammad Abdul Javvad Qasimi , Jamie Speldrich
发明人： Richard C. Sorenson , Mohammad Abdul Javvad Qasimi , Jamie Speldrich
IPC分类号： G01F1/37 , G01F1/68
CPC分类号： G01F1/36 , B01D17/10 , G01F1/40 , G01F1/684 , G01F1/6842 , G01F15/125
摘要： The present disclosure relates generally to flow sensors, and more particularly, to methods and devices for reducing variations in fluid flow across the flow sensor for increased accuracy and/or reliability. In one illustrative embodiment, a flow sensor assembly includes a housing with an inlet flow port and an outlet flow port. The housing defines a fluid channel extending between the inlet flow port and the outlet flow port, with a flow sensor positioned in the housing and exposed to the fluid channel. The flow sensor is configured to sense a measure related to the flow rate of a fluid flowing through the fluid channel. A porous insert is situated in the fluid channel, sometimes upstream of the flow sensor. When so configured, and during operation of the flow sensor assembly, a fluid may pass through the inlet flow port, through the porous insert, across the flow sensor, and through the outlet flow port. The porous insert may include pores that are configured to reduce the turbulence in the fluid passing the flow sensor.
摘要翻译：本公开一般涉及流量传感器，更具体地，涉及用于减少横跨流量传感器的流体流动的变化以提高精度和/或可靠性的方法和装置。在一个示例性实施例中，流量传感器组件包括具有入口流动端口和出口流动端口的壳体。壳体限定在入口流动端口和出口流动端口之间延伸的流体通道，其中流量传感器定位在壳体中并暴露于流体通道。流量传感器被配置为感测与流过流体通道的流体的流量相关的测量。多孔插入件位于流体通道中，有时位于流量传感器的上游。当这样构造并且在流量传感器组件的操作期间，流体可以穿过入口流动端口，穿过多孔插入物，穿过流量传感器，并且通过出口流动端口。多孔插入件可以包括被配置为减少通过流量传感器的流体中的湍流的孔。

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