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    • 2. 发明授权
    • Positive-working photosensitive composition and process for image
formation
    • 正性感光组合物和成像方法
    • US5958646A
    • 1999-09-28
    • US569316
    • 1995-12-08
    • Koichi KawamuraSatoshi TakitaKeiji AkiyamaYoshitaka Kawamura
    • Koichi KawamuraSatoshi TakitaKeiji AkiyamaYoshitaka Kawamura
    • G03F7/022G03F7/00G03F7/023G03F7/033G03F7/039G03F7/30H01L21/027G03C1/52
    • G03F7/0233
    • Disclosed are (i) a positive-working photosensitive composition containing (a) a polymer having at least 60 mol % structural units represented by formula (1): ##STR1## wherein A represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 4 carbon atoms; X represents --CO-- or --SO.sub.2 --; Y represents --CO--R.sub.1 or --SO.sub.2 --R.sub.1, where R.sub.1 represents an alkyl group, a substituted alkyl group wherein the substituent on the substituted alkyl group is a halogen atom, an aryl group, an amido group, an alkoxy group or an alkoxycarbonyl group, an unsubstituted aromatic group, or a substituted aromatic group wherein the substituent on the substituted aromatic group is a halogen atom, an alkyl group, an alkoxy group having 1 to 10 carbon atoms, an amido group or an aryl group, provided that at least one of X and Y contains --SO.sub.2 --and (b) a o-naphthoquinone diazide, and (ii) a process for image formation which comprises image-wise exposing to light a photosensitive material having a photosensitive layer comprising the positive-working photosensitive composition and then developing the resulting photosensitive material with an aqueous alkali solution having a pH of 12.5 or below.
    • 公开了(i)正性光敏组合物,其含有(a)具有式(1)表示的至少60摩尔%结构单元的聚合物:其中A表示氢原子,卤素原子或具有1〜 4个碳原子; X表示-CO-或-SO 2 - ; Y表示-CO-R1或-SO2-R1,其中R1表示烷基,取代烷基上的取代基为卤素原子,芳基,酰胺基,烷氧基或烷氧基羰基的取代烷基 基团,取代芳基或取代芳基,其中取代芳基上的取代基为卤素原子,烷基,具有1-10个碳原子的烷氧基,酰胺基或芳基,条件是在 X和Y中的至少一个含有-SO 2 - 和(b)邻萘醌二叠氮,以及(ii)图像形成方法,其包括使具有感光层的感光材料成像曝光于光敏层,所述光敏材料包含正性感光层 然后用pH为12.5以下的碱性水溶液显影所得的感光材料。
    • 3. 发明申请
    • POSITIVE PHOTOSENSITIVE RESIN COMPOSITION AND METHOD FOR FORMING CURED FILM USING THE SAME
    • 正型感光树脂组合物和使用其形成固化膜的方法
    • US20100173246A1
    • 2010-07-08
    • US12663016
    • 2008-06-05
    • Satoshi Takita
    • Satoshi Takita
    • G03F7/004G03F7/20
    • G03F7/0392C08F220/28G03F7/0045G03F7/40
    • The present invention provides a positive photosensitive resin composition including: a resin containing a specific acrylic acid-based constituent unit capable of undergoing dissociation of an acid-dissociable group to produce a carboxyl group, and a constituent unit having a functional group capable of reacting with the carboxyl group to form a covalent bond, the resin being alkali-insoluble or sparingly alkali-soluble and becoming alkali-soluble when the acid-dissociable group dissociates; and a compound capable of generating an acid upon irradiation with an actinic ray or radiation. The present invention also provides a method for forming a cured film using the composition. The positive photosensitive composition is excellent in the sensitivity, film residual ratio and storage stability and by the method for forming a cured film using the positive photosensitive resin composition, a cured film excellent in the heat resistance, adhesion, transmittance and the like can be provided.
    • 本发明提供一种正型感光性树脂组合物,其包含:含有能够分解酸解离基而产生羧基的特定丙烯酸系构成单元的树脂,以及具有能够与 羧基形成共价键,当酸解离基解离时,该树脂是碱不溶性或微溶碱性的并变成碱溶性的; 以及能够在用光化射线或辐射照射时能够产生酸的化合物。 本发明还提供了使用该组合物形成固化膜的方法。 正性感光性组合物的灵敏度,膜残留率和保存稳定性优异,通过使用正型感光性树脂组合物的固化膜的形成方法,可以提供耐热性,粘合性,透射率等优异的固化膜 。
    • 10. 发明授权
    • Positive photosensitive composition
    • 正光敏组合物
    • US06037098A
    • 2000-03-14
    • US50007
    • 1998-03-30
    • Toshiaki AoaiSatoshi Takita
    • Toshiaki AoaiSatoshi Takita
    • C08F2/50G03F7/004
    • G03F7/0045Y10S430/115Y10S430/122Y10S430/123
    • Provided is a positive photosensitive composition which has high photosensitivity, is capable of giving an excellent resist pattern, and changes little with time after exposure. The positive photosensitive composition comprises a resin having group(s) capable of decomposing by the action of an acid to enhance solubility of the resin in an alkaline developing solution and a compound represented by formula (Ia) or (Ib) which is capable of generating a sulfonic acid upon irradiation with actinic rays or a radiation: ##STR1## wherein R.sub.1 to R.sub.3 each represents a hydrogen atom, an alkyl group, a cycloalkyl group, an alkoxy group, a hydroxy group, a halogen atom, or a group represented by --S--R.sub.4, where R.sub.4 represents an alkyl group or an aryl group; X.sup.- represents the specific anion of a benzenesulfonic, naphthalenesulfonic, or anthracenesulfonic acid; and l, m, and n represents an integer of 1 to 3.
    • 提供了具有高光敏性的正光敏组合物,能够赋予优异的抗蚀剂图案,并且在曝光后随时间变化很小。 正型光敏组合物包括具有能够通过酸的作用分解的基团的树脂,以增强树脂在碱性显影液中的溶解度和由式(Ia)或(Ib)表示的化合物,其能够产生 在用光化射线照射时的磺酸或辐射:其中R1至R3各自表示氢原子,烷基,环烷基,烷氧基,羟基,卤素原子或由-S- R4,其中R4表示烷基或芳基; X-表示苯磺酸,萘磺酸或蒽磺酸的特定阴离子; 和l,m,n表示1〜3的整数。