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    • 1. 发明申请
    • Expansion-type reflection mirror
    • 膨胀型反射镜
    • US20060181788A1
    • 2006-08-17
    • US10541524
    • 2004-09-09
    • Satoshi HaradaAkira MeguroHironori IshikawaSatoru Ozawa
    • Satoshi HaradaAkira MeguroHironori IshikawaSatoru Ozawa
    • G02B5/08
    • G02B7/183H01Q1/288H01Q15/162
    • A deployable reflector of the invention includes connection members that bridge plural extendable structures constituting a deployable truss structure and connect portions corresponding to nodes of a buckling mode occurring in the extendable structures when a surface cable system is given tension, with portions corresponding to antinodes thereof. The surface cable system includes an internal surface cable system and a circumferential surface cable system connected to the outer circumference thereof. A cable used for the internal surface cable system is high in stiffness and small in ratio of length variation to tension variation. A cable used for the circumferential surface cable system is lower in stiffness and smaller in ratio of the tension variation to the length variation than that used for the internal surface cable system. Given tension by the deployable truss structure via the circumferential surface cable system, the internal surface cable system forms predetermined surface shape.
    • 本发明的可部署的反射器包括连接构件,其连接构成可展开的桁架结构的多个可延伸结构,并且当表面电缆系统被施加张力时,连接对应于在可延伸结构中发生的屈曲模式的节点的部分,其中对应于其波腹的部分。 表面电缆系统包括内表面电缆系统和连接到其外圆周的圆周表面电缆系统。 用于内表面电缆系统的电缆的刚度高,长度变化与张力变化的比例小。 用于圆周表面电缆系统的电缆的刚度较低,并且张力变化与长度变化的比值比内表面电缆系统使用的电缆的频率更小。 通过可展开的桁架结构经由周面电缆系统给予张力,内表面电缆系统形成预定的表面形状。
    • 2. 发明授权
    • Deployable reflector
    • 可部署的反射器
    • US07216995B2
    • 2007-05-15
    • US10541524
    • 2004-09-09
    • Satoshi HaradaAkira MeguroHironori IshikawaSatoru Ozawa
    • Satoshi HaradaAkira MeguroHironori IshikawaSatoru Ozawa
    • G02B5/08H01Q15/20
    • G02B7/183H01Q1/288H01Q15/162
    • A deployable reflector of the invention includes connection members that bridge plural extendable structures constituting a deployable truss structure and connect portions corresponding to nodes of a buckling mode occurring in the extendable structures when a surface cable system is given tension, with portions corresponding to antinodes thereof. The surface cable system includes an internal surface cable system and a circumferential surface cable system connected to the outer circumference thereof. A cable used for the internal surface cable system is high in stiffness and small in ratio of length variation to tension variation. A cable used for the circumferential surface cable system is lower in stiffness and smaller in ratio of the tension variation to the length variation than that used for the internal surface cable system. Given tension by the deployable truss structure via the circumferential surface cable system, the internal surface cable system forms predetermined surface shape.
    • 本发明的可部署的反射器包括连接构件,其连接构成可展开的桁架结构的多个可延伸结构,并且当表面电缆系统被施加张力时,连接对应于在可延伸结构中发生的屈曲模式的节点的部分,其中对应于其波腹的部分。 表面电缆系统包括内表面电缆系统和连接到其外圆周的圆周表面电缆系统。 用于内表面电缆系统的电缆的刚度高,长度变化与张力变化的比例小。 用于圆周表面电缆系统的电缆的刚度较低,并且张力变化与长度变化的比值比内表面电缆系统使用的电缆的频率更小。 通过可展开的桁架结构经由周面电缆系统给予张力,内表面电缆系统形成预定的表面形状。
    • 6. 发明授权
    • Plasma processing method, detecting method of completion of seasoning, plasma processing apparatus and storage medium
    • 等离子体处理方法,完成调味料的检测方法,等离子体处理装置和储存介质
    • US07313451B2
    • 2007-12-25
    • US10937905
    • 2004-09-10
    • Naoki TakayamaBin WangSatoshi Harada
    • Naoki TakayamaBin WangSatoshi Harada
    • G06F17/00
    • H01L21/67253
    • With analysis data in the prior art, it is difficult to find out if a change regarded as a judgmental standard of the completion of seasoning has come from a change due to the seasoning, namely, change in condition of the interior of a processing container or come from another change based on a temperature change among respective dummy wafers and furthermore, it is difficult to judge whether the seasoning has been completed or not. Therefore, a plasma processing method of the present invention, which is a method for detecting the completion of seasoning in performing the seasoning by loading dummy wafers W into a processing container 2 of a plasma processing apparatus 1, includes a process of creating a predictive formula for predicting the completion of seasoning and another process of detecting the completion of seasoning in performing the seasoning, based on the predictive formula. The creation of the predictive formula is accomplished by performing a multivariate analysis against a plurality of measured data that can be obtained by first supplying dummy wafers W into the processing container 2, cooling down the interior of the processing container 2 and supplying a plurality of dummy wafers W into the processing container 2 again.
    • 通过现有技术的分析数据,难以确定作为调味品完成的判断标准的变化是否来自调味品的变化,即处理容器的内部状况的变化或 来自基于各个虚拟晶片之间的温度变化的另一变化,此外,难以判断调味是否已经完成。 因此,本发明的等离子体处理方法是通过将虚拟晶片W装载到等离子体处理装置1的处理容器2中来进行调味的完成调查的方法,包括:生成预测式 根据预测公式预测调味料的完成情况和进行调味料调查完成情况的另一个过程。 通过对多个测量数据执行多变量分析来实现预测公式的创建,该多个测量数据可以通过首先将虚拟晶片W提供到处理容器2中,冷却处理容器2的内部并提供多个虚拟 晶片W再次进入处理容器2。
    • 9. 发明申请
    • Method and apparatus for evaluating processing apparatus status and predicting processing result
    • 用于评估处理装置状态和预测处理结果的方法和装置
    • US20050125090A1
    • 2005-06-09
    • US10984932
    • 2004-11-10
    • Shinji SakanoSatoshi Harada
    • Shinji SakanoSatoshi Harada
    • G05B13/04G05B23/02G06F19/00H01L21/3065H01L21/66
    • G05B13/048G05B23/0254H01J37/32862
    • A method for predicting a processing result includes a process of performing a principal component analysis on a plurality of detected data obtained during a first standard processing, to construct a principal component analysis model; a process of obtaining residuals of the principal component analysis model as first residuals; a process of performing a second standard processing; and a process of obtaining a plurality of detected data from a plurality of detectors during the second standard processing. And, the detected data obtained during the second standard processing are applied to the principal component analysis model, to obtain second residuals. The method further includes a process of weighting the second residuals based on weighting references, and constructing a new multivariate analysis model with use of the weighted second residuals; and a process of predicting a processing result of the second standard processing with use of the multivariate analysis model.
    • 一种用于预测处理结果的方法包括对在第一标准处理期间获得的多个检测数据执行主成分分析的过程,以构建主成分分析模型; 获得主成分分析模型残差作为第一残差的过程; 执行第二标准处理的处理; 以及在第二标准处理期间从多个检测器获得多个检测数据的处理。 并且,将在第二标准处理期间获得的检测数据应用于主成分分析模型,以获得第二残差。 该方法还包括基于加权参考来加权第二残差的过程,以及使用加权的第二残差构建新的多变量分析模型; 以及使用多变量分析模型预测第二标准处理的处理结果的处理。