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    • 5. 发明授权
    • Method and apparatus for adjusting characteristics of multi electron source
    • 调整多电子源特性的方法和装置
    • US06958578B1
    • 2005-10-25
    • US10648490
    • 2003-08-27
    • Shuji AokiTakahiro Oguchi
    • Shuji AokiTakahiro Oguchi
    • H01J9/44G09G3/00G09G3/20G09G3/22H01J1/30H01J31/12G09G3/10
    • G09G3/006G09G3/22G09G2320/0285
    • The electron emission characteristics and adjustment times of a multi electron source are made approximately equal with simple processes. A characteristics adjustment method for a multi electron source having a plurality of electron emitting devices disposed on a substrate, comprising the steps of measuring electron emission characteristics of each of the electron emitting devices and setting a characteristics adjustment target value, applying a plurality of characteristics shift voltages having discrete values to some of the electron emitting devices, measuring electron emission characteristics of each of the electron emitting devices, and creating a characteristics adjustment table for each of the characteristics shift voltage values in accordance with change rates of the measured electron emission characteristics, selecting a predetermined characteristics shift voltage value from the plurality of characteristics shift voltage values by referring to the characteristics adjustment table created for each of the electron emitting device and applying the predetermined characteristics shift voltage to the electron emitting device to shift the characteristics toward the characteristics adjustment target value, and monitoring a change in the electron emission characteristics to revise a characteristics shift condition.
    • 使用简单的工艺使多电子源的电子发射特性和调节时间大致相等。 一种具有设置在基板上的多个电子发射器件的多电子源的特性调整方法,包括以下步骤:测量每个电子发射器件的电子发射特性并设置特性调整目标值,施加多个特性偏移 测量每个电子发射器件的电子发射特性,以及根据所测量的电子发射特性的变化率,产生每个特性的电压值的特性调整表, 通过参照为每个电子发射器件产生的特性调整表从多个特性移位电压值中选择预定特性偏移电压值,并将预定特性移位电压施加到电子发射 将特性转移到特性调整目标值的装置,以及监测电子发射特性的变化以修改特性偏移条件。