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1. 发明授权

US08295655B2 Electro-optical modulator 有权
标题翻译：电光调制器
公开(公告)号：US08295655B2
公开(公告)日：2012-10-23
申请号：US12310431
申请日：2007-08-24
申请人： Sasikanth Manipatruni , Qianfan Xu , Michal Lipson
发明人： Sasikanth Manipatruni , Qianfan Xu , Michal Lipson
IPC分类号： G02F1/035
CPC分类号： G02B6/12007 , G02B6/29343 , G02B6/4215 , G02F1/025 , G02F2203/15
摘要： An optical modulator includes a ring resonator with a waveguide adjacent to and optically coupled to the micro-ring resonator. A p-i-n junction is formed about the ring resonator. An optional additional doped region may be formed opposite the waveguide from the ring resonator and when combined with the p-i-n junction forms a nearly closed p-i-n junction about the ring resonator. The ring resonator may be a silicon micro-ring resonator. Multiple different resonant frequency resonators may be coupled to the waveguide along with different detectors to multiplex light on the waveguide. The spectrum of the resonator may be controlled by an applied voltage. A prepulsing device may be used to enhance electrical transitions to enhance the speed of the modulator.
摘要翻译：光调制器包括环形谐振器，其具有与微环谐振器相邻并且光耦合的微波环。围绕环形谐振器形成p-i-n结。可选的附加掺杂区域可以形成为与环形谐振器相对的波导，并且当与p-i-n结结合形成围绕环形谐振器的近似闭合的p-i-n结。环形谐振器可以是硅微环谐振器。多个不同的谐振频率谐振器可以与不同的检测器耦合到波导，以在波导上复用光。谐振器的频谱可以通过施加的电压来控制。可以使用预脉冲装置来增强电转换以提高调制器的速度。

2. 发明申请

US20100098372A1 ELECTRO-OPTICAL MODULATOR 有权
标题翻译：电光调制器
公开(公告)号：US20100098372A1
公开(公告)日：2010-04-22
申请号：US12310431
申请日：2007-08-24
申请人： Sasikanth Manipatruni , Qianfan Xu , Michal Lipson
发明人： Sasikanth Manipatruni , Qianfan Xu , Michal Lipson
IPC分类号： G02F1/025
CPC分类号： G02B6/12007 , G02B6/29343 , G02B6/4215 , G02F1/025 , G02F2203/15
摘要： An optical modulator includes a ring resonator with a waveguide adjacent to and optically coupled to the micro-ring resonator. A p-i-n junction is formed about the ring resonator. An optional additional doped region may be formed opposite the waveguide from the ring resonator and when combined with the p-i-n junction forms a nearly closed p-i-n junction about the ring resonator. The ring resonator may be a silicon micro-ring resonator. Multiple different resonant frequency resonators may be coupled to the waveguide along with different detectors to multiplex light on the waveguide. The spectrum of the resonator may be controlled by an applied voltage. A prepulsing device may be used to enhance electrical transitions to enhance the speed of the modulator.
摘要翻译：光调制器包括环形谐振器，其具有与微环谐振器相邻并且光耦合的微波环。围绕环形谐振器形成p-i-n结。可选的附加掺杂区域可以形成为与环形谐振器相对的波导，并且当与p-i-n结结合形成围绕环形谐振器的近似闭合的p-i-n结。环形谐振器可以是硅微环谐振器。多个不同的谐振频率谐振器可以与不同的检测器耦合到波导，以在波导上复用光。谐振器的频谱可以通过施加的电压来控制。可以使用预脉冲装置来增强电转换以提高调制器的速度。

3. 发明申请

US20130056623A1 ELECTRO-OPTIC MODULATOR STRUCTURES, RELATED METHODS AND APPLICATIONS 有权
标题翻译：电光调制器结构，相关方法和应用
公开(公告)号：US20130056623A1
公开(公告)日：2013-03-07
申请号：US13697866
申请日：2011-05-13
申请人： Michal Lipson , Sasikanth Manipatruni , Long Chen , Kyle Preston
发明人： Michal Lipson , Sasikanth Manipatruni , Long Chen , Kyle Preston
IPC分类号： H01L31/105 , G01J1/04 , H01L31/18
CPC分类号： G02B6/29338 , G02B6/12007 , G02B6/136 , G02B6/29341 , G02B2006/12142 , G02F1/3133 , Y02P70/521
摘要： An electro-optic modulator structure, a method for fabricating the electro-optic modulator structure, a method for operating an electro-optic modulator device that derives from the electro-optic modulator structure and a related communications apparatus that includes the electro-optic modulator structure all are directed towards effecting a comparatively low voltage operation of the electro-optic modulator device predicated upon consideration of optimal charge carrier injection efficiency characteristics of a PIN diode charge carrier injection based micro-ring electro-optic modulator structure as a function of applied bias voltage. To realize the foregoing result, at least in part, the PIN diode charge carrier injection based electro-optic modulator structure includes at least one of a p-doped region and an n-doped region that has a relatively high volume dopant concentration at a surface thereof.
摘要翻译：电光调制器结构，用于制造电光调制器结构的方法，用于操作从电光调制器结构导出的电光调制器装置的方法和包括电光调制器结构的相关通信装置所有这些都旨在实现电光调制器装置的相当低的电压操作，其基于考虑作为施加的偏置电压的基于PIN二极管电荷载流子注入的微环电光调制器结构的最佳电荷载流子注入效率特性。为了实现上述结果，至少部分地基于PIN二极管电荷载流子注入的电光调制器结构包括在表面上具有相对高的体积掺杂剂浓度的p掺杂区域和n掺杂区域中的至少一个其中。

4. 发明授权

US09423605B2 Optomechanical non-reciprocal device 有权
标题翻译：光机械非互易器件
公开(公告)号：US09423605B2
公开(公告)日：2016-08-23
申请号：US13202528
申请日：2010-02-19
申请人： Sasikanth Manipatruni , Michal Lipson , Jacob T. Robinson
发明人： Sasikanth Manipatruni , Michal Lipson , Jacob T. Robinson
IPC分类号： G02B26/00 , G02B6/42 , A61F9/02 , G02B1/00 , H01S3/00
CPC分类号： G02B26/001 , A61F9/022 , A61F9/023 , B81B3/0083 , B81B2201/04 , B81B2201/047 , B81B2203/0118 , B81B2203/0315 , B81C1/0015 , B81C2201/013 , G02B1/005 , G02B6/4209 , G02C7/104 , G02C7/107 , H01S3/005 , H01S3/0064
摘要： There is set forth herein an optomechanical device which can comprise a first mirror and a second mirror forming with the first mirror a cavity. In one aspect the first mirror can be a movable mirror. The optomechanical device can be adapted so that the first mirror is moveable responsively to radiation force.
摘要翻译：这里提出了一种光学机械装置，其可以包括第一反射镜和形成有第一反射镜的第二反射镜的腔。在一个方面，第一镜可以是可移动镜。光学机械装置可以适于使得第一反射镜能够响应于辐射力而移动。

5. 发明申请

US20110293216A1 SEMICONDUCTOR HIGH-SPEED INTEGRATED ELECTRO-OPTIC DEVICES AND METHODS 有权
标题翻译：半导体高速集成电光器件及方法
公开(公告)号：US20110293216A1
公开(公告)日：2011-12-01
申请号：US13049400
申请日：2011-03-16
申请人： Michal Lipson , Sasikanth Manipatruni , Kyle Preston , Bradley Schmidt
发明人： Michal Lipson , Sasikanth Manipatruni , Kyle Preston , Bradley Schmidt
IPC分类号： G02B6/12 , G02B6/132 , G02B6/134 , H01L33/58
CPC分类号： G02B6/43 , G02B6/12 , G02B6/12004 , G02B6/12007 , G02B6/122 , G02B6/13 , G02B6/2938 , G02F1/025 , G02F1/2257 , G02F1/3132 , G02F2001/0152 , G02F2202/06 , G02F2202/103 , G02F2202/104 , G02F2203/15
摘要： Novel integrated electro-optic structures such as modulators and switches and methods for fabrication of the same are disclosed in a variety of embodiments. In an illustrative embodiment, a device includes a substrate with a waveguide and an optical resonator comprising polycrystalline silicon positioned on the substrate. First and second doped semiconducting regions also comprise polycrystalline silicon and are positioned proximate to the first optical resonator. The first optical resonator is communicatively coupled to the waveguide.
摘要翻译：诸如调制器和开关的新型集成电光结构及其制造方法在各种实施例中被公开。在说明性实施例中，器件包括具有波导的衬底和包括位于衬底上的多晶硅的光学谐振器。第一和第二掺杂半导体区域还包括多晶硅并且被定位成靠近第一光学谐振器。第一光学谐振器通信地耦合到波导。

6. 发明申请

US20100158426A1 ELECTRO-OPTIC MODULATOR 有权
标题翻译：电光调制器
公开(公告)号：US20100158426A1
公开(公告)日：2010-06-24
申请号：US12566412
申请日：2009-09-24
申请人： Sasikanth Manipatruni , Michal Lipson
发明人： Sasikanth Manipatruni , Michal Lipson
IPC分类号： G02F1/035
CPC分类号： G02F1/2257 , G02F2001/0152 , G02F2001/212
摘要： A doping profile for a modulator facilitates rapidly changing the carrier density in a waveguide. The carrier density change causes rapid changes in the index of refraction of the waveguide. Example modulators include a ring modulator and a Mach Zender modulator. A charge reciprocating section may be provided to control the amount of injected charge.
摘要翻译：用于调制器的掺杂曲线有助于快速改变波导中的载流子密度。载流子密度变化引起波导折射率的快速变化。示例性调制器包括环形调制器和Mach Zender调制器。可以提供电荷往复部分来控制注入的电荷量。

7. 发明授权

US09389413B2 Optomechanical oscillator network, control and synchronization methods, and applications 有权
标题翻译：机械振荡器网络，控制和同步方法以及应用
公开(公告)号：US09389413B2
公开(公告)日：2016-07-12
申请号：US14130967
申请日：2012-07-06
申请人： Michal Lipson , Paul McEuen , Arthur Barnard , Sasikanth Manipatruni , Mian Zhang , Gustavo Wiederhecker
发明人： Michal Lipson , Paul McEuen , Arthur Barnard , Sasikanth Manipatruni , Mian Zhang , Gustavo Wiederhecker
IPC分类号： G02B26/00 , G02B6/26 , H01S3/10 , H03L7/00 , H03H3/007 , G02B6/293 , H01S3/105 , G02F1/01 , B82Y10/00 , B81B3/00 , H03H9/24
CPC分类号： G02B26/002 , B81B3/0018 , B82Y10/00 , G02B6/26 , G02B6/29338 , G02B26/001 , G02F1/011 , G02F2203/15 , H01S3/105 , H03H3/0072 , H03H9/2447 , H03L7/00
摘要： A synchronizable optomechanical oscillator (OMO) network including at least two dissimilar silicon nitride (Si3N4) optomechanical resonators that can be excited to evolve into self-sustaining optomechanical oscillators (OMOs) coupled only through an optical radiation field. The tunability of the optical coupling between the oscillators enables one to externally control the dynamics and switch between coupled and individual oscillation states.
摘要翻译：包括至少两个不同的氮化硅（Si3N4）光机械谐振器的可同步的光机械振荡器（OMO）网络，其可以被激发以演化成仅通过光辐射场耦合的自维持的机电振荡器（OMO）。振荡器之间的光耦合的可调性使得能够从外部控制动态并在耦合振荡状态和各个振荡状态之间切换。

8. 发明申请

US20140313559A1 OPTOMECHANICAL OSCILLATOR NETWORK, CONTROL AND SYNCHRONIZATION METHODS, AND APPLICATIONS 有权
标题翻译：运动振荡器网络，控制和同步方法及应用
公开(公告)号：US20140313559A1
公开(公告)日：2014-10-23
申请号：US14130967
申请日：2012-07-06
申请人： Michal Lipson , Paul McEuen , Arthur Barnard , Sasikanth Manipatruni , Mian Zhang , Gustavo Wiederhecker
发明人： Michal Lipson , Paul McEuen , Arthur Barnard , Sasikanth Manipatruni , Mian Zhang , Gustavo Wiederhecker
IPC分类号： G02B26/00
CPC分类号： G02B26/002 , B81B3/0018 , B82Y10/00 , G02B6/26 , G02B6/29338 , G02B26/001 , G02F1/011 , G02F2203/15 , H01S3/105 , H03H3/0072 , H03H9/2447 , H03L7/00
摘要： A synchronizable optomechanical oscillator (OMO) network including at least two dissimilar silicon nitride (Si3N4) optomechanical resonators that can be excited to evolve into self-sustaining optomechanical oscillators (OMOs) coupled only through an optical radiation field. The tunability of the optical coupling between the oscillators enables one to externally control the dynamics and switch between coupled and individual oscillation states.
摘要翻译：包括至少两个不同的氮化硅（Si3N4）光机械谐振器的可同步的光机械振荡器（OMO）网络，其可以被激发以演化成仅通过光辐射场耦合的自维持的机电振荡器（OMO）。振荡器之间的光耦合的可调性使得能够从外部控制动态并在耦合振荡状态和各个振荡状态之间切换。

9. 发明授权

US08824036B2 Apparatus and methods for wide temperature range operation of micrometer-scale silicon electro-optic modulators 有权
标题翻译：微米级硅电光调制器的宽温度范围运行的装置和方法
公开(公告)号：US08824036B2
公开(公告)日：2014-09-02
申请号：US13257295
申请日：2010-03-19
申请人： Sasikanth Manipatruni , Rajeev Dokania , Alyssa B. Apsel , Michal Lipson
发明人： Sasikanth Manipatruni , Rajeev Dokania , Alyssa B. Apsel , Michal Lipson
IPC分类号： G02F1/01 , G02F1/03 , G02F1/07 , G02B6/26
CPC分类号： G02F1/011 , G02F2202/105 , G02F2203/15 , G02F2203/21 , G02F2203/60
摘要： A thermally stabilized, high speed, micrometer-scale silicon electro-optic modulator is provided. Methods for maintaining desired temperatures in electro-optic modulators are also provided. The methods can be used to maintain high quality modulation in the presence of thermal variations from the surroundings. Direct current injection into the thermally stabilized electro-optic modulator is used to maintain the modulation performance of the modulator. The direct injected current changes the local temperature of the thermally stabilized electro-optic modulator to maintain its operation over a wide temperature range.
摘要翻译：提供了热稳定的高速微米级硅电光调制器。还提供了用于在电光调制器中保持所需温度的方法。该方法可用于在存在来自周围环境的热变化的情况下保持高质量的调制。使用直流注入热稳定电光调制器来维持调制器的调制性能。直接注入电流改变了热稳定化电光调制器的局部温度，以在宽的温度范围内保持其工作。

10. 发明申请

US20110170821A1 PIN DIODE TUNED MULTIPLE RING WAVEGUIDE RESONANT OPTICAL CAVITY SWITCH AND METHOD 有权
标题翻译： PIN二极管调谐多环波形谐振光学开关和方法
公开(公告)号：US20110170821A1
公开(公告)日：2011-07-14
申请号：US12939482
申请日：2010-11-04
申请人： Michal Lipson , Sasikanth Manipatruni , Hugo Leonardo Rocha de Lira
发明人： Michal Lipson , Sasikanth Manipatruni , Hugo Leonardo Rocha de Lira
IPC分类号： G02F1/295 , H01L21/30
CPC分类号： G02F1/025 , G02F1/3132 , G02F2001/0152 , G02F2203/15
摘要： An optical switch structure and a method for fabricating the optical switch structure provide at least two ring waveguides located and formed supported over a substrate. At least one of the at least two ring waveguides includes at least one PIN diode integral with the ring waveguide as a tuning component for an optical switch device that derives from the optical switch structure. The PIN diode includes different doped silicon slab regions internal to and external to the ring waveguide, and an intrinsic region there between that includes the ring waveguide. The method uses two photolithographic process steps, and also preferably a silicon-on-insulator substrate, to provide the ring waveguides formed of a monocrystalline silicon semiconductor material.
摘要翻译：光开关结构和制造光开关结构的方法提供至少两个环形波导，其位于和形成在衬底上。所述至少两个环形波导中的至少一个包括与所述环形波导成一体的至少一个PIN二极管作为从所述光学开关结构导出的用于光学开关器件的调谐部件。 PIN二极管包括在环形波导内部和外部的不同的掺杂硅片区域，其间包括环形波导的本征区域。该方法使用两个光刻工艺步骤，并且还优选地是绝缘体上硅衬底，以提供由单晶硅半导体材料形成的环形波导。

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