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    • 8. 发明授权
    • Backside alignment apparatus and method
    • 背面对准装置及方法
    • US09188434B2
    • 2015-11-17
    • US13976376
    • 2011-12-20
    • Bing XuYuefei ChenXiang JiaXiaoqing Yang
    • Bing XuYuefei ChenXiang JiaXiaoqing Yang
    • G01B11/00G01B11/26G03F9/00G01N21/35
    • G01B11/26G01N21/35G03F9/7015G03F9/7084G03F9/7088
    • A backside alignment apparatus and method for determining a position relationship between a substrate (6) and a workpiece stage (24). The backside alignment apparatus includes: an illumination apparatus (1) for emanating infrared light; a workpiece stage assembly (2) for supporting and moving the substrate (6); an imaging apparatus (3) for detecting alignment marks and calculating positions of the alignment marks, the alignment marks including a reference plate alignment mark (41) and a backside alignment mark (20); and a reference plate assembly (4) for setting up a relationship between position coordinates of the imaging apparatus (3) and the workpiece stage assembly (2). The illumination apparatus (1) and the imaging apparatus (3) are able to illuminate and align different alignment marks using only one set of illumination apparatus.
    • 一种用于确定基板(6)和工件台(24)之间的位置关系的背面对准装置和方法。 背面对准装置包括:发出红外光的照明装置(1); 用于支撑和移动所述基底(6)的工件台组件(2); 用于检测对准标记并计算对准标记的位置的成像装置(3),所述对准标记包括参考板对准标记(41)和背面对准标记(20); 以及用于设置成像装置(3)的位置坐标与工件台组件(2)之间的关系的参考板组件(4)。 照明装置(1)和成像装置(3)能够仅使用一组照明装置照明和对准不同的对准标记。