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1. 发明申请

US20060237310A1 Interdigitated chemical sensors, and methods of making and using the same 有权
标题翻译：交叉化学传感器，以及制造和使用它们的方法
公开(公告)号：US20060237310A1
公开(公告)日：2006-10-26
申请号：US11115911
申请日：2005-04-26
申请人： Sanjay Patel , Todd Mlsna , Erno Klaasen
发明人： Sanjay Patel , Todd Mlsna , Erno Klaasen
IPC分类号： G01N27/26
CPC分类号： G01N27/226
摘要： The present invention relates to the field of chemical detection. More specifically, the invention provides devices that can detect various target analytes (e.g., chemicals and/or biological materials) present in an environment by adsorption or absorption of the target analyte(s) to or in a chemical sensing material such that an electrical parameter (e.g., capacitance, resistance, etc.) of the chemical sensing material is altered in a manner detectable by circuitry associated with the sensing electrode pair coated with the chemical sensing material. Here, the sensing electrode pair(s) of the devices of the invention are suspended over an inert substrate via one or more posts used to space the electrodes from the substrate.
摘要翻译：本发明涉及化学检测领域。更具体地，本发明提供了可以通过吸附或吸收目标分析物到化学感测材料中或在化学感测材料中来检测存在于环境中的各种目标分析物（例如，化学品和/或生物材料）的装置，使得电参数（例如，电容，电阻等）以与通过化学感测材料涂覆的感测电极对相关联的电路可检测的方式改变。这里，本发明的器件的感测电极对通过用于将电极从衬底放置的一个或多个柱悬置在惰性衬底上。

2. 发明授权

US06316796B1 Single crystal silicon sensor with high aspect ratio and curvilinear structures 失效
标题翻译：具有高纵横比和曲线结构的单晶硅传感器及相关方法
公开(公告)号：US06316796B1
公开(公告)日：2001-11-13
申请号：US08652867
申请日：1996-05-23
申请人： Kurt E. Petersen , Nadim Maluf , Wendell McCulley , John Logan , Erno Klaasen , Jan Mark Noworolski
发明人： Kurt E. Petersen , Nadim Maluf , Wendell McCulley , John Logan , Erno Klaasen , Jan Mark Noworolski
IPC分类号： H01L2720
CPC分类号： G01P15/125 , G01P15/0802 , G01P2015/0814 , Y10S73/01
摘要： In one aspect, the invention provides a semiconductor sensor which includes a first single crystal silicon wafer layer. A single crystal silicon structure is formed in the first wafer layer. The structure includes two oppositely disposed substantially vertical major surfaces and two oppositely disposed generally horizontal minor surfaces. The aspect ratio of major surface to minor surface is at least 5:1. A carrier which includes a recessed region is secured to the first wafer layer such that said structure is suspended opposite the recessed region.
摘要翻译：一方面，本发明提供一种包括第一单晶硅晶片层的半导体传感器。在第一晶片层中形成单晶硅结构。该结构包括两个相对布置的基本垂直的主表面和两个相对布置的大体水平的小的表面。主表面与次表面的纵横比至少为5：1。包括凹陷区域的载体被固定到第一晶片层，使得所述结构与凹陷区域相对地悬挂。

3. 发明授权

US6084257A Single crystal silicon sensor with high aspect ratio and curvilinear structures 失效
标题翻译：具有高纵横比和曲线结构的单晶硅传感器
公开(公告)号：US6084257A
公开(公告)日：2000-07-04
申请号：US449140
申请日：1995-05-24
申请人： Kurt E. Petersen , Nadim Maluf , Wendell McCulley , John Logan , Erno Klaasen , Jan M. Noworolski
发明人： Kurt E. Petersen , Nadim Maluf , Wendell McCulley , John Logan , Erno Klaasen , Jan M. Noworolski
IPC分类号： G01P15/08 , G01P15/125 , H01L29/82
CPC分类号： G01P15/0802 , G01P15/125 , G01P2015/0814 , Y10S73/01
摘要： In one aspect, the invention provides semiconductor sensor which includes a first single crystal silicon wafer layer. A single crystal silicon structure is formed in the first wafer layer. The structure includes two oppositely disposed substantially vertical major surfaces and two oppositely disposed generally horizontal minor surfaces. The aspect ratio of major surface to minor surface is at least 5:1. A carrier which includes a recessed region is secured to the first wafer layer such that said structure is suspended opposite the recessed region.
摘要翻译：一方面，本发明提供了包括第一单晶硅晶片层的半导体传感器。在第一晶片层中形成单晶硅结构。该结构包括两个相对布置的基本垂直的主表面和两个相对布置的大体水平的小的表面。主表面与次表面的纵横比至少为5：1。包括凹陷区域的载体被固定到第一晶片层，使得所述结构与凹陷区域相对地悬挂。

4. 发明授权

US07837844B2 Interdigitated chemical sensors, and methods of making and using the same 有权
标题翻译：交叉化学传感器，以及制造和使用它们的方法
公开(公告)号：US07837844B2
公开(公告)日：2010-11-23
申请号：US11115911
申请日：2005-04-26
申请人： Sanjay V. Patel , Todd E. Mlsna , Erno Klaasen
发明人： Sanjay V. Patel , Todd E. Mlsna , Erno Klaasen
IPC分类号： G01N27/327 , G01N27/30
CPC分类号： G01N27/226
摘要： The present invention relates to the field of chemical detection. More specifically, the invention provides devices that can detect various target analytes (e.g., chemicals and/or biological materials) present in an environment by adsorption or absorption of the target analyte(s) to or in a chemical sensing material such that an electrical parameter (e.g., capacitance, resistance, etc.) of the chemical sensing material is altered in a manner detectable by circuitry associated with the sensing electrode pair coated with the chemical sensing material. Here, the sensing electrode pair(s) of the devices of the invention are suspended over an inert substrate via one or more posts used to space the electrodes from the substrate.
摘要翻译：本发明涉及化学检测领域。更具体地，本发明提供了可以通过吸附或吸收目标分析物到化学感测材料中或在化学感测材料中来检测存在于环境中的各种目标分析物（例如，化学品和/或生物材料）的装置，使得电参数（例如，电容，电阻等）以与通过化学感测材料涂覆的感测电极对相关联的电路可检测的方式改变。这里，本发明的器件的感测电极对通过用于将电极从衬底放置的一个或多个柱悬置在惰性衬底上。

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