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1. 发明授权

US06565416B2 Laser interferometry endpoint detection with windowless polishing pad for chemical mechanical polishing process 有权
标题翻译：激光干涉测量端点检测与无窗抛光垫的化学机械抛光工艺
公开(公告)号：US06565416B2
公开(公告)日：2003-05-20
申请号：US09805860
申请日：2001-03-13
申请人： Samuel Vance Dunton , Yizhi Xiong
发明人： Samuel Vance Dunton , Yizhi Xiong
IPC分类号： B24B4900
CPC分类号： B24B37/013 , B24B49/12 , B24D7/12
摘要： A multi-platen chemical-mechanical polishing system is used to polish a wafer. The wafer is polished at a first station. During polishing, an endpoint is detected. The endpoint is detected by generating optical radiation by a first light source. The first optical radiation travels through a translucent area in a surface of a first platen and travels through a first polishing pad. After being reflected by the wafer, the optical radiation returns through the first polishing pad through the translucent window to a first optical radiation detector. The first polishing pad has a uniform surface in that no part of the surface of the first polishing pad includes transparent material through which non-scattered optical radiation originating from the first light source can pass and be detected by the first optical radiation detector. Optical radiation that travels through the first polishing pad and is detected by the first optical radiation detector is haze scattered by inclusions within the first polishing pad. Non-scattered light is absorbed by the first polishing pad. The wafer is also polished at a second station. During polishing a final endpoint is detected. The final endpoint is detected by generating optical radiation by a second light source. The second optical radiation travels through a translucent area in a surface of a second platen and travels through a window embedded in a second polishing pad. After being reflected by the wafer, the optical radiation returns through the window embedded in the second polishing pad, through the translucent area in the surface of the second platen, to a second optical radiation detector.
摘要翻译：多台板化学机械抛光系统用于抛光晶片。晶片在第一站被抛光。在抛光期间，检测到一个端点。通过由第一光源产生光辐射来检测端点。第一光辐射穿过第一压板的表面中的半透明区域并且穿过第一抛光垫。在被晶片反射之后，光辐射通过第一抛光垫通过半透明窗口返回到第一光学辐射检测器。第一抛光垫具有均匀的表面，因为第一抛光垫的表面的任何部分都不包括透明材料，通过该透明材料，源自第一光源的非散射光辐射可以通过第一光学辐射检测器检测。穿过第一抛光垫并由第一光学辐射检测器检测的光辐射是由第一抛光垫内的夹杂物散射的雾。非散射光被第一抛光垫吸收。晶片也在第二站抛光。在抛光期间，检测到最终的终点。通过由第二光源产生光辐射来检测最终端点。第二光辐射穿过第二压板的表面中的半透明区域并且穿过嵌入第二抛光垫中的窗口。在被晶片反射之后，光学辐射通过嵌入第二抛光垫中的窗口通过第二压板的表面中的半透明区域返回到第二光学辐射检测器。

2. 发明授权

US06224460B1 Laser interferometry endpoint detection with windowless polishing pad for chemical mechanical polishing process 有权
公开(公告)号：US06224460B1
公开(公告)日：2001-05-01
申请号：US09340487
申请日：1999-06-30
申请人： Samuel Vance Dunton , Yizhi Xiong
发明人： Samuel Vance Dunton , Yizhi Xiong
IPC分类号： B24B4900
CPC分类号： B24B37/013 , B24B49/12 , B24D7/12
摘要： A multi-platen chemical-mechanical polishing system is used to polish a wafer. The wafer is polished at a first station. During polishing, an endpoint is detected. The endpoint is detected by generating optical radiation by a first light source. The first optical radiation travels through a translucent area in a surface of a first platen and travels through a first polishing pad. After being reflected by the wafer, the optical radiation returns through the first polishing pad through the translucent window to a first optical radiation detector. The first polishing pad has a uniform surface in that no part of the surface of the first polishing pad includes transparent material through which non-scattered optical radiation originating from the first light source can pass and be detected by the first optical radiation detector. Optical radiation that travels through the first polishing pad and is detected by the first optical radiation detector is haze scattered by inclusions within the first polishing pad. Non-scattered light is absorbed by the first polishing pad. The wafer is also polished at a second station. During polishing a final endpoint is detected. The final endpoint is detected by generating optical radiation by a second light source. The second optical radiation travels through a translucent area in a surface of a second platen and travels through a window embedded in a second polishing pad. After being reflected by the wafer, the optical radiation returns through the window embedded in the second polishing pad, through the translucent area in the surface of the second platen, to a second optical radiation detector.

3. 发明授权

US07162632B2 Efficient optical network design using multi-granular optical cross-connects with wavelength band switching 有权
标题翻译：高效的光网络设计采用多粒度光交叉连接波长带
公开(公告)号：US07162632B2
公开(公告)日：2007-01-09
申请号：US10665535
申请日：2003-09-19
申请人： Xiaojun Cao , Chunming Qiao , Vishal Anand , Yizhi Xiong
发明人： Xiaojun Cao , Chunming Qiao , Vishal Anand , Yizhi Xiong
IPC分类号： G06F1/24
CPC分类号： H04J14/0295 , H04J14/0212 , H04J14/0213 , H04J14/0227 , H04J14/0241 , H04J14/0284 , H04Q11/0005 , H04Q11/0062 , H04Q11/0066 , H04Q2011/0011 , H04Q2011/0024 , H04Q2011/0052 , H04Q2011/0075 , H04Q2011/0081 , H04Q2011/0086
摘要： A method for managing static data traffic of at least one light path in an optical network, comprising the steps of achieving load balanced path routing for the at least one light path, assigning wavelengths to demands of the at least one light path, and, switching the at least one light path according to its assigned wavelength. A method for managing dynamic data traffic of at least one light path in an optical network, comprising the steps of routing the K-shortest path, which has the largest interference length (L), and, assigning waveband with a First-Fit network topology based on band/port number restriction and minimum weight.
摘要翻译：一种用于管理光网络中的至少一个光路的静态数据业务的方法，包括以下步骤：为所述至少一个光路实现负载平衡路径路由，将波长分配给所述至少一个光路的需求，以及切换所述至少一个光路根据其分配的波长。一种用于管理光网络中的至少一个光路的动态数据业务的方法，包括以下步骤：路由具有最大干扰长度（L）的最短路径，以及使用First-Fit网络拓扑分配波段基于频带/端口号限制和最小重量。

4. 发明授权

US07701848B2 Efficient trap avoidance and shared protection method in survivable networks with shared risk link groups and a survivable network 失效
标题翻译：在具有共享风险链路组和可生存网络的可存活网络中有效的避免陷阱和共享保护方法
公开(公告)号：US07701848B2
公开(公告)日：2010-04-20
申请号：US10887799
申请日：2004-07-09
申请人： Chunming Qiao , Dahai Xu , Yizhi Xiong
发明人： Chunming Qiao , Dahai Xu , Yizhi Xiong
IPC分类号： G01R31/08
CPC分类号： H04L41/0896 , H04L41/0663
摘要： An efficient trap avoidance and shared protection method in a survivable network with shared risk link groups. The invention includes a fast and efficient heuristic algorithm for avoiding traps, an algorithm, which may also be applied effectively to shared SRLG protection. Compared to other existing algorithms, the algorithm embodied in the present invention runs much faster, and yet falls into few traps, and achieves a much higher bandwidth efficiency. This technology can be applied to MPLS, ATM, SONET, WDM, and other high-speed survivable network designs.
摘要翻译：在具有共享风险链路组的可生存网络中有效的避免陷阱和共享保护方法。本发明包括一种用于避免陷阱的快速有效的启发式算法，一种也可有效应用于共享SRLG保护的算法。与其他现有算法相比，本发明实现的算法运行速度更快，但陷入少量陷阱，实现了更高的带宽效率。该技术可以应用于MPLS，ATM，SONET，WDM等高速可行网络设计。

5. 发明授权

US07398321B2 Segment protection scheme for a network 失效
标题翻译：网络的分段保护方案
公开(公告)号：US07398321B2
公开(公告)日：2008-07-08
申请号：US10439898
申请日：2003-05-13
申请人： Chunming Qiao , Dahai Xu , Yizhi Xiong
发明人： Chunming Qiao , Dahai Xu , Yizhi Xiong
IPC分类号： G06F15/173
CPC分类号： H04L45/24 , H04J14/0227 , H04J14/0245 , H04J14/0249 , H04J14/0284 , H04J14/0286 , H04J14/0287 , H04J14/029 , H04J14/0291 , H04L45/02 , H04L45/22 , H04L45/28 , H04Q11/0062 , H04Q2011/0077 , H04Q2011/0081
摘要： This invention broadly comprises a novel segment protection scheme (survivability framework) for a network, which we refer to as PROMISE (Protection using MultIple SEgments). It combines the best of existing link and path protection schemes (e.g., bandwidth efficiency and fast recovery). The PROMISE approach divides an active path or AP (along which a survivable connection is established) into several, possibly overlapping active segments or ASs, and then protects each AS with a detour called backup segment or BS (instead of protecting the AP as a whole as in path protection schemes). This facilitates the bandwidth sharing not only among the BSs for different APs, but also among those for the same AP. In addition, recovery time can be shortened due to the limited length of each AS and BS. This technology can be applied to MPLS, ATM, SONET, WDM and other high-speed link layers under the evolving G-MPLS framework.
摘要翻译：本发明广泛地包括用于网络的新颖的段保护方案（生存性框架），我们称之为PROMISE（使用多重节点保护）。它结合了现有的最佳链路和路径保护方案（例如，带宽效率和快速恢复）。 PROMISE方法将活动路径或AP（其中建立了可行的连接）划分成若干可能重叠的活动段或AS，然后以称为备份段或BS的绕路保护每个AS（而不是整体保护AP）如路径保护方案）。这不仅有助于不同AP的BS之间的带宽共享，而且在同一个AP的带宽共享之间。此外，由于每个AS和BS的长度有限，可以缩短恢复时间。该技术可以在不断变化的G-MPLS框架下应用于MPLS，ATM，SONET，WDM等高速链路层。

6. 发明申请

US20050031339A1 Efficient trap avoidance and shared protection method in survivable networks with shared risk link groups and a survivable network 失效
标题翻译：在具有共享风险链路组和可生存网络的可存活网络中有效的避免陷阱和共享保护方法
公开(公告)号：US20050031339A1
公开(公告)日：2005-02-10
申请号：US10887799
申请日：2004-07-09
申请人： Chumning Qiao , Dahai Xu , Yizhi Xiong
发明人： Chumning Qiao , Dahai Xu , Yizhi Xiong
IPC分类号： G02F1/00 , H04L12/24
CPC分类号： H04L41/0896 , H04L41/0663
摘要： An efficient trap avoidance and shared protection method in a survivable network with shared risk link groups. The invention includes a fast and efficient heuristic algorithm for avoiding traps, an algorithm, which may also be applied effectively to shared SRLG protection. Compared to other existing algorithms, the algorithm embodied in the present invention runs much faster, and yet falls into few traps, and achieves a much higher bandwidth efficiency. This technology can be applied to MPLS, ATM, SONET, WDM, and other high-speed survivable network designs.
摘要翻译：在具有共享风险链路组的可生存网络中有效的避免陷阱和共享保护方法。本发明包括一种用于避免陷阱的快速有效的启发式算法，一种也可有效应用于共享SRLG保护的算法。与其他现有算法相比，本发明实现的算法运行速度更快，但陷入少量陷阱，实现了更高的带宽效率。该技术可以应用于MPLS，ATM，SONET，WDM等高速可行网络设计。

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