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    • 4. 发明授权
    • Organic matter vapor deposition device and organic light emitting display manufactured thereby
    • 由此制造有机物气相沉积装置和有机发光显示器
    • US09502478B2
    • 2016-11-22
    • US14280266
    • 2014-05-16
    • Samsung Display Co., Ltd.
    • Tong-Jin ParkJoo Hwa Lee
    • H01L29/08H01L35/24H01L51/00H01L27/32C23C14/04C23C14/12C23C14/54B05C11/00
    • H01L27/3225C23C14/042C23C14/12C23C14/545
    • An organic material deposition device configured to sense a deposition amount of an organic material deposited in a vacuum chamber by detecting a back propagation characteristic variation of a passive radio frequency identification (RFID) sensor. The organic material deposition device includes: a chamber configured to perform an organic material deposition process therein; a deposition source mounted in the chamber to vaporize an organic material; a deposition mask mounted to face the deposition source and configured to bond a substrate at an opposite side to the deposition source; an antenna mounted in the chamber to receive back propagation from a radio frequency identification (RFID) sensor; and a radio frequency (RF) reader connected to the antenna to measure an organic material deposition amount from a variation of the back propagation.
    • 一种有机材料沉积装置,其被配置为通过检测无源射频识别(RFID)传感器的反向传播特性变化来感测沉积在真空室中的有机材料的沉积量。 有机材料沉积装置包括:被配置为在其中执行有机材料沉积工艺的室; 沉积源,其安装在所述室中以蒸发有机材料; 沉积掩模,其安装成面对沉积源并且被配置为将沉积源的相对侧的衬底粘合; 安装在所述腔室中以从射频识别(RFID)传感器接收反向传播的天线; 以及连接到天线的射频(RF)读取器,以从反向传播的变化来测量有机材料沉积量。