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    • 3. 发明授权
    • Method for manufacturing a display panel
    • 显示面板的制造方法
    • US08975145B2
    • 2015-03-10
    • US14168971
    • 2014-01-30
    • Samsung Display Co., Ltd.
    • Yu-Gwang JeongYoung-Wook LeeSang-Gab KimWoo-Geun LeeMin-Seok OhJang-Soo KimKap-Soo YoonShin-Il ChoiHong-Kee ChinSeung-Ha ChoiSeung-Hwan ShimSung-Hoon YangKi-Hun Jeong
    • H01L33/44H01L27/12H01L29/66
    • H01L27/127H01L27/1214H01L27/1259H01L27/1288H01L29/66765
    • Embodiments of the present invention relate to a thin film transistor and a manufacturing method of a display panel, and include forming a gate line including a gate electrode on a substrate, forming a gate insulating layer on the gate electrode, forming an intrinsic semiconductor on the gate insulating layer, forming an extrinsic semiconductor on the intrinsic semiconductor, forming a data line including a source electrode and a drain electrode on the extrinsic semiconductor, and plasma-treating a portion of the extrinsic semiconductor between the source electrode and the drain electrode to form a protection member and ohmic contacts on respective sides of the protection member. Accordingly, the process for etching the extrinsic semiconductor and forming an inorganic insulating layer for protecting the intrinsic semiconductor may be omitted such that the manufacturing process of the display panel may be simplified, manufacturing cost may be reduced, and productivity may be improved.
    • 本发明的实施例涉及薄膜晶体管和显示面板的制造方法,包括在基板上形成包括栅电极的栅极线,在栅电极上形成栅绝缘层,在栅电极上形成本征半导体 栅极绝缘层,在本征半导体上形成非本征半导体,在外部半导体上形成包括源电极和漏电极的数据线,以及对源电极和漏极之间的非本征半导体的一部分进行等离子体处理,以形成 保护构件和保护构件的相应侧上的欧姆接触。 因此,可以省略用于蚀刻外部半导体和形成用于保护本征半导体的无机绝缘层的工艺,从而可以简化显示面板的制造工艺,可以降低制造成本,并且可以提高生产率。