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    • 2. 发明申请
    • METHOD OF MANUFACTURING LCD APPARATUS BY USING HALFTONE EXPOSURE METHOD
    • 通过使用牛皮暴露方法制造液晶显示装置的方法
    • US20070269936A1
    • 2007-11-22
    • US11749190
    • 2007-05-16
    • Sakae TanakaToshiyuki Samejima
    • Sakae TanakaToshiyuki Samejima
    • H01L21/332
    • G02F1/13458G02F2001/136236H01L27/124H01L27/1288
    • The present invention discloses a method of manufacturing a super large wide-angle super high-speed response LCD apparatus by using a photolithographic process for three times. The invention adopts a halftone exposure technology and a nitrogen ion doped technology to form a gate electrode, a common electrode, a pixel electrode and a contact pad, and then uses the halftone exposure technology to form a silicon (Si) island and a contact hole, and a general exposure technology to form a source electrode, a drain electrode and an alignment control electrode. A P-CVD apparatus is provided for forming a passivation layer into a film by using a masking deposition method, or an ink-jet coating method is used to coat a protective layer at a partial area, and a photolithographic process is performed for three times to manufacture a TFT matrix substrate of the super large wide-angle super high-speed response LCD.
    • 本发明公开了通过使用光刻工艺三次制造超大型广角超高速响应LCD装置的方法。 本发明采用半色调曝光技术和氮离子掺杂技术形成栅电极,公共电极,像素电极和接触焊盘,然后使用半色调曝光技术形成硅(Si)岛和接触孔 以及形成源电极,漏电极和取向控制电极的一般曝光技术。 提供了一种P-CVD装置,用于通过使用掩模沉积方法将钝化层形成为膜,或者使用喷墨涂覆法在部分区域上涂覆保护层,并且进行光刻处理三次 制造超大型广角超高速液晶显示器的TFT矩阵基板。