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    • 10. 发明授权
    • Superconductor junction structure including two oxide superconductor
layers separated by a non-superconducting layer
    • 超导体结结构包括由非超导层隔开的两个氧化物超导体层
    • US5488030A
    • 1996-01-30
    • US366408
    • 1994-12-29
    • Saburo TanakaTakashi MatsuuraHideo Itozaki
    • Saburo TanakaTakashi MatsuuraHideo Itozaki
    • H01L39/22H01B12/00H01L29/06
    • H01L39/225
    • There is disclosed a superconductor junction structure comprising: a first superconducting layer of an oxide superconductor formed in a desired pattern on a substrate; a non-superconducting layer of a non-superconductor formed on at least a part of the side faces of the first superconducting layer, a portion of the surface of the substrate near the part, and a top face of the first superconducting layer; and a second superconducting layer of the oxide superconductor formed on the non-superconducting layer, the non-superconducting layer being formed thin at the part, and forming a tunnel barrier. And further there is disclosed a process for fabricating a superconductor junction structure comprising: the first step of forming a first superconducting layer of an oxide superconductor in a desired pattern on a substrate; the second step of forming a non-superconducting layer of a non-superconductor formed on at least a part of the side faces of the first superconducting layer, a portion of the surface of the substrate near the part, and a top face of the first superconducting layer by depositing the non-superconductor from the above; and the third step of forming a second superconducting layer of the oxide superconductor on the non-superconducting layer.
    • 公开了一种超导体结结构,包括:在衬底上以期望的图案形成的氧化物超导体的第一超导层; 形成在所述第一超导层的至少一部分侧面上的非超导体的非超导层,所述部分的所述基板表面的一部分以及所述第一超导层的顶面; 以及形成在所述非超导层上的所述氧化物超导体的第二超导层,所述非超导层在所述部分处形成为较薄,并且形成隧道势垒。 此外,还公开了一种用于制造超导体结结构的方法,包括:第一步骤,在衬底上形成期望图案的氧化物超导体的第一超导层; 形成在第一超导层的至少一部分侧面上的非超导体的非超导层,部分附近的基板表面的一部分和第一超导体的顶面的第二步骤 超导层通过从上面沉积非超导体; 以及在所述非超导层上形成所述氧化物超导体的第二超导层的第三步骤。