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    • 4. 发明申请
    • INSPECTION APPARATUS AND AN INSPECTION METHOD
    • 检查装置和检查方法
    • US20140319351A1
    • 2014-10-30
    • US14260063
    • 2014-04-23
    • Sumitomo Electric Industries, Ltd.
    • Eiichiro YAMADAAkinori KIMURA
    • G01J1/42G01N21/88
    • G01N21/8901G01N21/359
    • Detection of articles of different kind or defective quality can be accomplished with higher accuracy. With an inspection apparatus 100 and an inspection method using the inspection apparatus 100, in an analyzing unit 30, first, target pixels having imaged inspection objects are extracted from spectral data of each pixel acquired in a detecting unit 20, and the spectral data of plural target pixels which have imaged the same inspection object are grouped beforehand, and the classification of inspection objects is performed using the thus grouped spectra of the target objects. Therefore, the classification of inspection objects is done using the spectral data of a plurality of target pixels which have imaged the same inspection object. This enables reducing the possibility of incorrect judgment due to a noise contained in a specific pixel. Thus, the detection of articles of different kind or defective quality can be accomplished with higher accuracy.
    • 可以更高精度地检测不同种类或缺陷品质的物品。 使用检查装置100和使用检查装置100的检查方法,在分析单元30中,首先从检测单元20中获取的每个像素的频谱数据中提取具有成像检查对象的目标像素,并且将多个频谱数据 已经成像了相同检查对象的目标像素被预先分组,并且使用目标对象的这样分组的光谱来执行检查对象的分类。 因此,使用对相同检查对象成像的多个目标像素的光谱数据进行检查对象的分类。 这使得能够减少由于特定像素中包含的噪声导致的错误判断的可能性。 因此,可以以更高的精度实现不同种类的物品的检测或缺陷质量的检测。