专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

US20150362522A1 MEMS RESONANT ACCELEROMETER HAVING IMPROVED ELECTRICAL CHARACTERISTICS 审中-公开
标题翻译：具有改进电气特性的MEMS谐振加速度计
公开(公告)号：US20150362522A1
公开(公告)日：2015-12-17
申请号：US13952503
申请日：2013-07-26
申请人： STMicroelectronics S.r.l. , Politecnico Di Milano
发明人： Barbara Simoni , Claudia Comi , Alberto Corigliano
IPC分类号： G01P15/097
CPC分类号： G01P15/097 , G01P15/10
摘要： A MEMS resonant accelerometer is disclosed, having: a proof mass coupled to a first anchoring region via a first elastic element so as to be free to move along a sensing axis in response to an external acceleration; and a first resonant element mechanically coupled to the proof mass through the first elastic element so as to be subject to a first axial stress when the proof mass moves along the sensing axis and thus to a first variation of a resonant frequency. The MEMS resonant accelerometer is further provided with a second resonant element mechanically coupled to the proof mass through a second elastic element so as to be subject to a second axial stress when the proof mass moves along the sensing axis, substantially opposite to the first axial stress, and thus to a second variation of a resonant frequency, opposite to the first variation.
摘要翻译：公开了一种MEMS谐振加速度计，其具有：经由第一弹性元件耦合到第一锚定区域的检测质量，以便响应于外部加速度沿感测轴线自由移动; 以及第一谐振元件，其通过所述第一弹性元件机械耦合到所述检验质量块，以便当所述检测质量沿着所述感测轴线移动并且因此达到谐振频率的第一变化时，经受第一轴向应力。 MEMS谐振加速度计进一步设置有第二谐振元件，其通过第二弹性元件机械耦合到校准物质，以便当检测质量沿着感测轴线移动时受到第二轴向应力，基本上与第一轴向应力相反，从而达到与第一变化相反的谐振频率的第二变化。

2. 发明申请

US20180187668A1 MICROPUMP WITH ELECTROSTATIC ACTUATION 审中-公开
公开(公告)号：US20180187668A1
公开(公告)日：2018-07-05
申请号：US15740665
申请日：2016-07-01
申请人： POLITECNICO DI MILANO
发明人： Alberto Corigliano , Raffaele Ardito , Emanuele Bertarelli , Marco Ferrera
IPC分类号： F04B43/04 , F04B49/06 , F04B53/10
摘要： A micropump includes: a pumping chamber, between a first semiconductor substrate and a second semiconductor substrate bonded to each other; an inlet valve, having an inlet shutter element between an inlet passage and the pumping chamber; an outlet valve, having an outlet shutter element between the pumping chamber and an outlet passage; a first recess for housing the inlet shutter element when the inlet valve is in the open configuration, the first recess and the pumping chamber being fluidly coupled; a second recess for housing the outlet shutter element when the outlet valve is in the open configuration, the second recess and the pumping chamber being fluidly decoupled.

3. 发明授权

US10767641B2 Micropump with electrostatic actuation 有权
公开(公告)号：US10767641B2
公开(公告)日：2020-09-08
申请号：US15740665
申请日：2016-07-01
申请人： POLITECNICO DI MILANO
发明人： Alberto Corigliano , Raffaele Ardito , Emanuele Bertarelli , Marco Ferrera
IPC分类号： F04B43/04 , F04B43/02 , F04B49/06 , F04B53/10 , F04B45/047 , F04B45/04
摘要： A micropump includes: a pumping chamber, between a first semiconductor substrate and a second semiconductor substrate bonded to each other; an inlet valve, having an inlet shutter element between an inlet passage and the pumping chamber; an outlet valve, having an outlet shutter element between the pumping chamber and an outlet passage; a first recess for housing the inlet shutter element when the inlet valve is in the open configuration, the first recess and the pumping chamber being fluidly coupled; a second recess for housing the outlet shutter element when the outlet valve is in the open configuration, the second recess and the pumping chamber being fluidly decoupled.

4. 发明授权

US09941821B2 Piezoelectric transducer for an energy-harvesting system 有权
公开(公告)号：US09941821B2
公开(公告)日：2018-04-10
申请号：US14446237
申请日：2014-07-29
申请人： STMicroelectronics S.r.l.
发明人： Francesco Procopio , Carlo Valzasina , Alberto Corigliano , Raffaele Ardito , Giacomo Gafforelli
IPC分类号： H02N2/18
CPC分类号： H02N2/186 , H02N2/181 , H02N2/188
摘要： A piezoelectric transducer for energy-harvesting systems includes a substrate, a piezoelectric cantilever element, a first magnetic element, and a second magnetic element, mobile with respect to the first magnetic element. The first magnetic element is coupled to the piezoelectric cantilever element. The first magnetic element and the second magnetic element are set in such a way that, in response to relative movements between the first magnetic element and the second magnetic element through an interval of relative positions, the first magnetic element and the second magnetic element approach one another without coming into direct contact, and the interaction between the first magnetic element and the second magnetic element determines application of a force pulse on the piezoelectric cantilever element.

5. 发明申请

US20160305780A1 ACCELERATION AND ANGULAR VELOCITY RESONANT DETECTION INTEGRATED STRUCTURE, AND RELATED MEMS SENSOR DEVICE 审中-公开
标题翻译：加速度和角速度谐波检测集成结构及相关MEMS传感器器件
公开(公告)号：US20160305780A1
公开(公告)日：2016-10-20
申请号：US15192404
申请日：2016-06-24
申请人： STMicroelectronics S.r.l.
发明人： Claudia Comi , Alberto Corigliano , Leonardo Baldasarre
IPC分类号： G01C19/574 , G01P15/125 , G01P15/097
CPC分类号： G01C19/574 , G01C19/56 , G01P15/097 , G01P15/125 , G01P2015/0831
摘要： An integrated detection structure has a first inertial mass and a second inertial mass, each of which is elastically anchored to a substrate and has a linear movement along a first horizontal axis, a first detection movement of rotation about a first axis of rotation parallel to a second horizontal axis and a second detection movement of translation along the second horizontal axis; driving electrodes cause linear movement of the inertial masses, in opposite directions of the first horizontal axis; a pair of flexural resonator elements and a pair of torsional resonator elements are elastically coupled to the inertial masses, the torsional resonator elements having a resonant movement of rotation about a second axis of rotation and a third axis of rotation, parallel to one another and to the first axis of rotation.
摘要翻译：集成的检测结构具有第一惯性质量和第二惯性质量，其中每一个惯性质量块和第二惯性质量块都被弹性锚固到基底上，并且沿第一水平轴线具有直线运动，围绕第一旋转轴线旋转的第一检测运动第二水平轴和沿着第二水平轴的平移的第二检测运动; 驱动电极引起惯性块在第一水平轴线的相反方向上的线性移动; 一对弯曲谐振器元件和一对扭转谐振器元件弹性耦合到惯性块，扭转谐振元件具有围绕彼此平行的第二旋转轴线和第三旋转轴线的共振旋转运动，并且第一个旋转轴。

6. 发明授权

US09389077B2 Acceleration and angular velocity resonant detection integrated structure, and related MEMS sensor device 有权
标题翻译：加速度和角速度共振检测一体化结构，以及相关的MEMS传感器装置
公开(公告)号：US09389077B2
公开(公告)日：2016-07-12
申请号：US14032052
申请日：2013-09-19
申请人： STMicroelectronics S.r.l.
发明人： Claudia Comi , Alberto Corigliano , Leonardo Baldasarre
IPC分类号： G01C19/56 , G01P15/097 , G01P15/125 , G01C19/574 , G01P15/08
CPC分类号： G01C19/574 , G01C19/56 , G01P15/097 , G01P15/125 , G01P2015/0831
摘要： An integrated detection structure has a first inertial mass and a second inertial mass, each of which is elastically anchored to a substrate and has a linear movement along a first horizontal axis, a first detection movement of rotation about a first axis of rotation parallel to a second horizontal axis and a second detection movement of translation along the second horizontal axis; driving electrodes cause linear movement of the inertial masses, in opposite directions of the first horizontal axis; a pair of flexural resonator elements and a pair of torsional resonator elements are elastically coupled to the inertial masses, the torsional resonator elements having a resonant movement of rotation about a second axis of rotation and a third axis of rotation, parallel to one another and to the first axis of rotation.
摘要翻译：集成的检测结构具有第一惯性质量和第二惯性质量，其中每一个惯性质量块和第二惯性质量块都被弹性锚固到基底上，并且沿第一水平轴线具有直线运动，围绕第一旋转轴线旋转的第一检测运动第二水平轴和沿着第二水平轴的平移的第二检测运动; 驱动电极引起惯性块在第一水平轴线的相反方向上的线性移动; 一对弯曲谐振器元件和一对扭转谐振器元件弹性耦合到惯性块，扭转谐振元件具有围绕彼此平行的第二旋转轴线和第三旋转轴线的共振旋转运动，并且第一个旋转轴。

7. 发明授权

US09377482B2 Detection structure for a Z-axis resonant accelerometer 有权
标题翻译： Z轴共振加速度计的检测结构
公开(公告)号：US09377482B2
公开(公告)日：2016-06-28
申请号：US14193981
申请日：2014-02-28
申请人： STMicroelectronics S.r.l.
发明人： Claudia Comi , Alberto Corigliano , Sarah Zerbini
IPC分类号： G01P15/097
CPC分类号： G01P15/0975 , G01P15/097
摘要： A detection structure for a z-axis resonant accelerometer is provided with an inertial mass anchored to a substrate by means of elastic anchorage elements so as to be suspended above the substrate and perform an inertial movement of rotation about a first axis of rotation belonging to a plane of main extension of the inertial mass, in response to an external acceleration acting along a vertical axis transverse with respect to the plane; and a first resonator element and a second resonator element, which are mechanically coupled to the inertial mass by respective elastic supporting elements, which enable a movement of rotation about a second axis of rotation and a third axis of rotation, in a resonance condition. In particular, the second axis of rotation and the third axis of rotation are parallel to one another, and are moreover parallel to the first axis of rotation of the inertial mass.
摘要翻译：用于z轴共振加速度计的检测结构具有通过弹性锚定元件锚固到基底的惯性块，以便悬挂在基底上方，并且执行围绕属于属于第一轴的第一旋转轴的旋转的惯性运动响应于沿相对于平面横向的垂直轴作用的外部加速度，所述惯性质量的主延伸面; 以及第一谐振器元件和第二谐振器元件，其通过相应的弹性支撑元件机械耦合到惯性块，其使得能够在谐振条件下围绕第二旋转轴线和第三旋转轴线旋转。特别地，第二旋转轴线和第三旋转轴线彼此平行，并且还平行于惯性质量块的第一旋转轴线。

8. 发明申请

US20140174183A1 DETECTION STRUCTURE FOR A Z-AXIS RESONANT ACCELEROMETER 有权
标题翻译： Z轴共振加速度计的检测结构
公开(公告)号：US20140174183A1
公开(公告)日：2014-06-26
申请号：US14193981
申请日：2014-02-28
申请人： STMicroelectronics S.r.l.
发明人： Claudia Comi , Alberto Corigliano , Sarah Zerbini
IPC分类号： G01P15/097
CPC分类号： G01P15/0975 , G01P15/097
摘要： A detection structure for a z-axis resonant accelerometer is provided with an inertial mass anchored to a substrate by means of elastic anchorage elements so as to be suspended above the substrate and perform an inertial movement of rotation about a first axis of rotation belonging to a plane of main extension of the inertial mass, in response to an external acceleration acting along a vertical axis transverse with respect to the plane; and a first resonator element and a second resonator element, which are mechanically coupled to the inertial mass by respective elastic supporting elements, which enable a movement of rotation about a second axis of rotation and a third axis of rotation, in a resonance condition. In particular, the second axis of rotation and the third axis of rotation are parallel to one another, and are moreover parallel to the first axis of rotation of the inertial mass.
摘要翻译：用于z轴共振加速度计的检测结构具有通过弹性锚定元件锚固到基底的惯性块，以便悬挂在基底上方，并且执行围绕属于属于第一轴的第一旋转轴的旋转的惯性运动响应于沿相对于平面横向的垂直轴作用的外部加速度，所述惯性质量的主延伸面; 以及第一谐振器元件和第二谐振器元件，其通过相应的弹性支撑元件机械耦合到惯性块，其使得能够在谐振条件下围绕第二旋转轴线和第三旋转轴线旋转。特别地，第二旋转轴线和第三旋转轴线彼此平行，并且还平行于惯性质量块的第一旋转轴线。

9. 发明授权

US09989364B2 Acceleration and angular velocity resonant detection integrated structure, and related MEMS sensor device 有权
公开(公告)号：US09989364B2
公开(公告)日：2018-06-05
申请号：US15192404
申请日：2016-06-24
申请人： STMicroelectronics S.r.l.
发明人： Claudia Comi , Alberto Corigliano , Leonardo Baldasarre
IPC分类号： G01C19/56 , G01C19/574 , G01P15/097 , G01P15/125 , G01P15/08
CPC分类号： G01C19/574 , G01C19/56 , G01P15/097 , G01P15/125 , G01P2015/0831
摘要： An integrated detection structure has a first inertial mass and a second inertial mass, each of which is elastically anchored to a substrate and has a linear movement along a first horizontal axis, a first detection movement of rotation about a first axis of rotation parallel to a second horizontal axis and a second detection movement of translation along the second horizontal axis; driving electrodes cause linear movement of the inertial masses, in opposite directions of the first horizontal axis; a pair of flexural resonator elements and a pair of torsional resonator elements are elastically coupled to the inertial masses, the torsional resonator elements having a resonant movement of rotation about a second axis of rotation and a third axis of rotation, parallel to one another and to the first axis of rotation.

10. 发明授权

US10897215B2 Piezoelectric transducer for an energy-harvesting system 有权
公开(公告)号：US10897215B2
公开(公告)日：2021-01-19
申请号：US15913590
申请日：2018-03-06
申请人： STMicroelectronics S.r.l.
发明人： Francesco Procopio , Carlo Valzasina , Alberto Corigliano , Raffaele Ardito , Giacomo Gafforelli
IPC分类号： H02N2/18
摘要： A piezoelectric transducer for energy-harvesting systems includes a substrate, a piezoelectric cantilever element, a first magnetic element, and a second magnetic element, mobile with respect to the first magnetic element. The first magnetic element is coupled to the piezoelectric cantilever element. The first magnetic element and the second magnetic element are set in such a way that, in response to relative movements between the first magnetic element and the second magnetic element through an interval of relative positions, the first magnetic element and the second magnetic element approach one another without coming into direct contact, and the interaction between the first magnetic element and the second magnetic element determines application of a force pulse on the piezoelectric cantilever element.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式