会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 5. 发明申请
    • EXPOSURE DEVICE AND EXPOSURE METHOD
    • 曝光装置和曝光方法
    • US20160216614A1
    • 2016-07-28
    • US15091005
    • 2016-04-05
    • SONY CORPORATION
    • Shinsuke HAGAMasaki OHNOTaichi TAKEUCHI
    • G03F7/20
    • G03F7/704B29C64/00B29C64/264B33Y30/00G03F7/70191G03F7/70366
    • An exposure device includes a rotation driving section that rotationally drives an exposure object; a light irradiation section that irradiates an exposure surface of the exposure object with laser light; a slide moving section secured to the rotation driving section or the light irradiation section, and moving the rotation driving section or the light irradiation section along the exposure surface in a direction crossing a direction of rotation of the rotation driving section; a signal generating section that transmits an analog modulating signal to the light irradiation section in accordance with a rotation synchronization signal from the rotation driving section, the analog modulating signal causing an intensity of the laser light to be changed; and a controlling section that controls movements of the rotation driving section, the slide moving section, and the light irradiation section.
    • 曝光装置包括:旋转驱动曝光对象的旋转驱动部; 用激光照射曝光对象的曝光面的光照射部; 滑动移动部分,固定到旋转驱动部分或光照射部分,沿着与旋转驱动部分的旋转方向交叉的方向沿着曝光表面移动旋转驱动部分或光照射部分; 信号生成部,其根据来自所述旋转驱动部的旋转同步信号向所述光照射部发送模拟调制信号,所述模拟调制信号使所述激光的强度变化; 以及控制部,其控制旋转驱动部,滑动移动部和光照射部的移动。